semi合集-English.pdf - 第6908页
SEMI S8-0705 © SEMI 1995, 2005 5 5.2.40 static posture — a fixed posi tion, with minimal movement of the pa rticular bo dy parts. 5.2.41 stooping — bending the head and sh oulders, or the ge neral body, forwa rd and down…
SEMI S8-0705 © SEMI 1995, 2005 4
5.2.17 frequently used — used in processing or job cycle at least once every hour. Multiple tool operation by a
single operator should be considered.
5.2.18 human error — errors which include: failure to perform a required function; performing a function that has
an undesirable consequence; failure to recognize and correct a hazardous condition; or inadequate or incorrect
response to a contingency.
5.2.19 inadvertent actuation — accidental or unintentional activation or deactivation of a control.
5.2.20 infrequently used — used in processing or job cycle less frequently than once every hour. Multiple tool
operation by a single operator should be considered.
5.2.21 installation — the activities performed after the equipment is received at a user site through preparation for
initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up.
5.2.22 lateral pinch — grip in which the object is held between the thumb and the side of the index finger (often
referred to as key grip).
5.2.23 maintenance — planned or unplanned activities intended to keep equipment in good working order.
5.2.24 mock up — a full size physical model of the equipment, generally made of relatively inexpensive materials,
used for human factors evaluation.
5.2.25 neutral posture — the position of the human body in which the joints are least stressed. Generally, the body
in its neutral position is standing erect with the eyes looking forward, and the arms hanging by the sides.
5.2.26 non-neutral (awkward) postures — The position of a joint(s) away from its neutral, or least stressed, posture.
5.2.27 normal line of sight — the line extending from the eyes, perpendicular to the interoccular line and 15 degrees
below the horizontal position of the eye.
5.2.28 operation — consists of functions by which the operator causes the equipment to perform its intended
purpose; these may include loading product and setting or manipulating external controls.
5.2.29 operator — a user that interacts with the equipment only to the degree necessary for the equipment to
perform its intended function.
5.2.30 override — to take precedence over the current control system state.
5.2.31 palmar pinch — grip where the fingers press against the palm of the hand, with the object held between the
fingers and the palm. Thumb is not used (e.g., picking up a sheet of plywood).
5.2.32 personal protective equipment (PPE) — equipment and clothing worn to reduce potential for personal injury
from hazards associated with the task to be performed (e.g., chemical gloves, respirators, safety glasses, etc.). In the
context of this document, cleanroom attire (e.g., gloves, smocks, booties, hoods) is not considered personal
protective equipment.
5.2.33 power grip — a grip in which the fingers and thumb wrap entirely around the handle such that the thumb
contacts or overlaps the index finger.
5.2.34 postural stress — stress occurring when a body position places undue load on the muscles, tendons, nerves,
and blood vessels, or produces pressure on a joint.
5.2.35 primary viewing area — the 30 degree cone around the normal line of site (15 degrees above, below, and to
either side of the line of sight).
5.2.36 problem tasks — tasks which have been defined as presenting ergonomically incorrect conditions that are
likely to cause biomechanical stresses or injury to personnel, misoperation, or damage to equipment or the product.
5.2.37 risk factors — those elements of the design which allow an increased potential for injury/illness to
personnel, or for damage to equipment, environment, or product.
5.2.38 semiconductor manufacturing equipment — equipment used in the design, development, manufacture,
assembly, measurement and test of semiconductors, and associated semiconductor support processes.
5.2.39 service — unplanned activities intended to return equipment, which has failed, to good working order.
SEMI S8-0705 © SEMI 1995, 2005 5
5.2.40 static posture — a fixed position, with minimal movement of the particular body parts.
5.2.41 stooping — bending the head and shoulders, or the general body, forward and downward from an erect
position.
5.2.42 task — a group of related job elements performed within the work cycle and directed toward a specific
objective.
5.2.43 task analysis — an analytical process employed to determine the specific actions required of the user when
operating, maintaining, or servicing equipment, or doing work on single or multiple tools. Within each task, steps
are described in terms of the perception, decision-making, memory storage, posture, and biomechanical
requirements, as well as the expected errors.
5.2.44 tip pinch — grip in which the object is held between the tips of the thumb and index finger.
5.2.45 user — person interacting with the equipment. Users may include operators, maintainers, service personnel,
and others.
5.2.46 user population — a specific cross section of persons that may reasonably be expected to interact with the
equipment to perform operation, maintenance, or service tasks.
5.2.47 validation testing — testing to confirm effectiveness of design. An item’s “effectiveness” is viewed in terms
of its functional design, specific to SEMI S8.
5.2.48 WIP nest — a storage structure for Work in Process (WIP).
5.2.49 work environment — the location where semiconductor devices and associated support processes are
designed, developed, manufactured, assembled, measured, and tested.
5.2.50 workplace layout — the physical arrangement of equipment in the facility.
5.2.51 workspace — the available area where the user is expected to operate, maintain, and service the equipment.
5.2.52 workstation — the location where equipment controls and displays are found or the location of
loading/unloading of material.
6 General Guidelines
6.1 Ergonomics-Related Safety Issues — Ergonomics-related safety issues may exist whenever equipment design,
installation, operation, service, or maintenance factors result in task demands that exceed the information processing
or physical capabilities of properly trained users. For example, ergonomics-related safety issues may result from:
6.1.1 Static or awkward postures,
6.1.2 Repetitive motion,
6.1.3 Poor access, inadequate clearance, and excessive reach,
6.1.4 Lifting of heavy or bulky components,
6.1.5 Displays that are difficult to read or understand,
6.1.6 Controls that are confusing to operate or require too much force, and
6.1.7
Use of non-specific warnings or faults to communicate machine problems.
6.2 Safety-related issues should be designed out or otherwise reduced to an acceptable level prior to production.
Ergonomics-related safety issues are reduced by implementing sound ergonomics engineering principles in design,
and structuring job requirements around human performance capabilities and limitations.
6.3 Equipment should be designed to reduce or eliminate the potential types of error caused by human-machine or
human-task mismatch (e.g., inadvertent actuation, errors of omission or commission).
6.4 Engineering controls are the preferred means to reduce hazards. Where an engineering approach to ergonomic
hazard control is not feasible, the user should implement administrative controls to mitigate hazards by reducing the
duration, frequency, or severity of exposure.
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6.5 Highest priority should be placed on issues which have the potential of resulting in injury to personnel.
Secondary priority should be placed on issues which have the potential of resulting in significant damage to
equipment.
6.6 Information exchange between equipment suppliers and users regarding human-machine interface issues is
encouraged during the development stage, as part of beta site testing, after equipment is in full production, and
throughout the life cycle of the equipment.
6.7 Ergonomics evaluation should be performed throughout the conception, design, build, and install phases to
determine whether ergonomics guidelines have been met. The examination should yield a completed SESC
document (see Appendix 1).
6.7.1 Equipment evaluation should identify risk factors associated with equipment design that affect operation,
training, installation, maintenance, or service tasks.
6.7.2 Use of mock-ups and simulations are beneficial to identify and resolve ergonomic issues before the design is
finalized. Testing should be performed with individuals who are representative of the user population under
anticipated working conditions.
6.7.3 The evaluation should include consideration of multiple pieces of equipment under the control of one
individual, resulting in an operation being repeated several times sequentially. The supplier should state the criteria
for this scenario and include it in the report.
6.8 The overall objective is to provide for equipment effectiveness and for worker safety, convenience, and comfort
when operating and maintaining the equipment.
6.9 Damage or undue deterioration of required garments or PPE should not occur as a result of equipment
operation. Controls, such as knobs and switches, should be designed to be compatible with gloves worn by users for
contamination control or personal protection. For example, cleanroom gloves typically reduce grip strength by 15%.
Equipment displays should consider the potential for impaired vision and hearing that may occur with the use of
cleanroom hoods, chemical goggles, or face shields.
6.10 Technical documentation (e.g., manuals) and on-equipment instructions (e.g., labels, indicators and screen
menus) should be consistent in action, terminology, symbols, and format.
6.11 Equipment customized to meet specific customer requirements should not increase the level of ergonomic risk.
6.12 For recommendations on human interface design, see SEMI E95.
NOTE 2: SEMI E95 provides information on human computer interface. It is not the intent of SEMI S8 to incorporate the
requirements of SEMI E95 by reference.
7 Documentation
7.1 The supplier should provide an evaluation of the equipment to SEMI S8 using Appendix 1, “Supplier
Ergonomic Success Criteria” for measurable criteria. The evaluation should include a determination of the level of
risk associated with non-conformance items. Evaluation of risk should be compatible with the SEMI S10 severity
categories; catastrophic, severe, moderate, and minor.
7.1.1 For each item in Appendix 1 which does not meet the criteria, the evaluation report should include the
measured actual dimensions, and state any supporting rationale for non-compliance. Supporting rationale may
include test data or documented engineering judgment. EXCEPTION: For Section 1, the manual material handling
analysis, the evaluation report should provide documented calculations regardless of the outcome of the analysis.
7.1.2 The evaluation report should also include the following information: manufacturer’s model number, serial
number of unit evaluated, date the equipment was evaluated, a list of all tasks which were evaluated as part of the
analysis and the name of the person performing the evaluation.
7.2 Supplier provided documentation should include administrative controls intended by the supplier to mitigate
ergonomic risks.
7.3 Supplier provided documentation should illustrate any installation requirement necessary to meet SEMI S8
guidelines (e.g., Diagram should show clearance area required for opening hinged panels, operator working area,
allowable range of vertical foot adjustment to keep ergonomic measurements within SESC acceptable limits, etc.).