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SEMI S9-1101 © SE MI 1995, 2001 3 NOTE 4: C onsideration of the toler ance on a nom inal rated frequenc y (e.g., 50 ± 0.5 Hz) is not u sually necessary. 8.4 As an alternati ve to carry i ng out test s on the complete equ…

SEMI S9-1101 © SEMI 1995, 2001 2

4.2 IEC Standard

IEC 61010-1 — Safety Requirements for Electrical

Equipment for Measurement, Control, and Laboratory

Use, Part 1: General Requirements

NOTE 1: Unless otherwise indicated, all documents cited

shall be the latest published versions.

5 Terminology

5.1 1500 ohm impedance network — a network

consisting of a 1500 ohm resistor in parallel with a 0.15

µF capacitor.

5.2 accessible — capable of being contacted by an IEC

accessibility probe (IEC standard test finger, as

described in IEC 61010).

NOTE 2: The test finger is also known, in various IEC

documents, as the “jointed test finger” and “jointed standard

test finger”.

5.3 full load current — current when the equipment is

operated at the maximum manufacturer's specified

operating conditions including all motors and heaters

designed to operate simultaneously.

5.4 hazardous energy — energy of 20 J (Joules) or

more, or an available power level of 240 V*A or more.

5.5 least favorable condition — the condition which is

most likely to result in a test failure.

5.6 permanently connected equipment — Equipment

that is intended to be electrically connected to a supply

by means of connection which can be detached only by

the use of tools.

5.7 primary circuit — an internal circuit which is

directly connected to the external supply mains or other

equivalent source (such as a motor-generator set) which

supplies the electric power. It includes the primary

windings of transformers, motors, other load devices

and the means of connection to the supply mains.

5.8 safe condition  a condition in which all relevant

hazardous energy sources are removed or suitably

contained and all relevant hazardous production

materials are removed or contained, unless this results

in additional hazardous conditions.

5.9 PE Terminal — a terminal which is bonded to

conductive parts of a piece of equipment for safety

purposes and is intended to be connected to an external

protective earthing system.

1 International Electrotechnical Commission, 1, rue de Varembé,

Case Postale 131, CH-1211 Geneva 20, Switzerland. Website:

www.iec.ch

5.10 standby condition — condition in which

equipment is energized and in its idle state.

5.11 tool — an external device used to aid a person in

performing a mechanical function. As used in this

document, tool includes devices such as keys.

5.12 V*A — Volt-ampere.

6 Safety Precautions

6.1 The tests outlined in this document are to be

performed by trained and qualified personnel who have

knowledge of the techniques and the test apparatus

described herein.

7 Calibration and Standardization

7.1 All test equipment should be calibrated and

traceable to a calibration standards organization (e.g.,

National Institute of Standards and Technology (NIST)

in the United States or the National Metrology Institute

in Japan).

7.2 The calibration interval for test equipment should

not exceed one year.

8 Test Conditions

8.1 Except where noted otherwise, the equipment

should be tested under the least favorable conditions

within the manufacturer's operating specifications.

These conditions include:

• supply potential

• supply frequency

• position of movable parts

• operating mode (e.g. full temperature conditions,

motors in operation)

• adjustment of thermostats, regulating devices, or

similar controls in operator-accessible areas

8.2 Test Supply Potential — To determine the least

favorable supply potential for a test, consider:

• multiple-nominal rated potentials (e.g., 120/240 V)

• extremes of nominal rated potential ranges (e.g.,

208–240 V)

8.2.1 Consideration of the tolerance on a nominal rated

potential (e.g., 120 ± 5%) is not necessary.

NOTE 3: Some standards (e.g., IEC 61010-1 and IEC 60950)

may specify 90% and 110% of any rated supply voltage.

8.3 Test Supply Frequency — To determine the least

favorable supply frequency for a test, consider the

nominal frequencies as specified (e.g., 50 Hz, 60 Hz, or

50/60 Hz).

SEMI S9-1101 © SEMI 1995, 20013

NOTE 4: Consideration of the tolerance on a nominal rated

frequency (e.g., 50 ± 0.5 Hz) is not usually necessary.

8.4 As an alternative to carrying out tests on the

complete equipment, tests may be conducted on

circuits, components and sub-assemblies independent of

the equipment, provided that the results of the tests

would be representative of those performed as part of

the assembled equipment.

EXCEPTION: The leakage current and grounding

continuity tests identified in Sections 9.1 and 9.2 should

be completed only on fully assembled equipment.

9 Electrical Tests

9.1 Leakage Current Test for Cord-and-Plug

Equipment

9.1.1 Test Equipment  A 1500 ohm impedance

network and a true RMS voltmeter with an accuracy of

1.0%. The impedance network can be a separate

assembly or incorporated within a leakage current

measuring instrument.

9.1.2 Procedure  For equipment connected to the

facility branch circuit with a cord-and-plug (plug/socket

combination), ensure that the equipment is isolated

(e.g., by placing the equipment on a wooden or other

isolating surface). Connect the equipment to its rated

source of supply with the equipment grounding (PE)

conductor disconnected and operate it at the least

favorable conditions specified by the manufacturer.

Connect the 1500 ohm impedance network between

each accessible metal part and the supply equipment

grounding (PE) conductor. In determining accessibility

of live parts, remove all doors, panels, etc. that are to be

removed by the operator during normal operation.

Using a true RMS voltmeter, measure the voltage drop

across the impedance network. Calculate the leakage

current using the formula:

leaka

Voltage

measured

1500 ohms

9.1.3 Acceptable Results  The maximum calculated

leakage current does not exceed 3.5 mA.

9.2 Grounding Continuity Test

9.2.1 Test Equipment  Low range ohmmeter with a

range to measure 0.10 ohm with an accuracy of 1.0%.

9.2.2 Procedure



Disconnect the equipment from the

supply. For equipment installed with fixed wiring

methods, disconnect the supply equipment grounding

conductor (protective earthing conductor) from the

main equipment grounding terminal (PE Terminal).

Measure the resistance between the power supply

equipment grounding terminal (PE Terminal) and each

accessible metal part (handle, monitor, doors, etc.) on

the equipment using a low-range ohm-meter. Upon test

completion, reconnect the supply equipment grounding

conductor (protective earthing conductor).

EXCEPTION: Grounding Continuity Test is not

required to be measured where accessible metal

surfaces are not likely to become energized in a single

fault condition.

NOTE 5: Some standards (e.g., IEC 60204-1, IEC 61010-1)

may specify this test to be performed using a current injection

method.

9.2.3 Acceptable Results  The resistance between the

grounding conductor terminal and each accessible part

shall not exceed 0.1 ohm.

9.3 Starting Current Test

9.3.1 Test Equipment  None.

9.3.2 Procedure — Start the equipment in accordance

with manufacturer's instructions three times from a

completely stopped condition. Ensure that the time

interval between successive starts is sufficient to allow

the equipment return to ambient conditions.

9.3.3 Acceptable Results  None of the equipment's

overload or overcurrent protections activates during this

test.

NOTE 6: It is recommended that the peak inrush starting

current be measured using an appropriate current measuring

device and recorded in the test report.

9.4 Input Test

9.4.1 Test Equipment  True RMS current measuring

equipment, with accuracy of 3.0%.

9.4.2 Procedure — Measure the input current to the

equipment under the maximum normal operating load

conditions (i.e., with all motors, heaters, etc. running at

manufacturer’s specified maximum loading conditions).

9.4.3 Acceptable Results  The measured current does

not exceed 110% of the rated full load current value

specified on the equipment nameplate.

9.5 Dielectric Test

9.5.1 Test Equipment  Timer with accuracy of ± 5

seconds. Dielectric Withstand Tester with means of

indicating test potential, as well as an audible or visual

indicator of electrical breakdown, or an automatic-

reject feature for any unacceptable unit. In an

alternating current test, the test equipment should

include a transformer having sinusoidal output. This

transformer should have a rating of 500 VA or greater

unless it is provided with a voltmeter that directly

measures the applied output potential.

SEMI S9-1101 © SEMI 1995, 2001 4

9.5.2 Procedure — With the equipment disconnected

from its supply, apply a dielectric withstand potential of

1500 Volts AC or 2121 Volts DC between live metal

parts of primary circuit(s) and dead metal parts. Surge

suppression components and devices, and electronic

components certified by an accredited testing laboratory

that may be damaged may be disconnected from the

circuit for this test. For this test, the following

conditions need to be set:

• The equipment should be at its maximum operating

temperature

• Switches should be placed in the “on” position

• Circuits through contactors be completed by

manually engaging the contacts or bypassing the

contactor terminals.

9.5.2.1 Achieve the test potential gradually, starting

from zero and holding at the maximum value for a

period of one minute.

NOTE 7: A grounded circuit (neutral) conductor, if used in

the circuit, is considered a live part.

NOTE 8: Where line-to-ground filter components are

installed in the equipment, the DC dielectric potential

specified above may be used as an equivalent.

9.5.3 Acceptable Results  The equipment does not

have a dielectric breakdown as indicated by a puncture,

flashover or sparkover.

NOTE 9: Breakdown is often indicated by an abrupt decrease

or nonlinear advance of voltage as the voltage is increased.

Similarly, a breakdown is often indicated by an abrupt

increase in current. Partial discharge (corona) and similar

phenomena are disregarded during application of the test

voltage.

9.6 Strain Relief Test

9.6.1 Test Equipment — Timer with accuracy of ± 5

seconds. A calibrated weight to apply a force of 156

Newtons (35 lb) ± 1.56 Newtons (0.35 lb). A

supporting surface to secure the equipment.

9.6.2 Procedure — For cord-and-plug connected

equipment, strain relief is provided to prevent

mechanical stress such as a pull or twist being

transmitted to terminals, splices or interior wiring.

Support the equipment on a surface so it will not move

when the force is applied to the cord. Apply a direct

pull of 156 N (35 pounds) to the equipment supply cord

from the least favorable angle. If necessary use pulleys

or other means to adjust the angle of force applied to

the strain relief on the equipment. Apply the force

gradually by slowly suspending the weight on the cord

and maintain the applied force for a period of one

minute.

9.6.3 Acceptable Results  The equipment supply

cord does not displace to the extent that stress could be

applied to the internal connections.

9.7 Transformer Output Short Circuit Test

9.7.1 Test Equipment  Timer with accuracy of ± 5

minutes. A substantial conductor suitable for carrying

the short circuit current.

9.7.2 Procedure — With the equipment in its standby

condition, short circuit the output of each power

transformer.

NOTE 10: If overcurrent protection is connected to the output

of the transformer under test, connect the short-circuit jumper

after this protective device.

EXCEPTION 1: Where the overcurrent protective

devices on the input or output of the transformer are

rated at not more than 125% of the rated current of the

transformer respectively and the overcurrent protective

devices are certified by an accredited testing laboratory,

the transformer need not be subjected to this test.

EXCEPTION 2: A thermally-protected or impedance-

protected transformer that is certified by an accredited

testing laboratory need not be subjected to this test.

9.7.3 Acceptable Results  A hazardous condition

(e.g., smoke, fire, or molten material) does not exist

within 8 hours or before activation of overcurrent

protection, thermal protection, or other protective

circuit/device whichever occurs first.

9.8 Power Supply Output Short Circuit Test

9.8.1 Test Equipment  Timer with accuracy of ± 5

minutes. A substantial conductor suitable for carrying

the short circuit current.

9.8.2 Procedure — With the equipment in its standby

condition, short circuit the output of each power supply,

one at a time.

NOTE 11: If overcurrent protection is connected to the output

of the power supply under test, connect the short circuit

jumper after this protective device.

EXCEPTION: A power supply that is certified by an

accredited testing laboratory and used in accordance

with its certification and the manufacturer’s instructions

need not be subjected to this test.

9.8.3 Acceptable Results  A hazardous condition

(e.g., smoke, fire, or molten material) does not exist

within 8 hours or before activation of overcurrent

protection, thermal protection, or other protective

circuit/device whichever occurs first.