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SEMI S12-0298 © SEMI 1998 11 NOTICE: T hese standards do n ot purport to address safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriate safet…

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SEMI S12-0298 © SEMI 1998 10
R2-1.3 The equations used in this method to calculate the oral and dermal “Health-Based Cleanup Levels
(HBCL’s)” are:
HBC
L
oral
= RfD × B
W
SA
O
× MF × CE × AF
O
× EF
HBCL
dermal
= RfD × BW × ED
SA
d
× CE × AF
d
× EF
Where :
RfD = EPA RfD [mg/kg − day]
BW = Body weight [70 kg]
ED = Exposure duration [0.5 days]
SA
O
= Surface area of exposed hands [0.084 m
2
]
SA
d
= Surface area of exposed hands, forearms, and head [0.316 m
2
]
MF = Fraction of exposed dermal are contacted by mouth [0.5/day]
CE = Skin contact efficiency [0.5]
AF
O
= Gastro - intestinal absorption factor [1.0] (conservative)
AF
d
= Dermal absorption factor [0.01]
EF = Exposure factor [12 hours/24 hours; 250 days/365 days; 40 years/70 years = 0.20]
Body weight and surface area factors are as suggested by EPA’s Exposure Factors Handbook (1989). The fraction
of skin contaminant that will be ingested orally (MF) is conservatively assumed to be 50%. This is approximately
equivalent to a person ingesting all of the chemical that contacts the palms of the hands, but not the backs. Contact
efficiency (CE) refers to the fraction of chemical that is removed from the contaminated surface through contact
with the skin. It is assumed that no more than 50% of the chemical contamination from equipment will rub off the
surface and adhere to the skin. Oral and dermal absorption factors are chosen as the most conservative numbers due
to limited available data.
The exposure factor (EF) represents the fraction of time that a person could be expected to be in contact with
chemical contamination from exposed surfaces. Exposure to surfaces is assumed to follow an occupational exposure
scenario. This scenario includes the following conservative assumptions:
• A person works at the facility for 40 years of a 70-year lifetime;
• Exposure occurs 250 days per year (365 days);
• The skin is in contact with the chemicals for 12 hours per day. This assumes that the chemicals are not removed
from the skin until washed, and the skin is washed only once per day.
R2-1.4 The final HBCL for each chemical is then the lower of the levels for oral or dermal exposure routes.
NOTE: These HBCLs represent levels that are considered to be health-protective for a person who contacts equipment with
residual contamination on a daily basis. These values are based on extremely conservative assumptions and are likely to provide
an overestimate of a health-protective clean-up level.
SEMI S12-0298 © SEMI 199811
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S13-0305 © SEMI 1998, 2005 1
SEMI S13-0305
ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR
DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH
SEMICONDUCTOR MANUFACTURING EQUIPMENT
This safety guideline was technically approved by the Global Environmental Health & Safety Committee and
is the direct responsibility of the Japanese Environmental Health & Safety Committee. Current edition
approved by the Japanese Regional Standards Committee on November 24, 2004. Initially available at
www.semi.org in January 2005; to be published in March 2005. Originally published in February 1998.
NOTICE: This document was rewritten in its entirety in 2005.
1 Purpose
1.1 This guideline presents considerations for environmental, health and safety information in documents (such as
operation, maintenance, installation and safety manuals) provided for use with semiconductor or Flat Panel Display
(FPD) manufacturing equipment in order to help risk reduction in operation, maintenance, and installation of
equipment used in semiconductor or FPD manufacturing.
1.2 It is intended that personnel who operate, maintain, service, install, decontaminate or decommission equipment
should read the documents provided to the equipment user that describe the tasks they are to perform.
2 Scope
2.1 This guideline applies to the documents provided to the equipment user to be used with equipment for
production, measurement, assembling, and testing of semiconductor or FPD products.
2.2 This guideline contains the following items:
Purpose
Scope
Limitations
Referenced Standards
Terminology
General Criteria of Documents Provided to the Equipment User
Hazards Inherent in Equipment
Hazardous Energy Control Procedures
Hazard Alerts
Hazards Inherent in Tasks
Material Safety Data Sheet (MSDS)
Personal Protective Equipment (PPE)
Equipment Inspection, Consumables, and Maintenance
Training Requirements
Emergency Contact and Response
Related Documents
Appendix 1: Document Criteria to be added to SEMI S2