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SEMI S13-0305 © SEMI 1998, 2005 11 R2-6 Environmental Information R2-6.1 SEMI S2-0703, ¶9.4 — Th e manufact urer should pr ovide the user with the follow ing enviro nmental document ation as appl icable: R2-6.1.1 ¶9.4.1 …

SEMI S13-0305 © SEMI 1998, 2005 10

RELATED INFORMATION 2

DOCUMENT CRITERIA INCLUDED IN SEMI S2

NOTICE: This related information is not an official part of SEMI S13 and was derived from SEMI S2. This

related information was approved for publication by a letter ballot on November 24, 2004.

R2-1 Purpose of this Related Information

R2-1.1 This related information contains criteria for documents that are presented in SEMI S2.

R2-1.2 The criteria in this related information are included in SEMI S2 as of the time this related information was

written, and are included herein for the convenience of users of this document.

NOTE 1: The information in this related information may not be current with the source document. The source document

contains the actual documentation criteria.

R2-1.3 The criteria in this related information are arranged to correspond with the sections of SEMI S2.

NOTE 2: It was the intent of the Task Force responsible for SEMI S13 that this related information be updated to incorporate

future revisions of SEMI S2 related to criteria for documents.

R2-2 Safety Interlock Systems

R2-2.1 SEMI S2-0703, ¶11.7.2.2 — If a safety interlock is defeated, the maintenance manual should identify

administrative controls to safeguard personnel or to minimize the hazard.

R2-3 Emergency Shutdown

R2-3.1 In case assemblies that are not intended to be used as stand-alone equipment and EMO circuit is not

necessary in the assemblies of the equipment, assembly’s installation manual should provide clear instructions to the

equipment installer to connect the assembly to the integrated system’s emergency off circuit, (based on SEMI S2-

0703, ¶12.1).

R2-3.1.1 SEMI S2-0703, ¶12.1.1 — If the supplier provides an external EMO interface on the equipment, the

supplier should include instructions for connecting to the interface.

R2-4 Electrical Design

R2-4.1 SEMI S2-0703, ¶13.3 — Routine Type 4 tasks, excluding troubleshooting, should have specific written

instructions in the maintenance manuals.

R2-4.2 SEMI S2-0703, ¶13.4.9 — The current interrupting capacity (also known as amperes interrupting capacity,

or AIC) of the equipment main disconnect should be identified in the facility installation and maintenance manuals.

R2-4.3 SEMI S2-0703, ¶13.5.1 — Whenever a UPS is provided with the equipment, its location and wiring should

be clearly described within the installation and maintenance manual.

R2-5 Seismic Information

R2-5.1 SEMI S2-0703, ¶19.3 — The supplier should provide the following data and procedures to the user. This

information should be included in the installation instructions as part of the documentation covered in §9.

 A drawing of the equipment, its support equipment, its connections (e.g., ventilation, water, vacuum, gases) and

the anchorage locations identified in ¶19.4.

 The type of feet used and their location on a base frame plan drawing.

 The weight distribution on each foot.

 Physical dimensions, including width, length, and height of each structurally independent module.

 Weight and location of the center of mass for each structurally independent module.

 Acceptable locations on the equipment frame for anchorage.

SEMI S13-0305 © SEMI 1998, 2005 11

R2-6 Environmental Information

R2-6.1 SEMI S2-0703, ¶9.4 — The manufacturer should provide the user with the following environmental

documentation as applicable:

R2-6.1.1 ¶9.4.1 — Energy consumption information, including idle, average, and peak operating conditions, for the

manufacturer’s most representative (“baseline”) process.

R2-6.1.2 ¶9.4.2 — Mass balance, including idle, average, and peak operating conditions, for the manufacturer’s

most representative (“baseline”) process.

NOTE 3: The mass balance may include resource consumption rates, chemical process efficiencies, wastewater effluent and air

emission characterization, solid and hazardous waste generation (quantity and quality), and by-products.

R2-6.1.3 ¶9.4.3 — Information regarding routes of unintended release (of effluents, wastes, emissions, and by-

products) and methods and devices to monitor and control such releases. This should include information on

features to monitor, prevent, and control unintended releases (see ¶21.2.4).

R2-6.1.4 ¶9.4.4 — Information regarding routes of intended release (of effluents, wastes, and emissions) and

features to monitor and control such releases (see ¶21.2.5).

R2-6.1.5 ¶9.4.5 — A list of items that become solid waste as a result of the operation, maintenance, and servicing

of the equipment, and that are constructed of or contain substances whose disposal might be regulated (e.g.,

beryllium-containing parts, vapor lamps, mercury switches, batteries, contaminated parts, maintenance wastes).

R2-7 Exhaust Ventilation

R2-7.1 SEMI S2-0703, ¶22.3 — Documentation should be developed showing the equipment exhaust parameters

and relevant test methods, and should include (see also Appendix 2):

 duct velocity (where needed to transport solid particles);

 volumetric flow rate Q;

 capture velocity (where airborne contaminants are generated outside an enclosure);

 face velocity (where applicable);

 hood entry loss factor F

or K;

 coefficient of entry C

;

 hood static pressure SP

;

 duct diameter at the point of connection to facilities; and

 location(s) on the duct or hood where all ventilation measurements were taken.

R2-8 Manuals

R2-8.1 SEMI S2-0703, ¶9.6

R2-8.1.1 ¶9.6.1 — The supplier should provide the user with manuals based on the originally intended use of the

equipment. The manuals should describe the scope and normal use of the equipment, and provide information to

enable safe facilitization, operation, maintenance, and service of the equipment.

R2-8.1.2 ¶9.6.2 — The manuals should conform to SEMI S13.

NOTE 4: Fire suppression agents, and chemicals used to test fire detection or suppression systems, fall under the MSDS

provisions of SEMI S13 when they are provided with the equipment.

NOTE 5: Hazardous energies within fire detection or suppression systems fall under the hazardous energy control provisions of

SEMI S13 when fire detection or suppression systems are provided with the equipment.

R2-8.1.3 ¶9.6.3 — In addition to the provisions of SEMI S13, the manuals should include:

 specific written instructions on routine Type 4 tasks, excluding troubleshooting (refer to ¶13.3);

 instructions for energy isolation (“lockout/tagout”) (refer to ¶17.2);

 descriptions of the emergency off (EMO) and interlock functions;

 a list of hazardous materials (e.g., lubricants, cleaners, coolants) required for maintenance, ancillary equipment

or peripheral operations, including anticipated change-out frequency, quantity, and potential for contamination

from the process;

 a list of items that become solid waste as a result of the operation, maintenance, and servicing of the equipment,

and that are constructed of or contain substances whose disposal might be regulated (e.g., beryllium-containing

parts, vapor lamps, mercury switches, batteries, contaminated parts, maintenance wastes); and

 maintenance and troubleshooting procedures needed to maintain the effectiveness of safety design features or

devices (i.e., engineering controls).

R2-8.1.4 ¶9.6.4 — Information should be provided regarding potential routes of unintended releases (see ¶21.2.4).

R2-8.1.5 ¶9.6.5 — Recommended decontamination and decommissioning procedures should be provided in

accordance with SEMI S12, and should include the following information:

 identity of components and materials of construction, in sufficient detail to support recycling, refurbishment,

and reuse decisions (see ¶8.5.3); and

 residual hazardous materials, or parts likely to become contaminated with hazardous materials, that may be in

the equipment prior to decommissioning.

NOTE 6: It is recommended that the manual state that changes to the typical process chemistry or to the equipment could alter

the anticipated environmental impact.

R2-8.1.6 ¶9.6.6 — Maintenance Procedures with Potential Environmental Impacts — The supplier’s recommended

maintenance procedures should:

R2-8.1.6.1 Identify procedural steps during which releases might occur, and the nature of the releases; and identify

waste characteristics and methods to minimize the volume of effluents, wastes, or emissions generated during

maintenance procedures.