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SEMI S16-0600 © SEMI 2000 2 5.1.3 disposal to dispos e of equip m e nt a nd/or compon e nt/m aterial based on l e gislat ion or indust ry/region al standard practices . 5.1.4 dispos al party a party who d i sposes of…
SEMI S16-0600 © SEMI 20001
SEMI S16-0600
ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINES FOR
SEMICONDUCTOR MANUFACTURING EQUIPMENT DISPOSAL
These guidelines were technically approved by the Global Environmental, Health and Safety Committee and
are the direct responsibility of the Japanese Environmental, Health and Safety Committee. Current edition
approved by the Japanese Regional Standards Committee on April 28, 2000. Initially available on
www.semi.org June 2000; to be published June 2000.
1 Purpose
1.1 This document provides guidelines to minimize
hazards to workers and impacts to the environment
during equipment and component disposal.
2 Scope
2.1 These guidelines apply to the disposal of
semiconductor manufacturing equipment, its materials
and components and equipment design consideration to
facilitate disposal.
2.2 These guidelines are intended to be voluntary best
practices for this industry. These guidelines apply to
disposal parties, equipment designers, equipment
manufacturers, equipment suppliers and equipment
owners. The information should be provided to the
disposal party by the equipment owner prior to contract
negotiations.
2.3 These safety guidelines do not purport to address
all of the safety issues associated with its use. It is the
responsibility of the users of these guidelines to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Limitation
3.1 These guidelines are not intended to supersede the
applicable codes and regulations of the region where
the equipment is disposed.
3.2 Section 6 in these guidelines should be applied not
to existing models and subsystems but to newly
designed models and subsystems after publication of
these guidelines.
4 Referenced Standards
4.1 SEMI Standards
SEMI S1 Safety Guidelines for Visual Hazard Alerts
SEMI S2 Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
SEMI S10 Safety Guideline for Risk Assessment
SEMI S12 Environment, Health and Safety
Guidelines for Equipment Decontamination
SEMI S13 Safety Guidelines for Operation and
Maintenance Manuals Used with Semiconductor
Manufacturing Equipment
4.2 ISO Documents
1
ISO11469 Plastics; Generic Identification and
Marking of Plastic Products
ISO14001 1996 Environment Management Systems,
Specifications with Guideline for Use
4.3 CEN
2
/ CENELEC
3
Document
EN1050 Safety of Machinery—Principles for Risk
Assessment
4.4 OSHA Document
4
29 CFR 1910. 1200 Labor
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Terminology defined in SEMI S1, S2, S12, and
S13 should be referred to except if otherwise specified
below.
5.1.1 decontaminate
to remove all known hazards
from equipment, including chemical, physical,
electrical, to a level that will not pose a threat or harm
to humans or the environment. This level may be set by
each country, state and local regulations or industry
practice.
5.1.2 decontamination
the process required to
remove hazards to an acceptable level of risk (see
Section 5.1).
1 International Standards Organization, 1, rue de Varembe, Case
postale 56, CH-1211 Geneve 20, Switzerland.
2 European Committee for Standardization, 36, rue de Stassart, B-
1050 Brussels, Belgium
3 European Committee for Electrotechnical Standardization, Rue de
Stassart, 35, B-1050 Brussels, Belgium
4 US Government Printing Office, Washington, D.C. 20402
SEMI S16-0600 © SEMI 2000 2
5.1.3 disposal
to dispose of equipment and/or
component/material based on legislation or
industry/regional standard practices.
5.1.4 disposal party
a party who disposes of
equipment and its components.
5.1.5 EMAS
Eco-Management and Audit Scheme
which came into force in July, 1993 and operational in
the EU Member States in April, 1995.
5.1.6 equipment owner
a party who surrenders
equipment to a disposal party or disposals of potentially
contaminated materials or components.
5.1.7 hazardous energy
energy with the potential to
affect human health or the environment.
5.1.8 hazardous material
materials including
chemicals (solid, liquid or gas) that pose a threat to the
environment or human health as defined by
international, each country and local regulations.
5.1.9 Material Safety Data Sheet (MSDS)
written or
printed material concerning chemical elements and
compounds, including hazardous materials, prepared in
accordance with applicable standards such as the
International Labor Convention (ILC) No. 170,
provisions of USA government regulation 29 CFR
1910,1200, or Canadian WHMIS (Workplace
Hazardous Material Information System).
6 Equipment Design for Disposal
6.1 The equipment design should comply with
environment section of SEMI S2.
6.2 The equipment design should consider the
following regarding disassembly prior to waste
treatment:
6.2.1 The equipment design should encourage
refurbishing, reuse or recycling.
6.2.1.1 The equipment design should enable
disassembly down to the component or subassembly
size to facilitate refurbishing or recycling.
6.2.1.2 The equipment design should provide for the
ability to appropriately decontaminate all components.
6.2.2 The equipment design should consider enabling
all hazardous energies in/on the equipment to be
reduced to a non-hazardous level upon equipment
disassembly. If a hazardous energy still remains, see
Section 7 of this document.
6.2.2.1 This includes the ability to release or remove
any trapped materials.
6.2.3 The equipment design should avoid mixing of
incompatible chemicals upon equipment disassembly.
If this is not feasible, an appropriate hazard alert label
based on SEMI S1 should be affixed at each applicable
position (see Section 7 of this document).
6.2.4 The equipment design should prevent release of
hazardous materials to the environment upon equipment
disassembly. If this is not feasible, see Section 7 of this
document.
6.3 Chemicals used to maintain the equipment or
chemicals used in the baseline process should comply
with following sub-sections.
6.3.1 Materials for which special disposal procedures
are required, such as batteries (lithium, ni-cad, mercury
and silver), mercury and fluorescent lamps, and other
potentially hazardous material should be accompanied
by material safety data sheet (MSDS) or other
document describing necessary information for disposal
and instructions for safe handling and disposal.
6.3.2 Additional information on proper disposal of
materials, designed into the equipment with the intent
of being contaminated but disposable, but not
hazardous themselves until contaminated, such as
absorbents and adsorbents, should also be provided
with disposal procedures which minimize
environmental impact and personnel effect.
6.3.3 Equipment containing ionizing radiation sources
subject to licensing by federal or local agencies should
be constructed so as to allow the easy removal of
ionizing radiation sources. Disposal of ionizing
radiation sources must be in compliance with applicable
each country, state and local regulations.
6.4 Construction materials and components of
equipment should be selected by considering their
environmental impacts based on the supplier’s
environment management program. Environment
management programs should be constructed based on
ISO14001, EMAS or other environment management
system.
6.5 The hazardous and primary construction materials
of equipment should be provided in document such as
operation and/or maintenance manuals based on the
supplier’s environment management program.
6.5.1 Recycling category identification should be
molded as part of the material or labeled on the
material. This requirement should only be applied to
non-metallic materials which are capable of being
molded or labeled.
6.5.2 Identification and marking of plastics should
comply with ISO11469 unless local regulations differ.
This requirement should be applied to only materials
which are able to be molded or labeled.
SEMI S16-0600 © SEMI 20003
7 Information Provided by the Supplier
7.1 The supplier should provide the equipment owner
with operation and/or maintenance manuals or similar
documents drafted according to SEMI S13, which
include the following information on the materials used
in equipment, subassemblies and components upon the
delivery of the equipment:
NOTE 2: The supplier may gather appropriate information at
the time of design in conjunction with a disposal party.
7.1.1 Primary materials of appropriate disassemble-
able unit in consideration with reuse, refurbishing,
recycling and disposal of each component such as,
chemicals (e.g., mercury), metals (e.g., stainless steel,
steel, or copper), plastics (e.g., ABS - i.e., Acrylon-
itorile Butadiene Styrene plastics - or non-combustible
ABS), glass, or ceramics.
7.1.2 Describe opportunities for reuse, refurbishing or
material recycling of every component or recyclable
subassembly. If there are no opportunities, a waste
disposal method should be recommended based on
assumption of usage with baseline process by the
supplier. (e.g., ABS can be recycled after
decontamination as class X plastic and mercury
requires reclaim or hazardous waste disposal.)
7.1.3 Disassembly Procedure
7.1.3.1 A disassembly procedure should be
recommended by the supplier to the level required to
facilitate complete decontamination and material
separation for waste disposal.
7.1.3.2 The disassembly procedure should include
procedures to remove all hazardous energies.
7.1.3.3 The disassembly procedure should prevent the
mixture of incompatible chemicals. If it is not feasible,
administrative control procedures should be included.
7.1.3.4 If the chemicals/materials described from
Sections 7.1.3.4.1 to 7.1.3.4.4 are hazardous, the
disassembly procedure should prevent the release of
them to the environment. The chemicals include:
7.1.3.4.1 Chemicals used to maintain the equipment
(e.g., lubricant and coolant).
7.1.3.4.2 Other potentially hazardous items which are
parts of the equipment, such as capacitors, batteries,
lamps or mercury, which require special disposal
procedures.
7.1.3.4.3 Chemicals used in the baseline process of the
equipment manufacturer.
7.1.3.4.4 Anticipated byproducts of the baseline
process.
NOTE 3: Byproducts are changeable according to several
kinds of conditions such as exhaust diameter/length/volume,
chamber volume/pressure/configuration, maintenance meth-
od/cycle, and evacuation frequency.
7.1.3.4.5 The disassembly procedure should address
any hazards of ionizing radiation sources, if they are
present, and address safe removal and storage
procedures.
7.1.4 Disposal procedure should be a safer way based
on the result of risk assessment such as SEMI S10 or
EN 1050 and job hazard analysis.
8 Information Provided by t he Equipment
Owner
8.1 Prior to disposal, the equipment owner should
provide the following information to the disposal party
in order to reflect all residual waste hazards. This
information should be provided to any party handling
the waste regardless of intention to dispose or recycle
the equipment unless the component in question is fully
decontaminated.
8.1.1 Relevant information provided by the supplier
per Section 7 of this document.
8.1.2 Chemicals used in the equipment owner specific
process other than the baseline process and its
byproducts.
8.1.3 Decontamination and waste disposal method for
parts contaminated by an equipment owner specific
process other than the baseline process.
8.1.4 The minimal information of necessary personal
protective equipment (PPE) based on the equipment
usage history.
NOTE 4: PPE and necessary training are to be specified by
the employer of those personnel to be protected.
8.1.5 The details of the decontamination procedure
and any remaining chemicals and their locations after
the equipment owner has completed initial
decontamination of the equipment.
9 Selection of the Disposal Party
9.1 The disposal party must comply with
regional/national codes and regulations related to the
receipt, transfer and disposal of equipment.
NOTE 5: A specially controlled industrial waste disposal
license as well as a specially controlled waste collection and
transfer license may be typically required by the relevant
country’s government.
9.2 The incident and compliance record of the waste
disposal party should be considered at the time when a
selection of the disposal party is made.