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SEMI S17-0701 © SEMI 2001 5 circuitry of the secondary non-contact system is not limited to electro mechanical or solid st ate devices and compon e nts. 10.1.2.2 Wh ere solid-state devices and c o mpo nents are us ed in …
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8 Emergency Shutdown
8.1 Emergency Shutdown for both Space-Traveling
and Floor-Traveling Vehicles — In addition to the
emergency shutdown provisions of SEMI S2, UTV
equipment should also conform to the following
provisions.
8.1.1 The UTV should be equipped with an emergency
off (EMO) circuit that, when activated, immediately
stops the operation and motion of the UTV, including
both travel and load/unload operation. The EMO circuit
should be activated whenever the following actions
occurs:
a) An EMO button on the UTV is pressed.
b) An EMO at a fixed floor location is pressed.
NOTE 4: See Section 9.2 for handheld remote control.
8.1.2 Once an EMO circuit has been activated, the
UTV should not move under its own power until the
cause of the emergency condition has been resolved and
the system has been reset by a human operation. The
system should not reset or restart automatically.
8.2 Position of EMO Buttons on Floor-Traveling
Vehicles — Structure-mounted EMO buttons should be
located for easy accessibility by factory personnel.
8.2.1 Vehicle-mounted EMO Buttons should be
accessible and visible from all sides of the vehicle,
typically on the four-corners of a floor-traveling
vehicle.
8.3 Position of EMO Buttons for Space-Traveling
Vehicle Systems
EMO buttons should be located for
easy accessibility by factory personnel, for example:
• Near control panels or operator terminals including
handheld vehicle remote controls.
• Near process equipment load ports or stations.
• On walls or other fixed locations in the factory area
where space-traveling vehicles operate.
NOTE 5: Some end user customers may request EMO buttons
included on the space-traveling vehicle.
8.3.1 Since space-traveling vehicle EMO buttons are
typically remote from the vehicles, space-traveling
systems should provide a method of determining the
location of the activated EMO button. This will ensure
that the emergency condition can be identified and
resolved prior to resetting the system per Section 8.1.2.
9 Manual Operation
9.1 Manual Movement of both Space Traveling and
Floor-Traveling Vehicles — When the EMO is
activated, the UTV should be capable of brake release
to allow for release of a potentially trapped person.
9.1.1 The UTV should be equipped with a manual
movement function that permits a human operator to
maneuver the vehicle in the event of a problem. In the
event of a problem, manual movement of all vehicle
functions including travel and load/unload
should be
allowed.
9.2 Manual/Remote Operation of both Space-
Traveling and Floor-Traveling Vehicles — Except for
EMO and E-Stop, any control of a vehicle outside of
automated operation should be exclusive. Other
devices should not override vehicle control or cause
movement of more than one vehicle at a time.
EXCEPTION:Those controls that do not cause motion.
9.2.1 Manual control of a vehicle motion that could
present a hazard if control is lost should be controlled
with an enabling type switch, such that movement is
enabled only when a switch is continuously held
(pressed) by an operator.
9.2.1.1 Handheld remote controls should have an E-
Stop or EMO function to allow operators to stop
movement that could cause risk to themselves or others.
If remote control is wireless, this function should not be
marked or labeled as an EMO.
9.2.1.2 During handheld remote control operation, the
UTV should stop any vehicle motion that could create a
hazard if power or the communication signal is lost.
10 Vehicle Travel
10.1 Collision Avoidance for both Space-Traveling
and Floor-Traveling Vehicles — UTVs should provide
for protection of persons in the same traveling space
from injury. Damage to property or equipment from
traveling vehicles should also be prevented.
10.1.1 The UTV system supplier should provide
documentation specifying safe practices for working
within traveling space of the UTVs, to include
documented administrative procedures necessary to
work safely while performing maintenance on or near
operating UTV systems.
10.1.2 UTVs should be equipped with non-contact
approach sensing system so those vehicles do not
inadvertently contact people or other obstacles during
the traveling motion of the UTV. Non-contact
approach sensing systems should consist of either
electromechanical (preferred) or solid-state devices and
components and be designed to be fault-tolerant.
10.1.2.1 If an overhead vehicle is provided with a
fault-tolerant contact sensing system (such as a bumper
switch), as primary safety protection for people, the
SEMI S17-0701 © SEMI 20015
circuitry of the secondary non-contact system is not
limited to electromechanical or solid state devices and
components.
10.1.2.2 Where solid-state devices and components
are used in an approach sensing system circuit, the
system and relevant parts of the system should be
evaluated for suitability for use. Abnormal conditions
such as overvoltage, undervoltage, power supply
interruption, transient overvoltage, ramp voltage,
electromagnetic susceptibility, electrostatic discharge,
thermal cycling, humidity, dust, vibration, and jarring
should be considered.
EXCEPTION: When the severity of a reasonably foreseeable
mishap is deemed to be Minor per SEMI S10, a software
based control may be considered suitable.
10.1.2.3 Upon request by the user customer, suppliers
should provide a test piece or set of test pieces
(appropriate to the sensor device provided) along with
procedures for testing and calibration.
10.1.3 When a UTV detects a vehicle or obstacle, the
UTV should decelerate and stop automatically before it
touches that vehicle or obstacle. If the non-contact
approach sensing device should be disabled (for
example because the UTV is negotiating a sharp turn),
the UTV should decelerate and issue a warning (see
Hazard Alarms and Displays section of this document)
to indicate that the sensing device has been disabled.
10.1.4 In an area where multiple UTVs are operating,
the capability to prevent the collision of one vehicle
with another should be provided and to satisfy Section
10.1.3, should consider the following conditions:
a) The distance between a given vehicle and the
vehicle that follows it.
b) The timing at which one stream of vehicles merges
with another.
c) The timing at which a vehicle branches out from a
stream of vehicles to pass another vehicle moving
toward it.
d) The distance that separates two vehicles when they
pass each other.
10.2 Collision Detection for Floor-Traveling Vehicles
— In addition to Section 10.1, floor-traveling vehicles
should also be equipped with a contact sensing device
(such as a bumper switch) capable of detecting collision
in the direction in which motion can create a hazard.
10.2.1 The bumpers should have a shape and structure
that does not pose a risk to personnel or to objects
around the floor-traveling vehicle.
10.2.2 The bumpers should be equal to or larger than
the width of the floor-traveling vehicle body, as
measured perpendicular to the direction of its traveling
motion.
10.2.3 The maximum allowable distance between a
bumper and the floor is 15 mm (0.6 inch).
EXCEPTION: If this provision cannot be maintained, (such
as when the floor-traveling vehicle enters an elevator, or
changes in floor height) the distance should be explicitly
stated in the operation manuals (and the specifications) as an
alert or warning notice to appropriate personnel.
10.2.4 If an obstacle contacts a bumper, the floor-
traveling vehicle should be able to stop within the
bumper stroke, irrespective of the speed at which the
vehicle is traveling. If this provision cannot be met for
technical reasons, the floor-traveling vehicle supplier
should clearly indicate the maximum speed at which the
vehicle can stop within the bumper stroke.
10.2.5 There should not be any device that disables the
functionality of the bumper switch or sensor on floor-
traveling vehicles.
10.2.6 If a bumper switch or sensor has been activated
by contact, a floor-traveling vehicle should not restart
until the system has been reset by a human operation.
NOTE 6: Since space-traveling vehicles travel in dedicated
space above the heads of factory personnel, criteria for space-
traveling vehicle bumpers are not included.
10.3 Protective Zones for Space-Traveling Vehicles —
Written administrative procedures for creating a
protective zone around personnel, required to work
overhead in the path of space-traveling vehicles, should
be included in documentation provided by the UTV
system supplier.
NOTE 7: Implementation of these administrative procedures
is the responsibility of the end user customer.
10.4 Travel Speed of Floor-Traveling Vehicles —
Floor-traveling vehicles, intended for use in areas
where there are both operating vehicles and personnel
present, should be equipped with a variable speed-
setting mechanism.
10.4.1 The variable speed settings designed for use in
areas with both operating vehicles and personnel should
not exceed 60 meters/minute (196 feet/minute). Any
variable speed settings exceeding 60 meters/minute
(196 feet/minute) should be reserved for use in
dedicated and unmanned areas for which personnel
safety can be assured.
10.4.2 The variable speed setting mechanism of a
floor-traveling vehicle should be designed so that only
authorized personnel, following access control
procedures, can change the vehicle’s speed setting.
NOTE 8: Criteria for traveling speeds of space-traveling
vehicles are not included in this sub-section.
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11 Material Protection
11.1 Material Protection for both Floor Traveling and
Space-Traveling Vehicles — UTVs should provide for
protection of the load when the UTV is traveling and
during load/unload operations until safe transfer has
been confirmed. UTV’s should have an appropriate
communication interface (For example SEMI standards
such as SEMI E23 or SEMI E84). The UTV system
supplier should document the exact method of
confirmation.
11.1.1 UTVs should be designed so a single point of
failure of the UTV system does not allow a load to fall.
11.1.2 Vehicles should be designed to prevent any
load/unload movement when in traveling mode.
11.1.3 UTV load holding mechanisms should have
load-shift prevention mechanism (such as stoppers), so
that if the vehicle stops suddenly, the load is securely
held in place.
11.2 Material Protection for Floor-Traveling Vehicles
— In addition to the load protection provisions in
Section 11.1, the following should also be provided on
floor-traveling vehicles.
11.2.1 The floor-traveling vehicle should be designed
to prevent loads from being placed on the vehicle so
that the load overhangs any edge (length or width) of
the vehicle.
11.3 Material Protection for Space-Traveling Vehicles
— In addition to the load protection provisions in
Section 11.1, the following should also be provided on
space-traveling vehicles:
11.3.1 If secondary protection is required to meet
Section 11.1.2 or to prevent loads from falling, covers
or shields should be provided along rails to protect
personnel from injury from falling loads.
11.3.2 Inadvertent lowering or uncontrolled drops of
the vehicles’ hoist mechanisms or loads should also be
prevented.
12 Load/Unload Operation
12.1 Protection from Load/Unload Motion of both
Floor-Traveling and Space-Traveling Vehicles —
UTVs should have protection functions during
load/unload operation to insure safety of the vehicle,
the load and the equipment, until load/unload is
completed.
12.1.1 Safety of personnel entering the load/unload
area should be provided by a method agreed upon by
the UTV supplier and the user.
12.1.2 UTVs should have an appropriate
communication interface in order to provide the
following functions. Examples for such interfaces are
SEMI E84 or E23
.
• confirm safe transfer of a load
• prevent transfer of loads prior to load port
readiness
• notify affected factory personnel of abnormal
load/unload conditions
• prevent transfer of loads when equipment is in
manual delivery mode (PGV mode)
• prevent transfer of loads when equipment is at risk.
12.1.3 The UTV system supplier should provide to the
end user customer documentation to ensure the UTV
system interfaces properly with manufacturing
equipment shields (if required), communications
protocols, or other method necessary to prevent transfer
of loads when equipment is at risk.
12.2 Protection from Load/Unload Motion of Floor-
Traveling Vehicles — In addition to the load/unload
provisions in Section 12.1, the following should also be
provided on floor-traveling vehicles:
12.2.1 Load/unload mechanisms (transfer robots) on
floor-based vehicles should be isolated or shielded as
necessary to restrict contact with factory personnel.
Measures should also be taken to prevent inadvertent
motion of load/unload mechanisms.
12.2.2 If robotic manipulators are used on floor-
traveling vehicles for load/unload operations, the
robotic manipulator should meet requirements of the
appropriate international or national standard (e.g.,
ISO 10218, EN775, or ANSI/RIA 15.06). If there are
deviations from these general industry standards
because of unique semiconductor applications, these
deviations should be documented by the evaluator and
assigned a risk factor according to a risk assessment.
13 Hazard Indicators
NOTE 9: The integrated design of any hazard indicator
system or other safety system requires a coordinated effort
among the UTV system supplier, the process equipment
supplier, and the end user customer. The following are the
minimum hazard indicators to be designed into UTV system
equipment.
13.1 Hazard Alarms and Lamps for both Floor-
Traveling and Space-Traveling Vehicles — The
following indicators should be provided on all UTVs,
but should be able to be configured to be compatible
with the overall factory design for safety.
13.1.1 UTV suppliers should provide documentation
of available configurations.