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SEMI S17-0701 © SEMI 2001 6 11 Mat erial Protect ion 11.1 Materi al Protection for bot h F l o o r Travel ing and Space-Traveling Ve hicles — UTVs s hould provide f or protection of th e load when the UTV is traveling an…
SEMI S17-0701 © SEMI 20015
circuitry of the secondary non-contact system is not
limited to electromechanical or solid state devices and
components.
10.1.2.2 Where solid-state devices and components
are used in an approach sensing system circuit, the
system and relevant parts of the system should be
evaluated for suitability for use. Abnormal conditions
such as overvoltage, undervoltage, power supply
interruption, transient overvoltage, ramp voltage,
electromagnetic susceptibility, electrostatic discharge,
thermal cycling, humidity, dust, vibration, and jarring
should be considered.
EXCEPTION: When the severity of a reasonably foreseeable
mishap is deemed to be Minor per SEMI S10, a software
based control may be considered suitable.
10.1.2.3 Upon request by the user customer, suppliers
should provide a test piece or set of test pieces
(appropriate to the sensor device provided) along with
procedures for testing and calibration.
10.1.3 When a UTV detects a vehicle or obstacle, the
UTV should decelerate and stop automatically before it
touches that vehicle or obstacle. If the non-contact
approach sensing device should be disabled (for
example because the UTV is negotiating a sharp turn),
the UTV should decelerate and issue a warning (see
Hazard Alarms and Displays section of this document)
to indicate that the sensing device has been disabled.
10.1.4 In an area where multiple UTVs are operating,
the capability to prevent the collision of one vehicle
with another should be provided and to satisfy Section
10.1.3, should consider the following conditions:
a) The distance between a given vehicle and the
vehicle that follows it.
b) The timing at which one stream of vehicles merges
with another.
c) The timing at which a vehicle branches out from a
stream of vehicles to pass another vehicle moving
toward it.
d) The distance that separates two vehicles when they
pass each other.
10.2 Collision Detection for Floor-Traveling Vehicles
— In addition to Section 10.1, floor-traveling vehicles
should also be equipped with a contact sensing device
(such as a bumper switch) capable of detecting collision
in the direction in which motion can create a hazard.
10.2.1 The bumpers should have a shape and structure
that does not pose a risk to personnel or to objects
around the floor-traveling vehicle.
10.2.2 The bumpers should be equal to or larger than
the width of the floor-traveling vehicle body, as
measured perpendicular to the direction of its traveling
motion.
10.2.3 The maximum allowable distance between a
bumper and the floor is 15 mm (0.6 inch).
EXCEPTION: If this provision cannot be maintained, (such
as when the floor-traveling vehicle enters an elevator, or
changes in floor height) the distance should be explicitly
stated in the operation manuals (and the specifications) as an
alert or warning notice to appropriate personnel.
10.2.4 If an obstacle contacts a bumper, the floor-
traveling vehicle should be able to stop within the
bumper stroke, irrespective of the speed at which the
vehicle is traveling. If this provision cannot be met for
technical reasons, the floor-traveling vehicle supplier
should clearly indicate the maximum speed at which the
vehicle can stop within the bumper stroke.
10.2.5 There should not be any device that disables the
functionality of the bumper switch or sensor on floor-
traveling vehicles.
10.2.6 If a bumper switch or sensor has been activated
by contact, a floor-traveling vehicle should not restart
until the system has been reset by a human operation.
NOTE 6: Since space-traveling vehicles travel in dedicated
space above the heads of factory personnel, criteria for space-
traveling vehicle bumpers are not included.
10.3 Protective Zones for Space-Traveling Vehicles —
Written administrative procedures for creating a
protective zone around personnel, required to work
overhead in the path of space-traveling vehicles, should
be included in documentation provided by the UTV
system supplier.
NOTE 7: Implementation of these administrative procedures
is the responsibility of the end user customer.
10.4 Travel Speed of Floor-Traveling Vehicles —
Floor-traveling vehicles, intended for use in areas
where there are both operating vehicles and personnel
present, should be equipped with a variable speed-
setting mechanism.
10.4.1 The variable speed settings designed for use in
areas with both operating vehicles and personnel should
not exceed 60 meters/minute (196 feet/minute). Any
variable speed settings exceeding 60 meters/minute
(196 feet/minute) should be reserved for use in
dedicated and unmanned areas for which personnel
safety can be assured.
10.4.2 The variable speed setting mechanism of a
floor-traveling vehicle should be designed so that only
authorized personnel, following access control
procedures, can change the vehicle’s speed setting.
NOTE 8: Criteria for traveling speeds of space-traveling
vehicles are not included in this sub-section.
SEMI S17-0701 © SEMI 2001 6
11 Material Protection
11.1 Material Protection for both Floor Traveling and
Space-Traveling Vehicles — UTVs should provide for
protection of the load when the UTV is traveling and
during load/unload operations until safe transfer has
been confirmed. UTV’s should have an appropriate
communication interface (For example SEMI standards
such as SEMI E23 or SEMI E84). The UTV system
supplier should document the exact method of
confirmation.
11.1.1 UTVs should be designed so a single point of
failure of the UTV system does not allow a load to fall.
11.1.2 Vehicles should be designed to prevent any
load/unload movement when in traveling mode.
11.1.3 UTV load holding mechanisms should have
load-shift prevention mechanism (such as stoppers), so
that if the vehicle stops suddenly, the load is securely
held in place.
11.2 Material Protection for Floor-Traveling Vehicles
— In addition to the load protection provisions in
Section 11.1, the following should also be provided on
floor-traveling vehicles.
11.2.1 The floor-traveling vehicle should be designed
to prevent loads from being placed on the vehicle so
that the load overhangs any edge (length or width) of
the vehicle.
11.3 Material Protection for Space-Traveling Vehicles
— In addition to the load protection provisions in
Section 11.1, the following should also be provided on
space-traveling vehicles:
11.3.1 If secondary protection is required to meet
Section 11.1.2 or to prevent loads from falling, covers
or shields should be provided along rails to protect
personnel from injury from falling loads.
11.3.2 Inadvertent lowering or uncontrolled drops of
the vehicles’ hoist mechanisms or loads should also be
prevented.
12 Load/Unload Operation
12.1 Protection from Load/Unload Motion of both
Floor-Traveling and Space-Traveling Vehicles —
UTVs should have protection functions during
load/unload operation to insure safety of the vehicle,
the load and the equipment, until load/unload is
completed.
12.1.1 Safety of personnel entering the load/unload
area should be provided by a method agreed upon by
the UTV supplier and the user.
12.1.2 UTVs should have an appropriate
communication interface in order to provide the
following functions. Examples for such interfaces are
SEMI E84 or E23
.
• confirm safe transfer of a load
• prevent transfer of loads prior to load port
readiness
• notify affected factory personnel of abnormal
load/unload conditions
• prevent transfer of loads when equipment is in
manual delivery mode (PGV mode)
• prevent transfer of loads when equipment is at risk.
12.1.3 The UTV system supplier should provide to the
end user customer documentation to ensure the UTV
system interfaces properly with manufacturing
equipment shields (if required), communications
protocols, or other method necessary to prevent transfer
of loads when equipment is at risk.
12.2 Protection from Load/Unload Motion of Floor-
Traveling Vehicles — In addition to the load/unload
provisions in Section 12.1, the following should also be
provided on floor-traveling vehicles:
12.2.1 Load/unload mechanisms (transfer robots) on
floor-based vehicles should be isolated or shielded as
necessary to restrict contact with factory personnel.
Measures should also be taken to prevent inadvertent
motion of load/unload mechanisms.
12.2.2 If robotic manipulators are used on floor-
traveling vehicles for load/unload operations, the
robotic manipulator should meet requirements of the
appropriate international or national standard (e.g.,
ISO 10218, EN775, or ANSI/RIA 15.06). If there are
deviations from these general industry standards
because of unique semiconductor applications, these
deviations should be documented by the evaluator and
assigned a risk factor according to a risk assessment.
13 Hazard Indicators
NOTE 9: The integrated design of any hazard indicator
system or other safety system requires a coordinated effort
among the UTV system supplier, the process equipment
supplier, and the end user customer. The following are the
minimum hazard indicators to be designed into UTV system
equipment.
13.1 Hazard Alarms and Lamps for both Floor-
Traveling and Space-Traveling Vehicles — The
following indicators should be provided on all UTVs,
but should be able to be configured to be compatible
with the overall factory design for safety.
13.1.1 UTV suppliers should provide documentation
of available configurations.
SEMI S17-0701 © SEMI 20017
13.1.2 Malfunction Alarm — In the event of a
malfunction, the UTV should both light a lamp(s) and
generate an alarm sound to alert personnel.
NOTE 10: Malfunction alarms typically require the system to
be reset by a human operation.
13.1.3 Manual Operation Indicator — The UTV
should indicate if it is under manual operation, defined
as any control of a vehicle outside of automated
operation.
13.1.4 Sensor Disabled Lamp — The UTV should
light a lamp(s) to indicate when the non-contact
approach sensing device is disabled (for example,
because the UTV is negotiating a sharp turn).
13.2 Hazard Alarms and Lamps for Floor-Traveling
Vehicles — In addition to the indicators in Section 13.1,
the following indicators should also be provided on
floor-traveling vehicles:
13.2.1 Startup Alarm — When a floor-traveling
vehicle restarts after stopping for 5 seconds or more, the
vehicle should set off an audible alarm sound at least
one second before it begins to move.
13.2.2 Traveling Alarm — When the floor-traveling
vehicle is traveling, the vehicle should generate audible
alarm sounds either continuously or intermittently as
appropriate for the area in which the vehicle is
operating.
13.2.3 Turn Signal Lamps — To indicate a floor-
traveling vehicle is preparing to turn/spin-turn (right or
left) and during the turn cycle, the vehicle should light
turn signal lamp(s). Turn signal lamps should be
clearly visible from the side in the direction of the turn.
13.2.4 Automated Operation Indicator — The floor-
traveling vehicle should light lamp(s) to indicate it is in
automated operation.
13.3 Hazard Alarms and Lights for Space-Traveling
Vehicles — In addition to the indicators in Section 13.1,
the following indicator should also be provided on
space-traveling vehicles.
13.3.1 Hoist Alarm — The space-traveling vehicle
and/or hoist should generate audible alarm sounds
indicating that the hoisting mechanism is moving
(raising or lowering).
NOTE 11: The same audible alarm device can be used to
generate startup, traveling, hoist, or malfunction alarms,
provided that different sounds are used to indicate each
condition.
13.4 Visual Hazard Alerts for both Floor-Traveling
and Space-Traveling Vehicle Areas — To assure
personnel safety in the UTV operation area, information
about the recommended system of safety measures
should be provided by the UTV system supplier
(including items such as alerts, signs, color coding, and
safety poles for the vehicle operating area).
13.4.1 The UTV system supplier should provide
information about style and placement of road signs, for
posting along floor traveling vehicle paths and at
load/unload or maintenance stations.
NOTE 12: End user customers may need to provide additional
visual hazard alerts for posting on building structures (such as
walls, columns, and doors) and/or equipment surrounding the
UTV operation area.
13.5 Visual Hazard Alerts on Floor-Traveling
Vehicles — In addition to the information about
operational area visual hazard alerts (noted in Section
13.4), the floor-traveling vehicle supplier should
provide all visual hazard alerts required for the floor-
traveling vehicle. These visual hazard alerts should be
clearly visible from all sides of the UTV.
13.6 Visual Hazard Alerts for Space-Traveling
Vehicles — In addition to the operational area visual
hazard alerts noted in Section 13.4, the following visual
hazard alerts should also be provided by space-traveling
vehicle suppliers.
13.6.1 The UTV system supplier should provide
marking of maintenance station areas and their hazards,
as well as a method of marking the floor location where
maintenance descent occurs.
NOTE 13: End user customers may need to mark load/unload
stations to identify the existence of the hazard. UTV system
suppliers should suggest a method of marking these areas.
14 Hazardous Materials
14.1 Batteries for Floor-Traveling and Space-
Traveling Vehicles — If the UTV requires the use of
batteries, the following should be included in the
documentation provided by the UTV supplier.
14.1.1 Specifications provided by the UTV system
supplier for battery recharging, battery maintenance and
battery storage areas should specify the following. This
provision can be waived only if the batteries used are
sealed with no possibility of gas emission.
• Requirements for eye-washing equipment.
• Requirements for ventilation.
• Restrictions on smoking and other sources of
ignition.
• Personnel splash protection requirements during
electrolyte handling.
14.1.2 The UTV system supplier should provide
disposal requirements for batteries that constitute