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SEMI S18-1102 © SEMI 2002 18 © 2001 Factory Mutual Insurance Company. Reprinted with perm ission fro m FM Global Property Loss Prevention Data Sheet 7-7 ‘Semiconductor Fabrication Facilities’ Figure 1 Bulk Silane Storage…

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SEMI S18-1102 © SEMI 2002
17
abatement system may be allowed to start when a leak is
detected.
18.5 Maintenance
18.5.1 The gas abatement system manufacturer should
provide the user with recommended maintenance
procedures considering the characteristics of silane
family gases and by-products in written form, even if
the manufacturer maintains the system. Maintenance
workers should be provided training as specified by the
manufacturer.
18.5.2 Interlocks or bypasses should be provided at
appropriate locations to stop the flow of process
effluent to the exhaust treatment system during
maintenance or malfunction.
18.5.3 After a malfunction alarm is activated, the
abatement system should not be automatically restarted.
The cause of the alarm should be carefully inspected
and maintenance or service of system should be
performed if necessary.
19 Related Documents
NOTE 57: As listed or revised, all documents cited shall be
the latest publications of adopted standards.
19.1 Compressed Gas Association
CGA P-32 Safe Storage and Handling of Silane and
Silane Mixtures
19.2 SEMATECH, Inc. / International SEMATECH,
Inc
9
.
96083168A-ENG Effects of Leak Size and
Geometry on Releases of 100% Silane (ESHB001)
96013067A-ENG Ignition Characteristics of
Releases of 100% Silane (ESHB001)
95092976A-ENG Comparative Analysis of a Silane
Cylinder Delivery System and a Bulk Silane
Installation (ESHB001)
94062405A-ENG Silane Safety Improvement
Project S71 Final Report
19.3 Factory Mutual Property Loss Prevention Data
Sheet, 7-7
10
Semiconductor Fabrication Facilities
NOTICE: SEMI makes no warranties or
representations as to the suitability of the guideline set
9 SEMATECH Inc./International SEMATECH Inc., 2706 Montopolis
Drive, Austin, TX 78741-6499 (or www.sematech.org)
10 Factory Mutual Engineering, 1151 Boston-Providence Turnpike
(PO Box 9102) Norwood, MA, 02062 or http://www.fmglobal.com;
(877) 364-6726 (toll free for U.S. & Canada) or (781) 255-4681, or
print out an order formand fax it to us at (781) 255-4359.
forth herein for any particular application. The
determination of the suitability of the guideline is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. This
guideline is subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this
guideline are expressly advised that determination of
any such patent rights or copyrights, and the risk of
infringement of such rights, are entirely their own
responsibility.
SEMI S18-1102 © SEMI 2002 18
© 2001 Factory Mutual Insurance Company. Reprinted with permission from FM Global Property Loss Prevention Data Sheet 7-7
‘Semiconductor Fabrication Facilities’
Figure 1
Bulk Silane Storage/Dispensing Facility
Fabrication building /Support building
Exit
Exit
Open chain-link fence
2.7m (9ft)
2.7m (9ft)
2.7m (9ft)
2.7m
(9ft)
2.7m
(9ft)
Purge
cylinders
Gas
cylinders
2.7 m
2.7 m (9 f t
)
2.7 m
2.7 m
(
9 f t
)
2.7 m
(
9 f t
)
(9 f t )
(9 f t )
© 2001 Factory Mutual Insurance Company. Reprinted with permission from FM Global Property Loss Prevention Data Sheet 7-7
‘Semiconductor Fabrication Facilities’
Figure 2
Exterior Dispensing Areas for Cylinder Rack System
SEMI S18-1102 © SEMI 2002 19
RELATED INFORMATION 1
SILANE SAFETY CONTROL SYSTEMS
NOTICE: This Related Information is not an official balloted part of SEMI S18. It is included to assist the user of
the document in understanding effective control systems. Publication is authorized by vote of the responsible
committee.
R1-1 Silane Safety Control Systems
R1-1.1 These systems should be fail-safe and fault-tolerant in order to perform effectively.
R1-1.2 In order for Silane Safety Control Systems to continually monitor the status of the gas delivery system that
they control, they should be connected to devices that provide real-time information on the parameters of the system
being monitored.
R1-1.3 Devices such as pressure transducers, and cycle counters should operate in conjunction with the software
that ensures the parameters (pressure, counts, etc.) are within the safe operating limits for the silane family gas
controlled.
R1.3.1 Software (firmware) that monitors the data from such devices should have the following features:
a) Protected from access by unauthorized personnel,
b) Require version testing before the version can be installed in active controller systems,
c) Have tolerance to accidental keystroke errors (such as asking if you really want to make a change), and
d) Require review and approval by a supervisory entity before it can be placed on line.
R1-1.4 In locations where ignitable mixtures of air and flammable gas can form in normal operation or as the
result of a single, credible failure, the control devices should not be capable of igniting the mixture.
R1-1.4.1 This criterion applies to ALL types of controls, including fire protection, leak detection, and process
safety monitoring.