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SEMI S20-0303 © SEMI 2003 3 5.2.10 service  unplanned activities intended to return equi pment that has failed to go od working order. (See also the definition fo r maintenance .) [SEMI S2] 5.2.11 tag out  the placemen…

SEMI S20-0303 © SEMI 2003 2

3.7 This document does not apply to the labeling of

hazards, which is the function of SEMI S1.

4 Referenced Standards

4.1 SEMI Standards

SEMI S1  Safety Guideline for Equipment Safety

Labels

SEMI S2  Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

SEMI S8  Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

SEMI S13  Safety Guidelines for Operation and

Maintenance Manuals Used With Semiconductor

Manufacturing Equipment

4.2 ANSI Standards

ANSI Z535.1  Color Coding for Labels

4.3 Code of Federal Regulations - United States of

America

29 CFR 1910.147  The Control of Hazardous Energy

(lockout/tagout)

29 CFR 1910.147



Appendix A “Typical Minimal

Lockout Procedure”

4.4 ISO Standards

ISO 3864  Safety Colours and Safety Signs

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbrevitions and Accronyms

5.1.1 LOTO  acronym for lockout/tagout.

NOTE 5: Also equivalent to the term Hazardous Energy

Isolation (HEI), which may be used in some jurisdictions.

5.2 Definitions

5.2.1 blocking (v)  preventing flow of material as

through piping or preventing energies (such as

1 American National Standards Institute, New York Office: 11 West

42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;

Fax: 212.398.0023 Website: www.ansi.org

2 Available from Occupational Safety and Health Administration,

U.S. Department of Labor, http://www.osha.gov

3 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

suspended weights or springs) held in a suspended state

from movement.

5.2.2 clean room compatible materials — materials

approved for use within a fabrication facility, including:

laminated card stock or paper, clean room paper,

electronic media or other approved media.

5.2.3 Energy Isolation Device (EID)  a mechanical

device that physically prevents the transmission or

release of energy, including but not limited to the

following: a manually operated electrical circuit

breaker; a disconnect switch; a manually operated

switch by which the conductors of a circuit can be

disconnected from all ungrounded supply conductors,

and, in addition, no pole can be operated independently;

a line valve; a block; and any similar device used to

block or isolate energy. Push buttons, selector

switches, and other control devices are not energy

isolation devices. [OSHA 29 CFR 1910.147]

NOTE 6: Lockout devices (elsewhere defined in this

document) are not energy isolation devices.

5.2.4 graphical  using an image or multiple image

representation that reflects the equipment as assembled

and is used for indicating the location of the individual

LOTO EIDs in relation to the equipment being

maintained. Images include labeled drawings, or

photographs enhanced with labels.

5.2.5 graphical reference guide — the merger of text

instructions and graphical representations of the

equipment in a manner that provides a clear description

of the task and a simple means of locating the correct

devices.

5.2.6 lockout  the placement of a lockout device on

an energy isolation device, in accordance with an

established procedure, ensuring that the energy

isolation device and the equipment being controlled

cannot be operated until the lockout device is removed.

[OSHA 29 CFR 1910.147]

5.2.7 lockout device  a lock and associated hardware

used to secure an EID in the safe position and prevent

energy flow.

NOTE 7: Energy isolation devices (elsewhere defined in this

document) are not lockout devices.

5.2.8 maintenance  planned or unplanned activities

intended to keep equipment in good working order.

(See also definition for service.) [SEMI S2]

5.2.9 marked — identified by the use of a label,

engraving, silk screening, etching, or other physical and

durable indication; placed near components or on

systems for the purpose of matching to identifying

documentation.

SEMI S20-0303 © SEMI 2003 3

5.2.10 service



unplanned activities intended to

return equipment that has failed to good working order.

(See also the definition for maintenance.) [SEMI S2]

5.2.11 tagout  the placement of a tagging device

(such as a tag and a secure means of attachment) to an

energy isolation device in accordance with an

established procedure. The tagout indicates that the

energy-isolation device may not be operated until the

tagging device is removed.

6 Task Specific Information

6.1 For each task requiring hazardous energy isolation

(i.e., LOTO), the following information should be

provided in a combined format (including labels,

maintenance manuals, and graphical reference guides as

described in Sections 7, 8, and 9 of this document).

NOTE 8: In some jurisdictions the bulleted items below are

required.

6.1.1 Identification of:

• type and magnitude of hazardous energies to be

isolated,

• LOTO EIDs necessary for controlling sources of

hazardous energy, and

• lockout devices necessary to secure the LOTO

EIDs.

6.1.2 Instructions for the following:

• isolating each source of energy,

• blocking energy, or reducing the potential to a zero

energy state (such as blocking chemical lines or

blocking the suspended energy state in a spring or

raised weight),

• dissipating any residual energy,

• isolating hazardous energy sources that are isolated

by disconnection, but for which there are no

lockable EIDs. These instructions should state that

the protection depends on the means of

disconnection remaining in the immediate control

of the personnel performing the work,

• attempting to restart the equipment or re-energize

the system(s) that is/are to be isolated from

hazardous energy, and

• verification that there is no hazardous residual

energy in the system.

NOTE 9: An example of minimum Hazardous Energy Control

Procedures can be found in 29 CFR 1910.147 Appendix A.

NOTE 10: The intent of instructions is to meet the need for a

valid verification method that energy is isolated and to ensure

that proper procedures are provided. An instruction is not

required if the condition is not present or possible or the

method is not technically feasible.

7 Energy Isolation Device Identification

7.1 Each LOTO EID should be uniquely and

consistently identified on the system, drawings,

schematics, procedures, etc. to reduce confusion.

EXCEPTION: Equipment consisting of a grouping of

functional modules (e.g., a “cluster tool”), where more

than one module is used in the same grouping, may use

the same identifying numbers in each module.

NOTE 11: Where there are multiple control devices such that

one or more operating devices might be confused with the

LOTO EID, a differentiation marking may be used to prevent

confusion. One example of such a differentiation marking is

shown in Related Information 3.

7.2 All LOTO EIDs integral to the equipment should

be marked on the equipment.

7.2.1 LOTO EID markings should be located on the

equipment adjacent to (not on) the EIDs they identify.

NOTE 12: Marking directly on the EID can mean that

replacement of the EID will also remove the EID marking.

7.2.2 Where the LOTO EID marking is obscured

(covered by wiring, tubing, installation hardware, etc.),

an additional marking should also be placed on the EID

itself.

7.3 For LOTO EIDs required by the supplier but

provided and installed by the user, the supplier should

specify the requirements for such devices.

7.3.1 When such devices are specified, users should

provide lockable EIDs.

7.3.2 Users should provide to the supplier, if requested,

the location of the device.

7.3.3 Utility connection points for which LOTO EIDs

are located external to the equipment should be marked

to indicate that a user-provided EID is the method of

energy isolation. Space on the equipment should be

provided for the user to indicate the location of the

LOTO EID.

7.4 The style and size of letters and numbers on LOTO

EID markings should meet the criteria of SEMI S8 in

order to be readable from the normal viewpoint of

access to the LOTO EID.

7.4.1 The LOTO EID marking (as it appears on the

equipment) need not be colored according to Table 1 in

Section 9.

SEMI S20-0303 © SEMI 2003 4

8 Graphical Representations in Manuals,

Documentation & Procedures

8.1 Supplier-provided instructions for lockout/tagout

and graphical representations of LOTO EIDs should be

included with each maintenance task or in a separate

section of the manual referenced by each maintenance

task to which they pertain.

8.2 The text instructions should refer to the equipment

and all support equipment related to the task.

8.2.1 When the supplier does not provide the support

equipment, a generic graphical-reference placeholder

for the equipment should be used. Generic LOTO

procedures should also be included where the supplier

maintenance procedures require isolation of that

equipment.

NOTE 13: A graphical reference placeholder can be provided

by any method that allows space for the user to identify user-

installed support equipment and its associated LOTO EIDS

(e.g., a blank outlined space, a blank underlined space, a

numbered line with space for inserting text).

8.3 The size of the LOTO EID identifiers on the

graphical representation of the equipment should be

large enough to indicate the EID in question, but not so

large as to confuse location of the device in relation and

orientation to the rest of the equipment.

8.4 Each of the LOTO EID physical locations on the

equipment should be identified on a graphical

representation of the equipment with an image similar

in shape and text to the marking on the equipment.

8.5 LOTO EIDs that are not provided by the supplier

but are necessary to complete the associated task safely,

as defined by the supplier, should be graphically

identified as a generic external device in the

procedures. The procedure should mention that the end

user provides these devices.

8.6 For each specific task, the graphical representation

should illustrate at least the portion(s) of equipment

involved in the specific maintenance task.

EXCEPTION: Graphical representation need not be

duplicated for each task, but may be referenced by more

than one instruction.

8.6.1 The representation should be easily capable of

being associated with the LOTO procedure for the task

being completed or include the procedure text in written

form at the bottom of the graphical representation.

8.6.2 Task level instructions should identify those

LOTO EIDs that are required for the specific task being

completed and link them to the graphical

representation.

8.7 Energy isolation instructions for equipment options

or nonstandard procedures should be provided with the

equipment option or nonstandard process change as

purchased from the supplier.

NOTE 14: Nonstandard procedures include customer specific

tasks such as chamber cleaning for unique chemistries, use of

special lifting devices for single customers, and other tasks

that are not part of the standard procedures for the normal

supplier-delivered configuration.

8.7.1 The graphical representations should capture the

option’s LOTO EID in the representation for the overall

task it affects (e.g., if a UPS is offered as an option, the

LOTO procedures for the UPS option should be

provided and the UPS LOTO EID included in the

graphical representation).

9 Graphical Reference Guides for use at the

Equipment

NOTE 15: Graphical reference guides are intended to make it

easy for personnel to locate and isolate sources of hazardous

energy associated with the tasks they are performing.

9.1 Graphical reference guides should be provided for

each task where LOTO is used. LOTO EIDs should be

graphically identified on these reference guides.

Instructions for controlling each source of energy as

outlined in Section 6.1.2 should also be provided on the

reference guides. The reference guides should be task

specific.

NOTE 16: See Related Information 1 for example.

EXCEPTION: A single graphical reference guide may

be used for more than one task, provided it can be

easily determined from the text instructions, which

LOTO EIDs are used for each task.

9.2 It is recommended that the graphical reference

guides include a color representation of the overall

equipment, as well as individual task-specific

representations, as they would be found in the

maintenance manual.

EXCEPTION: If manuals are printed only in black and

white, the color representation may be specified as

“printed by the user” from the electronic copy.

9.3 If the supplier has no standard for coloring the

indicators of the LOTO EID locations on graphical

representations, they should be colored according to the

type of energy being isolated. See Table 1,

“Recommended Identifying Color Matrix”.