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SEMI S21-1103 © SEMI 2003 4 6.10 Hazards should be controlled based on each job category: installation, o peration, maintenan ce and service. 6.10.1 Installation 6.10.1.1 Prior to equipment installation, the installation…
SEMI S21-1103 © SEMI 2003 3
may be a manufacturer, an equipment distributor, or an
equipment representative. [SEMI S2]
5.2.15 user party who acquires equipment for the
purpose of using it to manufacture semiconductors.
5.2.16 work any activity performed on
semiconductor manufacturing equipment, utilities
connected to the equipment, or facilities associated with
the equipment within the work area.
5.2.17 work area room or defined space where
semiconductor manufacturing equipment is located and
where workers are present. This can include service
chases and sub-fab areas.
5.2.18 workers personnel who install, operate,
maintain, service, decontaminate, or disassemble
equipment.
6 General Worker Safety
6.1 The hierarchy for selecting worker protection
measures should be as follows:
• Hazard elimination by design
• Engineering controls
• Administrative methods
• Personal Protective Equipment
6.2 The equipment supplier should provide information
in the equipment operation, maintenance, or service
manual or other appropriate documents on
recommended controls to reduce the risks. These
documents should conform to SEMI S13.
6.3 Equipment Engineering System (EES) Related
Safety Issues
6.3.1 Suppliers should identify all forms of e-
diagnostic communications (either standard or optional)
that exist or are planned and should include the
preferred method (i.e., local area network (LAN),
telephone line, wireless port) that is required.
6.3.2 Suppliers should describe any communications
isolation feature (e.g., cut-off switches, locations for
disconnecting cables) that is available to protect
equipment from being controlled remotely.
NOTE 3: Isolation of communication usually will not be
acceptable to local jurisdictions as a substitute for isolation of
hazardous energy in a hazardous energy control procedure.
6.4 Prior to work, employers should develop safe work
procedures.
6.4.1 Development of safe work procedures should use
hazard analyses and risk assessments to identify the
hazards and determine which hazards warrant further
mitigation.
6.4.2 Risks identified by job hazard analyses and risk
assessments should be reduced to an acceptable level,
using the protective measure hierarchy described above.
6.5 Employers should ensure that workers are
adequately trained to perform their assigned work
safely.
6.5.1 Suppliers and users should agree on training
involving specific equipment.
NOTE 4: See SEMI S19, which pertains to safety training
and certification for personnel working in semiconductor
fabrication facilities.
6.6 The supplier should provide the user with the
version of equipment installation, maintenance, service,
and operation manuals that matches the specific
equipment configuration as installed, contains the most
current information for that configuration but is
appropriate to the specific equipment for both
configuration and process.
6.6.1 The user should verify that the manuals correctly
reflect the equipment configuration as it was installed.
If there are any discrepancies, the user and the supplier
should agree on corrective actions.
6.7 The facility operator should establish site-specific
safety procedures for the safety of all persons including
temporary workers, visitors, and supplier
representatives in the work area.
6.7.1 Site-specific hazards and appropriate protective
measures including applicable safety procedures should
be communicated by the facility operator to all persons.
6.8 Upon request, the facility operator should identify
appropriate communication measures to ensure there is
communication between workers that may be
physically separated, such as between upper and lower
floors or between operation and maintenance areas.
NOTE 5: Facility operators may restrict wireless
communications because of interference issues. This may
include wireless phones, Personal Digital Assistants (PDAs),
two-way pagers, and other wireless devices.
6.9 The facility operator should ensure conformance to
all applicable regulatory requirements and control of
hazards in the work area. The use of industry practices
should be considered in the absence of regulatory
requirements.
NOTE 6: Multi-employer work site issues may be involved
in some jurisdictions. Check with local site personnel for
information before finalizing practices.
SEMI S21-1103 © SEMI 2003 4
6.10 Hazards should be controlled based on each job
category: installation, operation, maintenance and
service.
6.10.1 Installation
6.10.1.1 Prior to equipment installation, the installation
manual or other available documents should be checked
to ensure that the appropriate information is available,
including:
• Utilities connection diagram
• Electrical cabling information
• Hazardous energy isolation procedures
• Test procedures for safety features and
performance
• Chemical information
• Safety related detector types and locations
6.10.2 Operation
6.10.2.1 EMO and safety interlock features should not
be removed, bypassed or overridden during normal
operating periods.
6.10.2.2 The location and functionality of each safety
interlock feature and EMO feature should be verified
before initial start-up of any system.
6.10.2.3 Periodic testing and validation of EMO and
safety interlock features should be performed in
accordance with the supplier’s recommendations.
6.10.2.4 EMO and safety interlock systems should be
tested and validated following extended shutdown for
maintenance and service.
6.10.3 Maintenance and Service
6.10.3.1 Prior to maintenance or service, the worker
should check for the following. Worker should perform
their tasks in accordance with any identified procedures
or requirements including the following:
• Effects of the tasks on any safety systems
• Presence of active hazardous energy sources
• Hazardous energy source isolation (lockout/tagout)
requirements
• Verification of remaining hazardous energies after
energy isolation
• Procedure for removal or isolation of remaining
hazardous energies
• Necessity and procedures to override safety
interlocks
• Proper restoration of overridden safety interlocks
after completion of the work
• Personal protective measures required for the work
including the use of personal protective equipment
and training requirements
• Requirements to document the work
7 Chemical Hazards
7.1 The hazards of all work-related chemicals should
be identified. Hazard communication should be
provided for all known hazards of those chemicals.
7.2 Hazard Communication (HAZCOM)
7.2.1 The user should provide chemical safety data to a
designated supplier representative and all potentially
exposed persons. The supplier representative should be
the manager responsible for field service personnel.
7.2.2 Work associated with hazardous chemicals
should be performed only by personnel who have been
trained in safe handling techniques and the hazards
associated with exposure.
7.2.3 When performing work at the user’s site, the
supplier should provide the user information in advance
on any chemicals that the supplier brings onto the
user’s site. It is the responsibility of the supplier to
provide information in advance on supplier-specified
hazardous chemicals and the appropriate handling
procedures. It is the responsibility of the user to train
workers on user-specified hazardous chemicals.
7.2.4 Chemicals and gases should be handled with
special care based on specific handling instructions that
are described in MSDSs and equipment manuals.
7.2.5 Material Safety Data Sheets (MSDSs) for the
chemicals in use should be readily accessible while
work associated with the chemicals is being performed.
7.2.6 All chemical containers and pipes should be
labeled with contents and hazards according to
applicable codes or standards.
NOTE 7: Process piping that may carry varying contents
depending upon the timing or recipe may be labeled with the
generic contents of the piping provided the hazards and
protective measures can be easily identified from the label.
NOTE 8: Information about chemical labeling methods is
provided in SEMI F34 and OSHA 29 CFR 1910.1200.
7.2.7 A written program for controlling hazardous
chemicals should be developed by each employer.
7.2.7.1 This program should be periodically reviewed,
for adequacy, by employers.
SEMI S21-1103 © SEMI 2003 5
7.2.7.2 Employers should train their workers on proper
implementation of the program.
7.3 Chemical Handling and Storage
NOTE 9: Information on chemicals used in the area and the
facility-operator-required personal protective equipment
(PPE) is the responsibility of the facility operator and should
be available in the work area according to regulations for the
location.
NOTE 10: Persons providing transient workers into the
facility should coordinate to determine if there are any
differences between the facility requirements for PPE and the
worker employer requirements for PPE.
7.3.1 All workers should be trained on the chemical
hazards, the proper use of the PPE, and the limitations
of the PPE.
7.3.2 Chemical information should be presented to
workers during training in a clearly understandable
format (such as a table) and should include chemical
names, chemical formulas, hazardous properties
(flammable, corrosive), chemical states (solid, liquid, or
gas), and other hazard information.
NOTE 11: It is recommended that users of this document
refer to Section 12 Personal Protective Equipment for
additional information on protection from chemical exposure.
7.3.3 Further information on typical chemical
categories and their related hazards is provided in Table
A1-1 of Appendix 1.
7.3.4 When operation, maintenance, or service tasks
may include exposure to chemical mists, fumes, or
vapors, the tasks should be conducted with adequate
ventilation.
7.3.4.1 If there is a possibility of insufficient
ventilation, employers are responsible for ensuring that
their workers wear respiratory protective equipment.
7.3.5 If maintenance or service tasks require access to
chemically contaminated areas of the equipment, PPE
may be needed, and implementation of decontamination
procedures may be necessary.
7.3.6 Workers should be trained to know when it is
appropriate to clean up chemical spills. The amount that
may be cleaned up is completely dependent upon the
user’s site hazardous material policies.
7.3.7 Workers should not attempt to clean up large or
unknown spills without proper training. In these
circumstances, the ERT should be contacted.
7.4 Incompatible chemicals should not be mixed or
stored together in the same spill control area unless
adequate controls are provided to avoid mixing of
chemicals or creation of a risk of fire and explosion.
NOTE 12: Specific chemical separation requirements are
defined by local regulation.
7.4.1 Chemical containers should be stored in a
designated location based on hazard categories.
Containers should be segregated based on
incompatibility risks.
7.4.2 Compressed gas cylinders should be secured
upright at all times. When cylinders are not in use,
outlet and valve protective caps should be in place.
NOTE 13: Depending on the gas hazard, some jurisdictions
require non-combustible securing devices (e.g., chains).
NOTE 14: Cylinders within the semiconductor
manufacturing equipment may be installed horizontally if the
equipment manufacturer determines this is compatible with
the cylinder type to be used.
7.5 Protection Against Unexpected Release
7.5.1 Hazardous Energy Control or Lockout/Tagout
procedures should be used to protect workers from the
unexpected release of hazardous energies associated
with pressurized gas, pressurized liquid chemicals or
other (e.g., chemical reaction) energy. The Control of
Hazardous Energy section of this document applies to
all gaseous and liquid chemical energy during
maintenance and service tasks.
7.6 Oxygen Deficiency
7.6.1 If work is to be performed where oxygen
deficiency is possible, (e.g., inside a confined space,
near a high volume inert gas flow), the oxygen content
of the atmosphere should be monitored.
7.6.2 If a hazard exists, appropriate worker protection
measures should be implemented prior to entry.
If the
oxygen content decreases to below 19.5%, workers who
are not provided with supplied air respirators have to
leave.
7.6.3 If elimination of oxygen deficiency is not
practical, workers should use appropriate PPE as a
means of working safely in an oxygen deficient
environment.
7.6.4 The worker should be educated on the hazards
and the necessary protective measures associated with
oxygen deficient environments.
7.7 Chemical Waste
7.7.1 Spent chemical drains should be separated to the
extent that chemical reactions will not cause damage to
drain materials of construction or other chemical
reaction hazards. The user’s instructions should be
followed to avoid potential hazards.
7.7.2 Solid waste should be placed in the appropriate,
labeled waste container based upon user’s instructions.