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SEMI S21-1103 © SEMI 2003 9 “Passage Closed,” “Kee p Ou t,” and/or “Watch Your Step.” 11.3.2 For work done from a standing hei ght not lower than 1.5 meters or a height specified by regulatio n, mark the area along all o…

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SEMI S21-1103 © SEMI 2003 8
10.1.1.4 Prior to performing work, workers should
reconfirm the instructions and other related documents
to avoid any misunderstanding of the work procedure.
10.1.1.5 An appropriate method of monitoring the
amount of worker exposure to radiation during work
with ionizing radiation should be considered.
10.1.2 Non-Ionizing Radiation
10.1.2.1 When performing work with potential
exposure to non-ionizing radiation, the potential
exposure should be evaluated and appropriate
protection provided. See SEMI S2 as a technical guide.
10.1.3 Lasers
10.1.3.1 Work on lasers should be performed with the
laser de-energized whenever possible.
10.1.3.2 Workers performing work on laser equipment
should be trained in the hazards and proper work
procedures.
10.1.3.3 During work on other than Class 1 or Class 2
laser equipment, access to the area where unauthorized
personnel can be exposed to energized laser beams
should be controlled with a safety enclosure or other
appropriate method.
NOTE 28: Laser classes greater than Class 1 and Class 2
require PPE when entering the path of an energized laser.
10.1.3.3.1 Suppliers should consider warning labels for
Class 2 laser equipment to ensure workers do not
inadvertently enter the laser path.
10.1.3.4 When working on an opened laser, protective
measures (which may include PPE) should be taken for
the appropriate hazards and level of risk.
10.2 Extreme Temperatures
10.2.1 When performing work with potential exposure
to hazardous surface temperatures, the potential
exposure should be evaluated, and appropriate
protection provided, or the temperature adjusted to a
safe level. See SEMI S2 for acceptable temperature
ranges.
11 Physical Hazards
11.1 Work at Elevated Heights
NOTE 29: Work at extreme heights may require specific
training or specially certified personnel. For example, Japan
Labor Safety Regulations require workers working at five
meters or higher to be a nationally certified chief worker.
11.1.1 If the work at an elevated position, such as the
end of a platform or through an opening, poses a fall
hazard, the area should be guarded with a fence,
handrail, or cover, or fall protection should be worn.
11.1.2 When installing components or assemblies at
heights, protective measures to prevent falling objects
should be implemented. Heavy components or
assemblies should be lifted into position with
ergonomically acceptable lifting equipment.
11.1.3 Work on a Stepladder
NOTE 30: Ladders must be approved for the jurisdiction in
which they are used, if applicable.
11.1.3.1 Stepladders should be stored away from
chemicals and contaminants.
NOTE 31: Regulations related to ladder materials of
construction acceptability may affect use of certain ladders in
areas where chemicals are used or where the ladder is used for
potentially energized electrical work.
11.1.3.2 Stepladders should be inspected to verify that
they are in good condition. If they are not, the
stepladders should be taken out of service until they are
repaired or replaced. Rungs should be inspected to
ensure that they are kept free from fluids and debris.
11.1.3.3 Only one person should be ascending or
descending a stepladder at any time even if steps are
provided on both sides of the ladder.
11.1.3.4 When ascending or descending, workers
should face the stepladder, use at least one hand to
grasp the stepladder and not carry any object that
interrupts the worker’s view.
11.1.3.5 Stepladders should be used fully extended and
with legs locked. Unstable positions such as work on
top two steps, work which requires the torso to extend
beyond the rails, and work which requires standing on
tiptoes or a single foot should be avoided.
11.1.3.6 Work should not be performed below the
stepladder when in use.
11.2 Protection Against Falling Objects
11.2.1 If the work involves hazards from flying or
falling objects, one or more of the following safety
measures should be implemented as appropriate:
• Control approach to the area
• Install a safety net
• Wear a hardhat
• Use measures to secure tools and parts used for the
work
11.3 Visual Hazard Warnings
11.3.1 Barrier tape or another equivalent method to
designate work areas involving fall hazards should be
used, in addition to appropriate signage such as
SEMI S21-1103 © SEMI 2003 9
“Passage Closed,” “Keep Out,” and/or “Watch Your
Step.”
11.3.2 For work done from a standing height not lower
than 1.5 meters or a height specified by regulation,
mark the area along all of the sides with barrier tape
and post appropriate signs where they are visible from
all approaches to the area.
11.4 Floor Openings
11.4.1 If the work requires removal of floor panels, the
area should be barricaded with a barrier that can
support a person’s weight, or position an attendant next
to the area to keep out unauthorized workers.
11.4.2 Appropriate measures (e.g., removing
unnecessary materials from the work area, placing toe-
boards around the opening) should be taken to prevent
objects from falling into the opening.
11.4.3 Personnel below floor opening should be
notified when work is being performed above them.
11.5 Work Between Upper and Lower Floors
11.5.1 For work on cables or piping between upper and
lower floors, the worker should review the location and
level of the hazards associated with the work with the
facility operator.
11.5.2 Facility operators should insure workers on
lower floors are protected from falling objects
11.5.3 Overhead work (e.g., utility connection
activities) protection should be provided by engineering
controls wherever possible.
11.5.3.1 When engineering controls are not feasible,
alternative protection such as PPE (e.g., hardhats)
should be provided.
11.5.3.2 Personnel should be notified when work is
being performed above them.
11.5.4 When work is performed between the upper and
lower floors, the worker should be secured with a safety
harness and wear a hardhat to protect against falling
objects.
11.5.4.1 If wearing a safety harness and hardhat
increases hazards to the worker, alternative means of
providing safe work conditions should be identified.
11.6 Mechanical Hazards
11.6.1 Prior to the installation, an appropriate
equipment transfer method should be established by
reviewing the installation manual or other available
documents for applicable procedures or pertinent
information (e.g., equipment weight, equipment sling
method, lift position, and equipment anchorage
method). If the installation work warrants, appropriately
qualified personnel should perform the work.
11.6.2 Prior to operation, workers should be aware of
any moving parts and the potential for accidental
contact with them.
11.6.3 If a teaching operation is required for a robot or
other system, the operation should be performed in
accordance with the procedure specified in the
maintenance manual or other appropriate documents.
11.6.4 Prior to maintenance, all potential hazards (e.g.,
pinch point hazard, mechanical crush hazard) should be
identified by reviewing the maintenance manual or
other available documents.
11.6.5 Prior to the disposal or disassembly of
equipment, workers should be aware of all remaining
mechanical hazards. This may be achieved with the use
of the job or process hazard analysis.
11.7 Ergonomic Hazards
NOTE 32: Refer to SEMI S8, the NIOSH lifting guide or
other ergonomic protection documents for guidance on
whether safe lifting for performing a specific task requires
two persons or requires mechanical lifting assistance.
11.7.1 Workers required to lift heavy or bulky items
should be aware of the weight and size of the object
before performing the lift.
11.7.2 When performing tasks in awkward positions,
the duration of the task should be reduced to an
appropriate length of time with adequate rest taken
between each task.
12 Personal Protective Equipment
12.1 This section describes guidelines for personal
protective equipment (PPE) to protect workers from
potential hazards associated with semiconductor
manufacturing equipment.
12.1.1 Facility operators and employers are jointly
responsible for ensuring that workers wear PPE when
necessary. (Refer to Appendix 2 for examples of PPE
selection for protection against each type of hazard.)
NOTE 33: Some jurisdictions require employer to provide its
employee with PPE. This may require that supplier employer
to provide PPE for their employees working at user’s site with
concurrence of the end user or facility operator.
NOTE 34: PPE in Europe must be CE-marked according to
PPE directive 89/686/EEC.
12.1.2 Employers should properly train their workers
in the purpose, benefits, limitations, proper use, storage,
inspection, and maintenance of their PPE.
12.1.3 Facility operators should provide appropriate
PPE to all employees and should recommend
SEMI S21-1103 © SEMI 2003 10
appropriate PPE to all non-employees when user
specific process or site conditions create hazards.
12.2 Chemical PPE
12.2.1 Chemical PPE should be inspected by each
person before each use to ensure it is not contaminated,
deteriorated or damaged.
12.2.2 Chemical PPE should not be reused except
when designed for reuse (e.g., safety glasses face,
shields). Most PPE is designed to be single-use
disposable and should be changed when contamination
or deterioration is suspected.
12.3 Eye Protection
12.3.1 Protective eyewear should be selected based on
the hazards expected to be encountered and the type of
work to be performed.
12.3.2 Safety glasses, goggles and face shields should
be provided and worn to protect the eyes from chemical
splash, dust, electrical arc, and flying fragments.
12.3.2.1 Eye protection for electrical arc flash should
be selected based on the calculated available fault
energy.
NOTE 35: Certain jurisdictions may require hard side
shields on safety glasses.
12.3.3 Laser goggles should be selected based upon the
appropriate standards that apply, such as JIS C 6802,
EN207, EN208, ANSI Z 136.1, or ANSI B11.21.
12.4 Body Protection
12.4.1 Protective aprons, sleeves, and full body clothes
should be worn to protect the body and/or extremities
from contact with hazards (e.g., hazardous chemicals,
materials, electrical arc, or other substances).
12.4.2 When handling or transferring hazardous
materials such as acids, bases, or organic solvents, the
worker should wear a protective apron or clothes. The
protective aprons and clothes should not inhibit the safe
performance of workers.
12.4.3 PPE rated for protection from electrical arc/flash
(e.g., hoods with shoulder coverings) can also be
classified as body protection.
12.4.4 PPE for skin protection should be provided and
worn when the fault energy calculation indicates the
potential for exposure to ultraviolet or infrared
radiation.
12.5 Hand Protection
12.5.1 When handling hazardous chemicals, the worker
should wear gloves that the employer has selected to
provide appropriate protection against exposure to the
chemical in use.
NOTE 36: Certain jurisdictions will require analysis of
chemical degradation, permeation and penetration testing data
to establish safe working periods.
12.5.2 Gloves should be selected to ensure adequate
grip.
12.5.3 Thin gloves are preferable when considering
comfort and dexterity but may develop pinholes and
tear easily. A worker should inspect the gloves for
pinholes prior to wearing them.
12.5.4 PPE for hands for EEW should be selected per
applicable standards for the voltage and arc/flash
potential exposed to.
12.5.5 Hand protection against extreme temperature
and sharp objects should be provided.
12.6 Foot Protection
12.6.1 When a worker handles heavy objects, or there
is danger of foot injuries from falling or rolling objects,
or the possibility of piercing the sole exists, the worker
should wear safety shoes that provide appropriate safety
features for toes, metatarsal bones, arch, and other parts
of the foot.
12.6.2 Safety shoes may need to provide features such
as:
• Non-slip or non-skid soles
• Insulation from electrical shock
• Chemical or oil resistance
12.7 Respiratory Protection
12.7.1 Respirators should be provided and worn when
there is a possibility of an unacceptable exposure from
dusts, fumes, mists, gases, smoke, or vapors.
12.7.2 Specific hazards should be identified and
evaluated prior to determining the type of respiratory
protection needed. A qualified person should
reasonably estimate the worker’s exposure to the
respiratory hazards in the evaluation.
NOTE 37: SCBA (Self-Contained Breathing Apparatus), that
supplies clean air via a cylinder worn on worker’s back, may
be required for highest protection.
12.7.3 An individual trained to assess respiratory
capabilities or a regulation-defined person or entity
should determine potential physical and mental effects
on individuals who will wear respirators and state
whether the individual can safely wear the respirator.
12.7.4 A qualified person should ensure that a
respirator that provides an adequate fit and offers the
most comfort is chosen for each worker.