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SEMI S21-1103 © SEMI 2003 10 appropriate PPE to all non-employees when user specific process or site conditions create hazards. 12.2 Chemical PPE 12.2.1 Chemical PPE should be inspected by each person before each use to …
SEMI S21-1103 © SEMI 2003 9
“Passage Closed,” “Keep Out,” and/or “Watch Your
Step.”
11.3.2 For work done from a standing height not lower
than 1.5 meters or a height specified by regulation,
mark the area along all of the sides with barrier tape
and post appropriate signs where they are visible from
all approaches to the area.
11.4 Floor Openings
11.4.1 If the work requires removal of floor panels, the
area should be barricaded with a barrier that can
support a person’s weight, or position an attendant next
to the area to keep out unauthorized workers.
11.4.2 Appropriate measures (e.g., removing
unnecessary materials from the work area, placing toe-
boards around the opening) should be taken to prevent
objects from falling into the opening.
11.4.3 Personnel below floor opening should be
notified when work is being performed above them.
11.5 Work Between Upper and Lower Floors
11.5.1 For work on cables or piping between upper and
lower floors, the worker should review the location and
level of the hazards associated with the work with the
facility operator.
11.5.2 Facility operators should insure workers on
lower floors are protected from falling objects
11.5.3 Overhead work (e.g., utility connection
activities) protection should be provided by engineering
controls wherever possible.
11.5.3.1 When engineering controls are not feasible,
alternative protection such as PPE (e.g., hardhats)
should be provided.
11.5.3.2 Personnel should be notified when work is
being performed above them.
11.5.4 When work is performed between the upper and
lower floors, the worker should be secured with a safety
harness and wear a hardhat to protect against falling
objects.
11.5.4.1 If wearing a safety harness and hardhat
increases hazards to the worker, alternative means of
providing safe work conditions should be identified.
11.6 Mechanical Hazards
11.6.1 Prior to the installation, an appropriate
equipment transfer method should be established by
reviewing the installation manual or other available
documents for applicable procedures or pertinent
information (e.g., equipment weight, equipment sling
method, lift position, and equipment anchorage
method). If the installation work warrants, appropriately
qualified personnel should perform the work.
11.6.2 Prior to operation, workers should be aware of
any moving parts and the potential for accidental
contact with them.
11.6.3 If a teaching operation is required for a robot or
other system, the operation should be performed in
accordance with the procedure specified in the
maintenance manual or other appropriate documents.
11.6.4 Prior to maintenance, all potential hazards (e.g.,
pinch point hazard, mechanical crush hazard) should be
identified by reviewing the maintenance manual or
other available documents.
11.6.5 Prior to the disposal or disassembly of
equipment, workers should be aware of all remaining
mechanical hazards. This may be achieved with the use
of the job or process hazard analysis.
11.7 Ergonomic Hazards
NOTE 32: Refer to SEMI S8, the NIOSH lifting guide or
other ergonomic protection documents for guidance on
whether safe lifting for performing a specific task requires
two persons or requires mechanical lifting assistance.
11.7.1 Workers required to lift heavy or bulky items
should be aware of the weight and size of the object
before performing the lift.
11.7.2 When performing tasks in awkward positions,
the duration of the task should be reduced to an
appropriate length of time with adequate rest taken
between each task.
12 Personal Protective Equipment
12.1 This section describes guidelines for personal
protective equipment (PPE) to protect workers from
potential hazards associated with semiconductor
manufacturing equipment.
12.1.1 Facility operators and employers are jointly
responsible for ensuring that workers wear PPE when
necessary. (Refer to Appendix 2 for examples of PPE
selection for protection against each type of hazard.)
NOTE 33: Some jurisdictions require employer to provide its
employee with PPE. This may require that supplier employer
to provide PPE for their employees working at user’s site with
concurrence of the end user or facility operator.
NOTE 34: PPE in Europe must be CE-marked according to
PPE directive 89/686/EEC.
12.1.2 Employers should properly train their workers
in the purpose, benefits, limitations, proper use, storage,
inspection, and maintenance of their PPE.
12.1.3 Facility operators should provide appropriate
PPE to all employees and should recommend
SEMI S21-1103 © SEMI 2003 10
appropriate PPE to all non-employees when user
specific process or site conditions create hazards.
12.2 Chemical PPE
12.2.1 Chemical PPE should be inspected by each
person before each use to ensure it is not contaminated,
deteriorated or damaged.
12.2.2 Chemical PPE should not be reused except
when designed for reuse (e.g., safety glasses face,
shields). Most PPE is designed to be single-use
disposable and should be changed when contamination
or deterioration is suspected.
12.3 Eye Protection
12.3.1 Protective eyewear should be selected based on
the hazards expected to be encountered and the type of
work to be performed.
12.3.2 Safety glasses, goggles and face shields should
be provided and worn to protect the eyes from chemical
splash, dust, electrical arc, and flying fragments.
12.3.2.1 Eye protection for electrical arc flash should
be selected based on the calculated available fault
energy.
NOTE 35: Certain jurisdictions may require hard side
shields on safety glasses.
12.3.3 Laser goggles should be selected based upon the
appropriate standards that apply, such as JIS C 6802,
EN207, EN208, ANSI Z 136.1, or ANSI B11.21.
12.4 Body Protection
12.4.1 Protective aprons, sleeves, and full body clothes
should be worn to protect the body and/or extremities
from contact with hazards (e.g., hazardous chemicals,
materials, electrical arc, or other substances).
12.4.2 When handling or transferring hazardous
materials such as acids, bases, or organic solvents, the
worker should wear a protective apron or clothes. The
protective aprons and clothes should not inhibit the safe
performance of workers.
12.4.3 PPE rated for protection from electrical arc/flash
(e.g., hoods with shoulder coverings) can also be
classified as body protection.
12.4.4 PPE for skin protection should be provided and
worn when the fault energy calculation indicates the
potential for exposure to ultraviolet or infrared
radiation.
12.5 Hand Protection
12.5.1 When handling hazardous chemicals, the worker
should wear gloves that the employer has selected to
provide appropriate protection against exposure to the
chemical in use.
NOTE 36: Certain jurisdictions will require analysis of
chemical degradation, permeation and penetration testing data
to establish safe working periods.
12.5.2 Gloves should be selected to ensure adequate
grip.
12.5.3 Thin gloves are preferable when considering
comfort and dexterity but may develop pinholes and
tear easily. A worker should inspect the gloves for
pinholes prior to wearing them.
12.5.4 PPE for hands for EEW should be selected per
applicable standards for the voltage and arc/flash
potential exposed to.
12.5.5 Hand protection against extreme temperature
and sharp objects should be provided.
12.6 Foot Protection
12.6.1 When a worker handles heavy objects, or there
is danger of foot injuries from falling or rolling objects,
or the possibility of piercing the sole exists, the worker
should wear safety shoes that provide appropriate safety
features for toes, metatarsal bones, arch, and other parts
of the foot.
12.6.2 Safety shoes may need to provide features such
as:
• Non-slip or non-skid soles
• Insulation from electrical shock
• Chemical or oil resistance
12.7 Respiratory Protection
12.7.1 Respirators should be provided and worn when
there is a possibility of an unacceptable exposure from
dusts, fumes, mists, gases, smoke, or vapors.
12.7.2 Specific hazards should be identified and
evaluated prior to determining the type of respiratory
protection needed. A qualified person should
reasonably estimate the worker’s exposure to the
respiratory hazards in the evaluation.
NOTE 37: SCBA (Self-Contained Breathing Apparatus), that
supplies clean air via a cylinder worn on worker’s back, may
be required for highest protection.
12.7.3 An individual trained to assess respiratory
capabilities or a regulation-defined person or entity
should determine potential physical and mental effects
on individuals who will wear respirators and state
whether the individual can safely wear the respirator.
12.7.4 A qualified person should ensure that a
respirator that provides an adequate fit and offers the
most comfort is chosen for each worker.
SEMI S21-1103 © SEMI 2003 11
12.7.5 A proper facepiece-to-face seal should be
established each time the employee uses the respirator.
12.7.5.1 Respirator users should be capable of
performing a fit check, cleaning the respirator, and
distinguishing clean versus used respirators.
12.7.5.2 Respirators should be provided with a method
of identifying their assigned user and who performs
maintenance.
NOTE 38: Some jurisdictions require sealing of respirators in
bags or another method of keeping the respirator clean.
12.7.6 If an air-purifying respirator is worn, workers
need to be trained as to how often the canisters or
cartridges should be changed.
12.7.7 A full-face type mask with a wide view should
be used for a self-contained breathing apparatus or
airline respirator system.
12.7.8 Respirators should be inspected prior to every
use to ensure they are:
• in good working condition,
• pliable,
• free from damage, and
• not contaminated.
12.8 Head Protection
12.8.1 Hardhats that provide protection against impact
and penetration should be worn in areas that may
contain falling objects or bumping hazards.
12.8.2 A risk assessor should determine if head
protection must provide protection from electrical
shock in the situations.
12.9 Hearing Protection
12.9.1 Hearing protection is designed to protect ears
from sound pressure hazards. In locations where
workers can be exposed to excessive noise levels
(greater than 80 dBA) that administrative or
engineering controls cannot reduce, earplugs or muffs
should be considered.
12.9.2 High audio noise should be monitored. Where
potential exposure to hazardous levels of sound exists,
hazard warnings should be posted, and appropriate PPE
used.
NOTE 39: Protection may be required for impact noise that
some equipment (pumps) generate (deep thumping noises).
Consult a noise specialist if this situation arises.
13 Emergency Preparation and Managing
Abnormal Situations
13.1 All workers in a facility (whether employees or
temporary workers supplied under contract) should be
trained in recognizing and responding to abnormal
situations.
13.2 Suppliers should have their own procedures for
managing abnormal situations, that may be expected, in
association with the equipment the supplier
manufactures.
13.2.1 Supplier employers should develop an
emergency response plan for their own workers.
Emergency response procedures and the methods of
communication to be used in an emergency should be
tested to evaluate their effectiveness and communicated
to all supplier employees.
13.2.2 Supplier employers and facility operators should
coordinate information to ensure both supplier
employees and facility operators understand any
expected actions.
13.2.3 Facility operators should have their own
procedures for managing abnormal situations that may
be expected from problems within the facility or from
combinations of equipment conditions.
13.2.3.1 Such procedures should be based on hazard
analyses and risk assessments conducted under
reasonably foreseeable abnormal conditions.
13.2.4 Facility operators should make pertinent
information such as emergency contact methods and
phone numbers available.
13.2.5 Allowable or prohibited actions by supplier
personnel and the proper chain of command for
reporting emergencies should also be included.
13.2.6 Responders should be trained on the use of the
plan and their specific responsibilities during an
emergency.
13.2.7 All workers (both employees and outsiders)
should be trained in contacting the emergency team,
and safe evacuation of the area.
13.2.8 Workers who are not trained, should not be
allowed to perform emergency response actions for
which they have not had training.
13.3 Toxicity information (for materials provided by
either the supplier or the user) should be readily
available for communication to infirmaries, clinics,
hospitals or other treatment facilities or personnel that
may be requested to treat persons affected by abnormal
conditions at the facility.