semi合集-English.pdf - 第7138页
SEMI S22-1103a © SEMI 2003, 2005 23 14.2.1.3 The colors fo r stop/of f actuator shoul d be red, black, gray or white. A re d, non-m u shroom shaped actuator is preferred. Green shou ld not be used for the stop/off actuat…
SEMI S22-1103a © SEMI 2003, 2005 22
13.7.3.1 FECS may be used in conjunction with electromechanical or solid state devices and components provided
the programmable safety control system conforms to an appropriate standard for electronic safety systems.
Components of the FECS should be tested and certified according to the requirements of the standard used.
Examples of recognized electronic safety systems standards include IEC 61508, ISO 13849-1, (EN 954-1),
ANSI/ISA SP84.01, DIN/V/VDE-0801.
EXCEPTION: Where the severity of a reasonably foreseeable mishap is deemed to be minor per SEMI S10, a
software-based safety interlock may be considered suitable.
NOTE 39: ¶8.4.1 states additional assessment criteria for safety-related components and assemblies.
NOTE 40: A FECS is a subsystem to a (PES) Programmable Electronic System. IEC 61508 is the preferred standard for
complex PES.
13.7.4 Safety Interlock Override The safety interlock system should be designed to minimize the need to
override safety interlocks during maintenance activities.
13.7.5 When maintenance access to areas protected by safety interlocks is necessary, safety interlocks that can be
defeated may be used, provided that they require an intentional operation to bypass. Safety interlocks that safeguard
operator tasks should not be able to be defeated without the use of a tool. Upon exiting or completing the
maintenance mode, all safety interlocks should be automatically restored.
13.7.6 If a safety interlock is defeated, the maintenance manual should identify administrative controls to safeguard
personnel and to minimize the hazard.
13.7.7 The restoration of a safety interlock should not automatically initiate machine motion or operation where this
can give rise to a hazardous condition.
13.7.8 Safety Interlock Circuit Connection To reduce the risk of interlocks not functioning correctly from short
circuiting of the device or wiring to ground, switches, contacts, and other safety interlock control devices should not
be connected to the earthed side of the circuit.
13.7.9 Shunt Trip Circuits Shunt trips should not be used as safety interlocks because they are not fail-safe.
13.8 Multiple Points of Control
13.8.1 Where multiple points of control are provided on a system, a hardware based device which meets the
considerations of ¶13.7 should be used to ensure a single point of control when multiple points of control can cause
an unacceptable risk.
13.8.2 The control point selection hardware-based device should either be lockable or be able to be under the
immediate control of the person(s) exposed to the hazard.
14 Interface Control
14.1 Hand Control Devices — Hand control devices should be located so that their intended use does not cause an
unacceptable risk.
14.1.1 Hand control devices should be designed and mounted to minimize inadvertent operation if an unacceptable
risk could result from inadvertent activation.
14.1.2 Control devices should withstand the stresses of normal use and foreseeable misuse. Considerations should
be given to normal operation as well as fault conditions. Factors such as chemical exposure to insulation, mechanical
and thermal stress, radiation, and other environmental factors that may result in unacceptable risks, should be taken
into account.
14.2 Push-actuators (buttons)
14.2.1 Colors — The color of the start/on actuator should be white, gray, black, or green. Green is preferred. Red
should not be used for the start/on actuator.
14.2.1.1 The color red should be used for EMO actuators. A yellow background for the EMO should be provided.
Refer to ¶13.3.
14.2.1.2 Non-EMO actuators should be differentiated from the EMO actuator.
SEMI S22-1103a © SEMI 2003, 2005 23
14.2.1.3 The colors for stop/off actuator should be red, black, gray or white. A red, non-mushroom shaped actuator
is preferred. Green should not be used for the stop/off actuator.
NOTE 41: NFPA 79 prefers that all pushbuttons for STOP or OFF functions be colored red, but will permit black, white, or
gray.
14.2.1.4 Contact push-actuators that cause operation while they are actuated and cease the operation when they are
released should be colored white, gray, or black. The colors red, yellow, and green should not be used.
14.2.1.5 Reset push-actuators should be colored blue, white, gray, or black. Reset push-actuators should not be
colored the same as stop/off actuators.
14.2.2 Markings All controls should be marked with their functional identification in accordance with Section
20.3.
14.3 Indicator Lights and Displays
14.3.1 Colors Indicator light lenses should be color-coded in accordance with Tables A1-8 through A1-10 in
Appendix 1.
14.3.2 Flashing Lights Flashing lights should be used when the application requires a compelling safety
indication to the operator. Single LED indicators should not be used for this application.
14.3.3 Illuminated Push-actuators Illuminated push-actuators should be color-coded in accordance with
Appendix 1 Tables A1-8 through A1-10. The color red for the emergency off actuator should not depend on the
illumination.
14.4 Actuators used to initiate a function should be designed and mounted to minimize inadvertent activation if an
unacceptable risk could result from that inadvertent activation.
14.5 Disconnects — All main disconnecting means should meet the considerations of ¶9.3.6. The means of energy
isolation for maintenance and servicing should be consistent with procedures described in the manuals.
15 Electrical Enclosures
15.1 Construction of Electrical Enclosures
15.1.1 Electrical enclosures should provide protection against contact with hazardous voltages as defined in Section
10 of this guideline.
15.1.2 Electrical enclosures should prevent the ingress of substances that may cause electrical faults within the
electrical enclosure. These substances may be emitted by the equipment under fault conditions or would be
expected in the equipment’s intended use environment.
NOTE 42: Facilities activation of sprinklers is not intended to be covered under this paragraph.
15.1.3 Electrical enclosures should have a complete bottom sufficient to prohibit the emission of molten material or
burning insulation under fault conditions.
NOTE 43: Baffling or equivalent construction techniques can be used to satisfy ¶15.1.1 through ¶15.1.3 and still meet the
functional needs of adequate ventilation.
15.1.4 Electrical enclosures should be of suitable substantial construction to withstand normal intended use and
reasonably foreseeable misuse. Enclosure walls and covers should have adequate strength to withstand deflection
that reduces electrical clearances below an acceptable value or prevent contact with energized parts. Enclosures
should be evaluated by inspection or testing in accordance with the enclosure test criteria in ¶22.14.
15.2 Access All panels providing access to electrical components should be located and mounted to facilitate:
a) accessibility and maintenance, and
b) protection against the external influences that may result in safety hazards.
NOTE 44: This section only applies to circuits that handle hazardous voltage or power.
SEMI S22-1103a © SEMI 2003, 2005 24
15.3 Location and Mounting
15.3.1 All components within electrical enclosures should be placed and oriented so that they can be identified
without moving components or the wiring. Components should not be mounted on panels that are intended to be
removed for routine maintenance.
EXCEPTION 1: Moveable panels are acceptable if they are well bonded, secured to the equipment, and the supply
wires are routed such that moving the slide panel will not deteriorate their insulation.
EXCEPTION 2: Devices supplied with non-hazardous voltages and power levels may be mounted on normally
removable panels.
15.3.2 Components should be located to permit inspection for correct operation and routine maintenance without
dismantling equipment or parts of the machine.
15.3.3 Where a special tool is necessary to remove an electrical component, the tool should be supplied.
15.3.4 Where electrical components are connected through plug-in arrangements, their association should be made
clear by type (shape), marking, or reference designation, whether singly or in combination.
15.3.5 Plug-in devices that are handled during normal operation should be provided with non-interchangeable
features where the lack of such a feature can result in an unacceptable risk.
15.3.6 Creepage and clearances should meet the criteria of basic insulation between primary parts and the earthed
electrical enclosure for the working voltages involved (See Appendix 1 Tables A1-12 and A1-13).
15.3.7 When components that handle hazardous voltage and hazardous power are mounted on swing panels, the
swing panels that have those components mounted on them should swing open adequately to provide access. The
wiring that flexes during servicing should be provided with additional mechanical protection at all points where it is
flexed.
EXCEPTION: Wiring that passes the flexing test described in ¶22.16 does not need to have additional mechanical
protection.
15.4 Component Identification — Components should be labeled on the surface of the panel where the component
is mounted so the component may be identified from the documentation as discussed in §21.
EXCEPTION: Engineering documentation that provides a layout of the electrical enclosure with component
identification may serve this function.
16 Conductors and Cables
16.1 General Conductors and cables should be rated for the voltage and load current at which they are used.
Proper overcurrent protection in accordance with Sections 10 and 11 should be provided. Conductor insulation or
covering should also be rated to withstand any external influences that they may be subjected to under normal
operating conditions, as well as under single fault conditions (e.g., the presence of water, corrosive substances,
mechanical stress, and thermal stress).
16.2 Conductor Construction Wire conductors should be constructed of copper. Conductors should be
constructed of materials compatible with the materials and ratings of the devices they will be connected to and the
environment in which they will be used.
NOTE 45: Most of the components used in the semiconductor industry are not compatible with aluminum wiring.
16.2.1 Conductor Ampacity Conductors should meet one of the following considerations:
c) be certified by an accredited testing laboratory to be used in a manner other than that described in Tables A1-1
through A1-6 in Appendix 1 and used in accordance with their certification; or
d) be sized in accordance with Tables A1-1 through A1-6 in Appendix 1.
EXCEPTION: Conductors that have been demonstrated to be adequate for their application by testing in accordance
with IEC 61010.