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SEMI S22-1103a © SEMI 2003, 2005 36 22.11.1 Test Equipment None. 22.11.2 Procedure — For each in depende nt safety interl ock circui t (such as do or safety interl ock), EMO, and safety sensor (e.g., e xhaust sensor, l…
SEMI S22-1103a © SEMI 2003, 2005 35
use pulleys or other means to adjust the angle of force applied to the strain relief on the equipment. Apply the force
gradually by slowly suspending the weight on the cord and maintain the applied force for a period of one minute.
22.7.3.2 Acceptable Results For Procedure Two — No displacement of the tape demonstrates an acceptable result.
22.8 Transformer Output Short Circuit Test
22.8.1 Test Equipment Timer with accuracy of 5 minutes. A substantial conductor suitable for carrying the
short circuit current.
22.8.2 Procedure — With the equipment in its standby condition, short circuit the output of each power
transformer.
NOTE 64: If overcurrent protection is connected to the output of the transformer under test, connect the short-circuit jumper
after this protective device.
EXCEPTION 1: Where the overcurrent protective devices on the input or output of the transformer are rated at not
more than 125 percent of the rated current of the transformer respectively and the overcurrent protective devices are
certified by an accredited testing laboratory, the transformer need not be subjected to this test.
EXCEPTION 2: A thermally-protected or impedance-protected transformer that is certified by an accredited testing
laboratory need not be subjected to this test.
22.8.3 Acceptable Results A hazardous condition (e.g., smoke, fire, or molten material) does not exist within 8
hours or before activation of overcurrent protection, thermal protection, or other protective circuit/device, whichever
occurs first.
22.9 Power Supply Output Short Circuit Test
22.9.1 Test Equipment Timer with accuracy of 5 minutes. A substantial conductor suitable for carrying the
short circuit current.
22.9.2 Procedure — With the equipment in its standby condition, short circuit the output of each power supply, one
at a time.
NOTE 65: If overcurrent protection is connected to the output of the power supply under test, connect the short circuit jumper
after this protective device.
EXCEPTION: A power supply that is certified by an accredited testing laboratory and used in accordance with its
certification and the manufacturer’s instructions need not be subjected to this test.
22.9.3 Acceptable Results A hazardous condition (e.g., smoke, fire, or molten material) does not exist within 8
hours or before activation of overcurrent protection, thermal protection, or other protective circuit/device, whichever
occurs first.
22.10 Safety Circuit Function Test
22.10.1 Test Equipment Contingent on safety devices being tested.
22.10.2 Procedure Functionally test each safety circuit by actuation and resetting.
22.10.3 Acceptable Results The following sections provide the acceptable results for the applicable safety
systems:
a) When the EMO is actuated, all hazardous voltage and all power greater than 240 volt-amps in the equipment
beyond the main power enclosure should be de-energized, except where permitted by ¶13.3.3.
b) Actuation of the emergency stop and safety interlocks causes the equipment, or relevant parts of the
equipment, to be automatically brought to a safe condition.
c) Resetting of the safety circuit should not cause the system to resume operation.
NOTE 66: This test documents the electrical functionality of the safety circuit(s). It is not intended to determine or document
the appropriateness of the shutdown actions taken.
22.11 Safety Circuit Conductor Disconnection Test
SEMI S22-1103a © SEMI 2003, 2005 36
22.11.1 Test Equipment None.
22.11.2 Procedure — For each independent safety interlock circuit (such as door safety interlock), EMO, and safety
sensor (e.g., exhaust sensor, low fluid level sensor), disconnect each safety interlock circuit one conductor at a time.
22.11.3 Acceptable Results The following sections provide the acceptable results for the applicable safety
circuits:
22.11.3.1 The opening of the safety circuit causes the equipment to be placed in a safe condition as if the safety
device had been actuated.
22.11.3.2 Reconnecting the conductor should not cause the system to resume operation.
22.12 Capacitor Stored Energy Discharge Test
22.12.1 Test Equipment Timer with accuracy of 1 seconds. DC voltmeter with sensitivity of 1.0 percent.
22.12.2 Procedure — Test each capacitor that stores a hazardous energy (20 Joules or more). Monitor the voltage
across the capacitor terminals continuously. Disconnect the equipment from the supply. Record the voltage across
the capacitor terminals after 10 seconds.
22.12.3 Acceptable Results The capacitor is discharged to less than 20 Joules within 10 seconds of equipment
disconnection from the supply.
NOTE 67: The following formula is provided to calculate the energy:
J = 1/2 CV
2
where: J is the energy in joules
C is the capacitance in farads
V is the potential in volts
EXCEPTION: This criterion does not apply if a tool is necessary to remove a panel to reach the capacitor and the
equipment is marked specifying the discharge time—5 minutes maximum—that is required for the capacitor to
discharge to less than 20 Joules.
22.13 Temperature Test
22.13.1 Test Equipment Timer with accuracy of 5 seconds. A thermometer with a full range of resolution and
an accuracy of 0.1C.
22.13.2 Procedure — The equipment is to be operated at the manufacturer’s maximum design load for 8 hours or
until thermal equilibrium is reached (whichever occurs first). Measure and record the ambient room temperature.
Measure and record the temperatures of the various components and devices for comparison with Appendix 1, Table
A1-11.
NOTE 68: Thermal equilibrium is attained when three successive readings taken at five minute intervals indicate that there is no
temperature change of the part exceeding 1.0C.
22.13.3 Acceptable Results The ambient temperature should be subtracted from 40°C or the maximum ambient
temperature specified in the manufacturer’s documentation, whichever is greater. This difference should be added
to all the measured temperatures and these results should not exceed the values listed in Appendix 1, Table A1-11.
22.14 Strength of Electrical Enclosures Test
22.14.1 30N Steady Force Test — This test applies to mechanical strength of enclosures.
22.14.1.1 Test Equipment — Force gauge.
22.14.1.2 Procedure — The enclosure walls and covers are to be subjected to a steady force of 30 N ± 3 N for a
period of 5 seconds applied by means of a straight un-jointed version of a test finger to the part, on or within the
complete equipment, or on a separate sub-assembly.
22.14.1.3 Acceptable Results — If the straight un-jointed version of the test finger penetrates the material or
opening, it should not be possible to touch any hazardous energized parts inside the enclosure with the jointed or un-
jointed test finger.
SEMI S22-1103a © SEMI 2003, 2005 37
22.14.2 250N Steady Force Test — This test applies to deflection of electrical enclosure panels.
22.14.2.1 Test Equipment — Force gauge.
22.14.2.2 Procedure — The panel is to be subjected to a steady force of 250 N ± 10 N (55.55 lbs. ± 2.22 lbs.) for a
period of 5 seconds, applied to the enclosure, fitted to the equipment, by means of a suitable test tool providing
contact over a circular plane surface 30 mm in diameter.
22.14.2.3 Acceptable Results — If flexing of the enclosure panel occurs, it should not cause shorting or reduction of
a clearance distance to less than that stipulated between the enclosure and hazardous energized parts inside.
22.15 Finger Probe Test
22.15.1 Test Equipment IEC Finger Probe (see IEC 61010).
22.15.2 Procedure — The jointed test finger is applied without force in every possible position to all outer surfaces,
including the bottom. Any enclosure panels that are not secured by a means that requires a tool to open are opened
and the finger probe is applied.
22.15.3 Acceptable Results If the finger probe cannot touch any conductive part that is energized with a
hazardous voltage under normal operating conditions, then this is an acceptable result.
22.16 Wire Flexing Test — This test applies to wiring that runs from a fixed panel to a swing panel or door and is
supplied with hazardous voltage or power.
22.16.1.1 Procedure — The swing panel or door is opened to its intended fully open position and then closed. This
process is repeated 500 times. After this is done a dielectric test is performed in accordance with Section 22.6 and
the wire is inspected for any signs of physical damage.
22.16.2 Acceptable Results — The wire passes the dielectric test and shows no visible signs of physical damage.
22.17 Reporting Test Results — include the following information on the test data form:
a) name, model, and serial number of the equipment,
b) date of test(s),
c) name(s)/signature(s) of tester(s),
d) complete test methods and conditions,
e) complete test results, and
f) complete test equipment information (type of test equipment, manufacturers' names, model numbers, serial
numbers, and calibration information).
22.17.1 The general configuration and actual operating mode that was used for the test should be clearly
documented. Where components are tested separately or only parts of the overall system are operational, this should
be documented as a condition for the test results reported. This information may be on the test data form(s) or
incorporated in the test report.