semi合集-English.pdf - 第7167页
SEMI S22-1103a © SEMI 2003, 2005 52 DELAYED REVISION SECTION 2 (Effective July 1, 2006) MODIFICATION TO SEMI S22 NOTICE: This Delaye d Revision Section contains m ateri al that has been balloted and approved b y the SEMI…
SEMI S22-1103a © SEMI 2003, 2005 51
DELAYED REVISION SECTION 1 (Effective July 1, 2006)
MODIFICATION TO SEMI S22
NOTICE: This Delayed Revision Section contains material that has been balloted and approved by the SEMI
Environmental Health and Safety Committee, but is not immediately effective. The provisions of this
material are not an authoritative part of the document until their effective date. The main body of SEMI
S22-1103a remains the authoritative version. Some or all of the provisions of revisions not yet in effect may
be optionally applied prior to the effective date, providing they do not conflict with portions of the
authoritative version other than those that are to be revised or replaced as part of the deferred revision, and
are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined
, and all material to be deleted shall
be struck through
.
D1-1 Revisions to Section 13 (Safety Circuits) — OPTIONAL Before Effective Date
D1-1.1 Make the following changes to ¶13.7.3 and ¶13.7.3.1:
13.7.3 Safety Interlock Design Electromechanical devices and components are preferred.
, but solid state
devices and non
-programmable solid state components may be used provided that the safety interlock system or
relevant parts of the system are evaluated for suitability for use in accordance with appropriate standard(s). The
evaluation for suitability should take into consideration abnormal conditions such as overvoltage, undervoltage,
power supply interruption, transient overvoltage, ramp voltage, electromagnetic susceptibility, electrostatic
discharge, thermal cycling, humidity, dust, vibration, jarring, or interfacing to a network.
EXCEPTION: Where the severity of a reasonably foreseeable mishap is deemed to be minor per SEMI S10, a
software-based safety interlock may be considered suitable.
13.7.3.1 FECS may be used in conjunction with electromechanical or solid state devices and components provided
the programmable safety control system conforms to an appropriate standard for electronic safety systems.
Components of the FECS should be tested and certified according to the requirements of the standard used.
Examples of recognized electronic safety systems standards include IEC 61508, ISO 13849-1, (EN 954-1),
ANSI/ISA SP84.01, DIN/V/VDE-0801.
EXCEPTION: Where the severity of
a reasonably foreseeable mishap is deemed to be minor per SEMI S10, a
software-based safety interlock may be considered suitable.
SEMI S22-1103a © SEMI 2003, 2005 52
DELAYED REVISION SECTION 2 (Effective July 1, 2006)
MODIFICATION TO SEMI S22
NOTICE: This Delayed Revision Section contains material that has been balloted and approved by the SEMI
Environmental Health and Safety Committee, but is not immediately effective. The provisions of this
material are not an authoritative part of the document until their effective date. The main body of SEMI
S22-1103a remains the authoritative version. Some or all of the provisions of revisions not yet in effect may
be optionally applied prior to the effective date, providing they do not conflict with portions of the
authoritative version other than those that are to be revised or replaced as part of the deferred revision, and
are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined
, and all material to be deleted shall
be struck through
.
D2-1 Revisions to Section 13 (Safety Circuit) — OPTIONAL Before Effective Date
D2-1.1 Modify “e” of 13.3.4:
e)
the EMO actuator should be non-lockable and self-latching.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S23-0705 © SEMI 2005 1
SEMI S23-0705
GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND
MATERIALS USED BY SEMICONDUCTOR MANUFACTURING
EQUIPMENT
This guide was technically approved by the global Environmental Health and Safety Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2005.
1 Purpose
1.1 This guide addresses concepts related to energy, utilities and materials conservation on semiconductor
manufacturing equipment.
1.2 This guide addresses measurements related to energy, utilities and materials usage on semiconductor
manufacturing equipment.
1.3 This guide also addresses continuous improvement planning for energy, utilities and materials usage on
semiconductor manufacturing equipment in order to promote energy, utilities and materials conservation.
1.4 This guide is a series of options and instructions intended to increase awareness of the reader to available
techniques in the area of energy, utilities and materials conservation. A particular course of action is suggested for
utilities and materials use measurement and conversion of use measurements into equivalent energy.
NOTE 1: Because this SEMI standard is a Guide, all criteria using “should” may be considered optional.
2 Scope
2.1 This guide is intended to be a tool that can be used to analyze energy, utilities and materials conservation on
semiconductor manufacturing equipment.
2.2 This guide describes methods for reporting energy, utilities and material use rate, and the consumption
reduction in semiconductor manufacturing equipment.
2.3 This guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy
consumption and conservation related to SME as well as easy planning of energy conservation.
2.4 This guide focuses only on the use stage of equipment life cycle and addresses a limited set of utilities and
materials to be considered.
2.5 Additionally, this guide describes setting targets for, verifying and improving utilities and materials use rate and
energy conservation.
2.6 This guide contains the following sections:
Purpose
Scope
Limitations
Referenced Standards
Terminology
General Concepts
Life Cycle Assessment (LCA) of Energy Usage
Baseline Process(es)
Utilities and Materials Use rate Measurement