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SEMI S23-0705 © SEMI 2005 1 SEMI S23-0705 GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND MATERIALS USED BY SEMIC ONDUCTOR MANUFACTURING EQUIPMENT This guide was technicall y approved by the global Environm ental Health …
SEMI S22-1103a © SEMI 2003, 2005 52
DELAYED REVISION SECTION 2 (Effective July 1, 2006)
MODIFICATION TO SEMI S22
NOTICE: This Delayed Revision Section contains material that has been balloted and approved by the SEMI
Environmental Health and Safety Committee, but is not immediately effective. The provisions of this
material are not an authoritative part of the document until their effective date. The main body of SEMI
S22-1103a remains the authoritative version. Some or all of the provisions of revisions not yet in effect may
be optionally applied prior to the effective date, providing they do not conflict with portions of the
authoritative version other than those that are to be revised or replaced as part of the deferred revision, and
are labeled accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined
, and all material to be deleted shall
be struck through
.
D2-1 Revisions to Section 13 (Safety Circuit) — OPTIONAL Before Effective Date
D2-1.1 Modify “e” of 13.3.4:
e)
the EMO actuator should be non-lockable and self-latching.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S23-0705 © SEMI 2005 1
SEMI S23-0705
GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND
MATERIALS USED BY SEMICONDUCTOR MANUFACTURING
EQUIPMENT
This guide was technically approved by the global Environmental Health and Safety Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2005.
1 Purpose
1.1 This guide addresses concepts related to energy, utilities and materials conservation on semiconductor
manufacturing equipment.
1.2 This guide addresses measurements related to energy, utilities and materials usage on semiconductor
manufacturing equipment.
1.3 This guide also addresses continuous improvement planning for energy, utilities and materials usage on
semiconductor manufacturing equipment in order to promote energy, utilities and materials conservation.
1.4 This guide is a series of options and instructions intended to increase awareness of the reader to available
techniques in the area of energy, utilities and materials conservation. A particular course of action is suggested for
utilities and materials use measurement and conversion of use measurements into equivalent energy.
NOTE 1: Because this SEMI standard is a Guide, all criteria using “should” may be considered optional.
2 Scope
2.1 This guide is intended to be a tool that can be used to analyze energy, utilities and materials conservation on
semiconductor manufacturing equipment.
2.2 This guide describes methods for reporting energy, utilities and material use rate, and the consumption
reduction in semiconductor manufacturing equipment.
2.3 This guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy
consumption and conservation related to SME as well as easy planning of energy conservation.
2.4 This guide focuses only on the use stage of equipment life cycle and addresses a limited set of utilities and
materials to be considered.
2.5 Additionally, this guide describes setting targets for, verifying and improving utilities and materials use rate and
energy conservation.
2.6 This guide contains the following sections:
Purpose
Scope
Limitations
Referenced Standards
Terminology
General Concepts
Life Cycle Assessment (LCA) of Energy Usage
Baseline Process(es)
Utilities and Materials Use rate Measurement
SEMI S23-0705 © SEMI 2005 2
Conversion Factors for Equivalent Energy
1
Target Setting and Improvement
Monitoring and Reporting
Related Documents
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This guide is not intended to supersede the applicable codes and regulations of the region where the equipment
is used.
3.2 This guide is not intended to provide definite targets for utilities and materials usage or energy conservation.
3.3 The information suggested in this guide may be provided by the equipment supplier to the user if that is the
agreement between those parties.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI S2 Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI E6 Guide for Semiconductor Equipment Installation Documentation
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations & Acronyms
5.1.1 DIW De-ionized Water
5.1.2 ISMT International SEMATECH
5.1.3 LCA Life Cycle Assessment
5.1.4 UPW Ultra Pure Water
5.2 Definitions
5.2.1 Definitions defined in SEMI S2 and SEMI E6 is incorporated herein by reference unless a term is otherwise
specified below.
5.2.2 baseline for the purposes of this document, “baseline” refers to operating conditions, including process
chemistry, for which the equipment was designed and manufactured, (refer to SEMI S2).
5.2.3 energy impact positive and negative effects on the amount of energy required to produce or provide an
item or material, or to execute a process or step.
5.2.4
environmental impact positive and negative effects to the earth environment from a variety of sources
including people and their activities, and the operation of semiconductor manufacturing equipment and facilities
5.2.5 exhaust airflow moving from semiconductor manufacturing equipment to a location outside of a fab or
laboratory area.
1 Conversion Factors for Equivalent Energy shown in Table-2 except N2 are quoted from the SEAJ document “SEAJ-E-002E Guideline for Energy Quantification on
Semiconductor Manufacturing Equipment and Utilities”