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SEMI S23-0705 © SEMI 2005 3 5.2.6 heat load the sum of all heat ene rgy transferre d by conduction, convecti on, and radiation outsi de the envelop of t he equipm ent. 5.2.7 idle the condition where the equipment is …
SEMI S23-0705 © SEMI 2005 2
Conversion Factors for Equivalent Energy
1
Target Setting and Improvement
Monitoring and Reporting
Related Documents
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This guide is not intended to supersede the applicable codes and regulations of the region where the equipment
is used.
3.2 This guide is not intended to provide definite targets for utilities and materials usage or energy conservation.
3.3 The information suggested in this guide may be provided by the equipment supplier to the user if that is the
agreement between those parties.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI S2 Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI E6 Guide for Semiconductor Equipment Installation Documentation
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations & Acronyms
5.1.1 DIW De-ionized Water
5.1.2 ISMT International SEMATECH
5.1.3 LCA Life Cycle Assessment
5.1.4 UPW Ultra Pure Water
5.2 Definitions
5.2.1 Definitions defined in SEMI S2 and SEMI E6 is incorporated herein by reference unless a term is otherwise
specified below.
5.2.2 baseline for the purposes of this document, “baseline” refers to operating conditions, including process
chemistry, for which the equipment was designed and manufactured, (refer to SEMI S2).
5.2.3 energy impact positive and negative effects on the amount of energy required to produce or provide an
item or material, or to execute a process or step.
5.2.4
environmental impact positive and negative effects to the earth environment from a variety of sources
including people and their activities, and the operation of semiconductor manufacturing equipment and facilities
5.2.5 exhaust airflow moving from semiconductor manufacturing equipment to a location outside of a fab or
laboratory area.
1 Conversion Factors for Equivalent Energy shown in Table-2 except N2 are quoted from the SEAJ document “SEAJ-E-002E Guideline for Energy Quantification on
Semiconductor Manufacturing Equipment and Utilities”
SEMI S23-0705 © SEMI 2005 3
5.2.6 heat load the sum of all heat energy transferred by conduction, convection, and radiation outside the
envelop of the equipment.
5.2.7 idle the condition where the equipment is energized and readied for processing (all systems ready and
temperatures controlled) but is not actually performing any active function such as materials movement or
processing, (refer to SEMI E6).
5.2.8 Life Cycle Assessment a methodology used to evaluate the environmental impact of semiconductor
manufacturing equipment throughout its life cycle, including raw material procurement, manufacturing,
transportation, use and disposal.
5.2.9 process mode The condition where the equipment is energized and performing its intended function on
target materials (such as implanting wafers, pumping gas, or inspecting photo-masks).
5.2.10 roadmap a sequence for the incremental introduction or improvement of technology over time with
month or year milestones and supporting information.
6 General Concepts
6.1 Energy is used to produce the various utilities and materials that go into the manufacturing, packaging,
shipping, installing, use, decommissioning and disposing of a piece of semiconductor manufacturing equipment.
Reducing the energy used in any of these life cycles will improve the environmental impact of the semiconductor
manufacturing equipment.
NOTE 2: This guide focuses on only the use of the equipment life cycle stage.
6.2 Given the state of the industry with regard to energy conservation information and measurements, the use stage
of the equipment life cycle appears to be the most effective stage to analyze for energy conservation opportunities.
The energy used in the use stage is the best derived from the use rate of utilities and materials provided for the stage.
6.3 Various methods have been proposed for converting the use rate of specific utilities and materials into
equivalent energy values. The energy used to produce any particular utility or material varies from location to
location and from time to time. While any single set of energy conversion factors cannot be valid world wide, some
parties find value in the conversion exercise, particularly in identifying a utility or material that has a greater energy
impact than others.
6.4 The equipment suppliers should investigate the utilities and materials use rate of the equipment and identify and
implement design or process changes that lessen the energy impact of the equipment. The expense of implementing
these changes can be balanced against the potential energy impact improvement when developing an energy
conservation plan.
NOTE 3: Changes in use rate can also affect the users cost of ownership for the equipment. This can also be considered in the
cost-benefit analysis.
6.5 An equipment user can consider supplier-reported utilities and materials use rates, energy equivalent values, and
planned improvements when making the purchasing decisions.
6.6 The use rate of utilities and materials for a piece of equipment depends on the particular control parameters used
to achieve the desired effect on a wafer (i.e. it depends on the process recipe) as well as the particular hardware used
in the equipment and the conditions under which the measurements are taken. It is important to record this and other
particular information when use rate measurements are conducted.
6.7 Based on the above considerations, the equipment supplier should set targets for energy, utilities and materials
conservation, and consider continuous improvement plans for energy, utilities and materials usage on semiconductor
manufacturing equipment.
NOTE 4: The supplier may apply the concepts of this guide to the equipment model or models of their choice.
6.8 The characterization and quantification of energy, utilities and materials consumption should be based on a
supplier baseline process.
SEMI S23-0705 © SEMI 2005 4
7 Life Cycle Assessment (LCA) of Energy Usage
7.1 Analyzing energy use during various stages in the life cycle of semiconductor manufacturing equipment can
yield valuable information for promoting energy conservation.
7.2 There are many ways the equipment life cycle can be conceptually divided into different stages.
7.3 This guide focuses only on the use (or use) stage of equipment life cycle.
7.4 Other life cycle stages may include
raw materials procurement,
manufacturing,
packaging,
transportation (shipment),
decommissioning, and
disposal.
7.5 The use stage can be further divided into processing, idling, maintenance and service. This guide only addresses
processing and idling.
7.6 Using the model methods of this guide, the equipment supplier may also analyze maintenance and service.
NOTE 5: The SEAJ standard “SEAJ-E-003E Guideline for conducting an LCA of Semiconductor Manufacturing Equipment
– Energy Saving Perspective ” may be referenced for an example of a more complete life cycle analysis.
8 Baseline Process(es)
8.1 The measurement, conservation monitoring, improvement, and reporting methods should be based on one or
several supplier baseline process(es). The equipment supplier is encouraged to consider baseline process(es) which
also meet the needs of the users.
8.2 Considering the range of use a supplier intends for the equipment, several baseline processes may be used when
utilities and materials use rate measurements are conducted.
8.3 The use rate and energy impact of any particular baseline process recipe can vary depending on the equipment
optional hardware that is installed, whether the optional hardware is participating in the process or not (it may
consume utilities and materials even when idle). Therefore, when baseline process(es) are designed, the particular
hardware configuration can be a significant parameter and should be considered.
NOTE 6: In the course of analysis, the supplier may discover that for two or more recipes which have the same desired effect,
one recipe is more energy efficient than another.
NOTE 7: For users to make effective cost of ownership or energy impact comparisons between equipment, it is useful to have
supplier data derived from the same baseline process (i.e. achieving the same desired effect on a substrate or other material). It is
recommended that suppliers discuss this with the users and gather data that will facilitate effective comparisons.
9 Utilities and Materials Use rate Measurement
9.1 A first step in determining the energy impact of a particular piece of equipment during any life cycle stage is to
measure the use rate of utilities and materials in that stage.
9.2 Table 1 contains the recommended minimum set of utility and material parameters to measure while the
equipment is performing its intended material processing function (according to a particular recipe) and while it is
idling.
NOTE 8: Related Information 1 contains additional use rate information that may be useful.
NOTE 9: Many different chemicals may be used in the processing step. Process chemicals are not included in Table 1 because
equivalent energy conversion factors are generally not available for them. The equipment supplier may, however, wish to
measure and record their use rate anyway.