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SEMI E99.1-1104 © SEMI 2000, 2004 6 CIDRW Upstream Controller S18,F13 Subs ystem Comm and Request Target ID = “ 00” CPVAL = “OP ”, “MT” S18,F14 Subs ystem Comm and Ack nowledge SSAC K = “NO ” S18,F11 W rite ID Target ID …

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SEMI E99.1-1104 © SEMI 2000, 2004 5
RELATED INFORMATION 1
SCENARIOS
NOTICE: This related information is not an official part of SEMI E99.1. This related information was approved for
publication by full letter ballot procedures on January 14, 2000.
This section provides examples of typical scenarios for a Carrier ID Reader/Writer.
R1-1 Read ID
R1-1.1 The upstream controller sends a Read ID Request message to the CIDRW for Head 1. The CIDRW Head 1
reads the ID, and the CIDRW returns the ID to the upstream controller.
CIDRW
Upstream
Controller
S18,F9 Read ID Request
Target ID = “01”
S18,F10 Read ID Data
MID = “XYZ001”
Figure R1-1
Read ID Scenario
R1-2 Read Data
R1-2.1 The upstream controller sends a Read Data Request message to the CIDRW for Head 1 and DataSeg 1. The
CIDRW Head 1 reads the data, and the CIDRW returns the data to the upstream controller.
CIDRW
Upstream
Controller
S18,F5 Read Request
Target ID = “01”
DataSeg = “0”
S18,F6 Read Data
Data = “yyyyy”
Figure R1-2
Read Data Scenario
R1-3 Write ID
R1-3.1 The CIDRW is in IDLE. The upstream controller requests the CIDRW change its operational status to
MAINTENANCE.
R1-3.2 The CIDRW changes to MAINTENANCE and replies that it has changed state.
R1-3.3 The upstream controller sends a Write ID Request message to the CIDRW for Head 1. The CIDRW Head 1
reads the ID, and the CIDRW returns the ID to the upstream controller.
SEMI E99.1-1104 © SEMI 2000, 2004 6
CIDRW
Upstream
Controller
S18,F13 Subsystem
Command Request
Target ID = “00”
CPVAL = “OP”, “MT”
S18,F14 Subsystem
Command Acknowledge
SSACK = “NO”
S18,F11 Write ID
Target ID = “01”
MID = “ABC”
S18,F12 Write ID Data
SSACK = “NO”
Figure R1-3
Write ID Data Scenario
R1-4 Write Data
R1-4.1 The upstream controller sends a Write Data Request message to the CIDRW for Head 1 and DataSeg 1.
The CIDRW Head 1 writes the data, and the CIDRW returns the results to the upstream controller.
CIDRW
Upstream
Controller
S18,F7 Write Data Request
Target ID = “01”
DataSeg = “0”
Data = “xxxxxxx”
S18,F8 Write Data
Acknowledge
SSACK = “NO”
Figure R1-4
Write Data Scenario
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E100-1104 © SEMI 2000, 2004 1
SEMI E100-1104
SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO
TRANSPORT AND STORE 6 INCH OR 230 mm RETICLES
This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is
the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition
approved by the North American Regional Standards Committee on August 16, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published February 2000,
previously published March 2002.
1 Purpose
1.1 This standard specifies the Reticle SMIF Pod
(RSP) used to transport and store 6 inch or 230 mm
reticles in a reticle (photomask) or integrated circuit
(IC) manufacturing facility.
2 Scope
2.1 This standard is intended to set an appropriate level
of specification that places minimal limits on
innovation while ensuring modularity and inter-
changeability at all mechanical interfaces. Most of the
requirements given in this specification are in the form
of maximum or minimum dimensions with very few
required surfaces. Only the physical interfaces for the
RSP are specified; no materials requirements or micro-
contamination limits are given in this specification.
2.2 The pellicle exclusion volumes of this specification
accommodate pellicles which extend the full length of
the reticles. The pellicle exclusion volume widths are
limited to 151 mm for 230 mm reticles, and 129 mm for
6 inch reticles.
2.3 The RSP has the following components, sub-
components, and other features. A “” symbol indicates
components or features which are required and a “”
symbol indicates components or features which are
optional.
Top
robotic handling flange (optional)
Interior
supports for one 6 inch or 230 mm reticle
reticle capture mechanism
end-effector exclusion volume
2 safety rail exclusion volumes
pellicle exclusion volume
transverse pellicle exclusion volume
Sides
2 side handling flanges on the sides parallel to
the bi-lateral reference plane (optional)
1 carrier ID exclusion volume on the rear side
2 side handling exclusion volumes
Bottom
door compatible with SMIF as defined in
SEMI E19.4
pod latch-pin holes
features which mate with kinematic coupling
pins
carrier sensing pads as defined in SEMI E1.9
4 info pads
4 bottom conveyor rails
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes
Used to Transport and Store 300 mm Wafers
SEMI E19.4 — 200 mm Standard Mechanical Interface
(SMIF)
SEMI E30.1 — Inspection and Review Specific
Equipment Model (ISEM)
SEMI E47.1 — Provisional Mechanical Specification
for Boxes and Pods Used to Transport and Store 300
mm Wafers
SEMI E57 — Mechanical Specification for Kinematic
Couplings Used to Align and Support 300 mm Wafer
Carriers
SEMI P5 — Specification for Pellicles