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SEMI E100-1104 © SEMI 2000, 2003 2 NOTICE: Unless ot herwise indi cated, all documents cited shall be the latest published versions. 4 Terminology 4.1 Definitions 4.1.1 bilateral reference plane — a vertical plane that b…

SEMI E100-1104 © SEMI 2000, 2004 1

SEMI E100-1104

SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO

TRANSPORT AND STORE 6 INCH OR 230 mm RETICLES

This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is

the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Regional Standards Committee on August 16, 2004. Initially available at

www.semi.org September 2004; to be published November 2004. Originally published February 2000,

previously published March 2002.

1 Purpose

1.1 This standard specifies the Reticle SMIF Pod

(RSP) used to transport and store 6 inch or 230 mm

reticles in a reticle (photomask) or integrated circuit

(IC) manufacturing facility.

2 Scope

2.1 This standard is intended to set an appropriate level

of specification that places minimal limits on

innovation while ensuring modularity and inter-

changeability at all mechanical interfaces. Most of the

requirements given in this specification are in the form

of maximum or minimum dimensions with very few

required surfaces. Only the physical interfaces for the

RSP are specified; no materials requirements or micro-

contamination limits are given in this specification.

2.2 The pellicle exclusion volumes of this specification

accommodate pellicles which extend the full length of

the reticles. The pellicle exclusion volume widths are

limited to 151 mm for 230 mm reticles, and 129 mm for

6 inch reticles.

2.3 The RSP has the following components, sub-

components, and other features. A “” symbol indicates

components or features which are required and a “”

symbol indicates components or features which are

optional.

 Top

 robotic handling flange (optional)

 Interior

 supports for one 6 inch or 230 mm reticle

 reticle capture mechanism

 end-effector exclusion volume

 2 safety rail exclusion volumes

 pellicle exclusion volume

 transverse pellicle exclusion volume

 Sides

 2 side handling flanges on the sides parallel to

the bi-lateral reference plane (optional)

 1 carrier ID exclusion volume on the rear side

 2 side handling exclusion volumes

 Bottom

 door compatible with SMIF as defined in

SEMI E19.4

 pod latch-pin holes

 features which mate with kinematic coupling

pins

 carrier sensing pads as defined in SEMI E1.9



4 info pads

 4 bottom conveyor rails

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes

Used to Transport and Store 300 mm Wafers

SEMI E19.4 — 200 mm Standard Mechanical Interface

(SMIF)

SEMI E30.1 — Inspection and Review Specific

Equipment Model (ISEM)

SEMI E47.1 — Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E57 — Mechanical Specification for Kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI P5 — Specification for Pellicles

SEMI E100-1104 © SEMI 2000, 2003 2

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 bilateral reference plane — a vertical plane that

bisects the reticle and is perpendicular to both the

horizontal and facial reference planes. The bilateral

reference plane is coplanar with the bilateral datum

plane defined in SEMI E57.

4.1.2 facial reference plane — a vertical plane which

bisects the reticle and is parallel to the front side of the

pod (where reticles are removed or inserted). The facial

reference plane passes through the center of the

200 mm SMIF as defined in SEMI E19.4. The facial

reference plane is coplanar with the facial datum plane

defined in SEMI E57.

4.1.3 horizontal reference plane — a horizontal plane

coplanar with the top surface of the port door as defined

in SEMI E19.4. The horizontal reference plane is

coplanar with the horizontal datum plane defined in

SEMI E57.

4.1.4 minienvironment — a localized environment

created by an enclosure to isolate the product from

contamination and people.

4.1.5 nominal reticle center line — the line that is

defined by the intersection of the two vertical reference

planes (facial and bilateral) and passes through the

nominal center of the seated reticle (which must be

horizontal when the carrier is placed on the SMIF as

defined in SEMI E19.4).

4.1.6 pellicle — as defined in SEMI P5.

4.1.7 reticle — as defined in SEMI E30.1.

4.1.8 Reticle SMIF Pod (RSP) — a minienvironment

compatible carrier capable of holding one 6 inch or one

230 mm reticle in a horizontal orientation during

transport and storage and is compatible with a Standard

Mechanical Interface (SMIF) per SEMI E19.4.

4.1.9 robotic handling flanges — horizontal

projections on the top of the box for lifting and rotating

the box (as defined in SEMI E47.1).

4.1.10 side handling flanges — horizontal projections

on the sides of the pod (sides parallel to the bilateral

reference plane) for manual or automated lifting,

transportation or positioning of the pod.

5 Ordering Information

5.1 Intended Use — This standard is intended to

specify reticle carriers over a reasonable lifetime of use,

not just those in new condition. For this reason, the

purchaser needs to specify a time period and the

number and type of uses to which the carriers will be

put. It is under these conditions that the carriers must

remain in compliance with the requirements listed in

Section 6.

5.2 Reticle Size and Thickness — The purchaser needs

to specify the reticle size and thickness to be

accommodated in the RSP.

5.3 Optional Features — The purchaser needs to

specify whether optional components (identified in

Section 2) are required.

5.4 Temperature Ranges — The purchaser needs to

specify two sets of temperatures to which the RSPs

might be exposed. An operating temperature range is

the set of environmental temperatures in which the

RSPs will remain in compliance with the requirements

listed in Section 6. A temporary temperature range is

the set of environmental temperatures to which the pods

can be exposed such that when the RSPs return to the

operating temperature range, the RSPs will be in

compliance with the requirements listed in Section 6.

Limits on exposure times to elevated temperatures

should be specified.

5.5 Electrostatic Dissipation — The end user may

require a continuous path to ground from the reticle to

the carrier registration and handling features. The

purchaser needs to specify whether electrostatic

dissipation is required.

5.6 Contamination Requirements — The purchaser

needs to specify their contamination requirements.

6 Requirements

6.1 Symmetry — Most of the dimensions of the RSP

are determined with respect to the three orthogonal

reference planes defined in this document: the facial

reference plane, the horizontal reference plane and the

bilateral reference plane. All dimensions are symmetric

about the bilateral reference plane except the latch

features. All dimensions are symmetric about the facial

reference plane except the registration features, carrier

sensing pads, info pads, and latch features.

6.2 Door — The pod door, and its frame on the bottom

of the pod, must be compatible with a port which

conforms to SEMI E19.4.

6.3 Reticle Centering and Capture — When the carrier

is closed, the reticle must be secured in all degrees of

freedom within the carrier to prevent movement during

transport and must be centered with respect to the SMIF

defined in SEMI E19.4. A bisecting plane through the

reticle, parallel to the bilateral reference plane must be

within x114 of the bilateral reference plane of the load

port when the reticle is seated in the carrier. A

SEMI E100-1104 © SEMI 2000, 2004 3

bisecting plane through the reticle, parallel to the facial

reference plane must be within y133 of the facial

reference plane of the load port when the reticle is

seated in the carrier. When the carrier is open, it must

provide a horizontal reticle capture range of x135 and

y135. This capture range must be provided at z162

above the horizontal reference plane.

6.4 Exclusion Volumes — The interior of the RSP must

never intrude into the pellicle exclusion volumes, and

must not intrude into the end-effector exclusion

volumes or safety rail exclusion volumes when the

carrier is open. Where the exclusion volumes overlap,

the end-effector exclusion volume is reduced by the

pellicle exclusion volume when handling pelliclized or

chrome-down reticles.

6.4.1 End-Effector Exclusion Volumes — Volumes in

an opened pod which must be free for the end-effector

to enter and handle the reticle as defined by x116, x132,

y136, x144, x146, y144, z159, and z160 for a 230 mm

RSP, and by x118, x143, x145, y143, z159, and z160 for

a 6 inch RSP. No obstructions should exist in the end-

effector exclusion volume which extends in the

direction normal to the facial reference plane.

6.4.2 Pellicle Exclusion Volumes — Volumes in the

pod below the reticle which must remain free from

intrusion to accommodate the pellicle mounted on the

reticle. No obstructions should exist in the pellicle

exclusion volume which extends in the direction normal

to the facial reference plane as defined by x115, z159

and z161 for a 230 mm RSP, and by x119, z159 and

z161 for a 6 inch RSP. No obstructions should exist in

the transverse pellicle exclusion volume which extends

in the direction normal to the bilateral reference plane

as defined by y129, z159 and z163 for a 230 mm RSP,

and by y130, z

159 and z163 for a 6 inch RSP.

NOTE 1: The transverse pellicle exclusion volume is only

intended to specify where the reticle supports in the pod

cannot exist. Reticles with the pellicles transverse are

typically handled with end-effectors which grip from above

the reticle.

6.4.3 Safety Rail Exclusion Volumes — Volumes in an

opened pod which must remain free from intrusion to

accommodate safety rails which may be used on end-

effectors to protect the edge of the reticle during

handling. No obstructions should exist in the safety

rail exclusion volumes which extend in the direction

normal to the facial reference plane as defined by x137

and z167 for a 230 mm, and by x138 and z167 for a 6

inch RSP.

6.5 External Dimensions — Figures 1, 2 and 3 show,

respectively, the external top view, a detail and the

front view of the RSP. Table 2 defines all of the

external dimensions of the RSP (equivalent for both the

6 inch and the 230 mm versions).

6.6 Internal Dimensions — Figures 4 through 8 show

internal dimensions for the 6 inch and 230 mm versions

of the RSP. Table 2 defines all internal dimensions

which are common to the 6 inch and 230 mm RSP.

Table 3 defines the internal dimensions which apply

only to the 230 mm RSP. Table 4 defines the internal

dimensions which apply only to the 6 inch RSP. The

maximum height of the features which support the

reticle are given by z164 for a 230 mm RSP and z165

for a 6 inch RSP.

NOTE 2: The maximum height of the reticle supports, plus

the clearance between the reticle supports and reticle (chosen

by the tool supplier) determine the height the reticle must be

lifted before being extracted from, or inserted into the RSP.

6.7 Robotic Handling Flange — On the top of the pod

is an optional handling flange for automated

manipulation of the RSP. Figures 1, 3, and 5 show

dimensions for the robotic handling flange. Table 2

defines the dimensions for the robotic handling flange.

6.8 Side Handling Flanges — On the sides of the pod

parallel to the bilateral reference plane are optional

handling flanges for automated manipulation of the

RSP. Figures 1, 2, and 3 show dimensions for the side

handling flanges. Table 2 defines the dimensions for the

side handling flanges. No obstructions may exist in the

side handling exclusion volumes which extend in the

direction normal to the facial reference plane as defined

by x136 and z166 when the side handling flanges are

present.

6.9 Kinematic Coupling — The RSP door must have

the capability of registering on the kinematic pins

defined in SEMI E57. The features that mate with the

pins must provide a lead-in capability that corrects an

RSP misalignment no greater than r19 in any horizontal

direction. However, it is recommended that robots

placing RSPs on kinematic couplings use as little of this

lead-in capability as possible to avoid wear.

6.10 Carrier Sensing Pads — The RSP door must have

carrier sensing pads as defined in SEMI E1.9.

6.11 Info Pads — When the RSP is placed on a port,

the info pads A, B, C, and D communicate information

about the RSP configuration. Figures 6 and 8 show the

dimensions of the info pads. Table 2 defines the info

pad dimensions. A pad in the up position must be z26

above the horizontal reference plane. A pad in the

down position must be z2 above the horizontal

reference plane. Info pad assignments are shown in

Table 1. Info pads that are “not defined” can be at

either the up or down position unless specified by the

end user. RSP configurations “to be assigned” may be

assigned by the end user.