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SEMI E103-0704 © SEMI 2000, 2004 1 SEMI E103-0704 MECHANICAL SPECIFICATION FOR A 300 mm SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP This specification was technically approved by the Gl obal Ph ysical Interfaces & C…

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SEMI E101-1104 © SEMI 2000, 2004 9
APPENDIX 2
NOTICE: The material in this appendix is an official part of SEMI E101 and was approved by full letter ballot
procedures on January 14, 2000 by the Japanese Regional Standards Committee.
1Carrier Handler
1+ Load Port
0,1 Carrier Operation Panel
0,1 Manual Switches
0,1 Carrier Presence Indicator
0,1 Carrier Indicators
0,1 Carrier Placement Indicator
1Load Plate
0,1 Carrier Sensors
1 E57 Kinematic Coupling
0,1Carrier ID Reader/Writer
0,1[OC] Carrier Slot Mapper
0,1 Load Port Door
0,1 E84 PI/O for AGV/RGV
0,1 E64 Cart to Tool Docking Port I/F
1 Internal Buffer
1 Carrier Transfer
Robot
1+ Carrier Storage
1Carrier Sensors
1Load Plate
0,1+ Internal Substrate Port
0,1 Dock Plate
1Load Plate
0,1Carrier Purge interface
0,1 Dock/Undock
Mechanism
0,1 FOUP Opener
1Open/Close
Equipment
1Load Port Unit
OHT
AGV/
RGV/
PGV
0,1[FOUP]Carrier Slot
Mapper
1 Carrier Opener/Loader
1+ Human Interfaces (User Interface)
1+ EMO Switch1+ Signal Tower 1+ Operation Console
0,1 Carrier Sensors
0,1
Substrate
Handler
0, 1+
Substrate
Robot
Transfer
Process
Part
0,1 [FOUP]
Carrier Slot
Mapper
0,1 Substrate
ID Reader
0,1 Aligner
1 Internal Buffer Type EFEM
0,1Status Indicators
0,1Carrier ID Reader/Writer
1+ Load Port Group(E15.1(Option-1 or 3))
0,1
Info Pad Sensors
1 E57 Kinematic
Coupling
1 E57 Kinematic
Coupling
Figure A2-1
Relation between Internal Buffer Type EFEM Functional Structure Model and Existing SEMI Standards
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consent of SEMI.
SEMI E103-0704 © SEMI 2000, 2004 1
SEMI E103-0704
MECHANICAL SPECIFICATION FOR A 300 mm SINGLE-WAFER BOX
SYSTEM THAT EMULATES A FOUP
This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is
the direct responsibility of the European Equipment Automation Committee. Current edition approved by the
European Regional Standards Committee on May 14, 2004. Initially available at www.semi.org June 2004;
to be published July 2004. Originally published June 2000; last published November 2003.
1 Purpose
1.1 This standard specifies the carrier side of the
mechanical interface between load ports (or buffers)
with FIMS interfaces on process or metrology
equipment and a system that includes a box that holds
only one wafer (such as a test wafer) and that fits onto
an adapter mechanism called a single-wafer interface
(SWIF). This system appears to the equipment to be a
300 mm FOUP (except that only the volume around the
middle wafer may be accessible).
2 Scope
2.1 This standard is intended to set an appropriate level
of specification that places minimal limits on
innovation while ensuring modularity and inter-
changeability at relevant mechanical interfaces. Only
the mechanical interface between a load port with a
FIMS interface and this system (of a single-wafer box
and a SWIF) is specified here; the mechanical interface
between the single-wafer box and the SWIF is not
specified. Also not specified is the method by which
the SWIF raises the carrier sensing pads when the
single-wafer box is removed (see Section 6.3). This
standard does not forbid the SWIF from holding more
than just the single-wafer box mentioned in this
standard.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E1.9 Mechanical Specification for Cassettes
Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47.1 — Provisional Mechanical Specification
for Boxes and Pods Used to Transport and Store 300
mm Wafers
SEMI E62 — Provisional Specification for 300 mm
Front-Opening Interface Mechanical Standard (FIMS)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Ordering Information
4.1 Info Pad Configuration — The purchaser of a
single wafer interface system needs to specify the
desired info pad configuration (up or down).
5 Terminology
5.1 Abbreviations & Acronyms
5.1.1 FOUP — front-opening unified pod
5.1.2 PGV — person guided vehicle (cart)
5.1.3 SWIF — single-wafer interface
5.2 Definitions
5.2.1 box — a protective portable container for a
cassette and/or substrate(s).
5.2.2 carrier capacity — the number of substrates that
a carrier holds (as defined in SEMI E1.9).
5.2.3 cassette — an open structure that holds one or
more substrates.
5.2.4 front-opening unified pod — a box (that complies
with SEMI E47.1) with a non-removable cassette (so
that its interior complies with SEMI E1.9) and with a
front-opening interface (that mates with a FIMS port
that complies with SEMI E62) (as defined in SEMI
E47.1).
5.2.5 pod — a box having a Standard Mechanical
Interface (SMIF) per SEMI E19.
5.2.6 single-wafer interface — an adapter mechanism
that holds a single-wafer box and that appears to the
equipment to be a 300 mm FOUP (except that only the
volume around the middle wafer may be accessible).
5.2.7 wafer carrier — any cassette, box, pod, or boat
that contains wafers (as defined in SEMI E15).
SEMI E103-0704 © SEMI 2000, 2004 2
6 Requirements
6.1 System Components — A system that conforms to
this standard must include a box that holds one wafer
and that fits onto a SWIF.
6.2 Relevant FOUP Dimensions — The SWIF must
have all of the required bottom and front features and
be no larger than the maximum dimensions of a 13- or
25-wafer FOUP. However, this system (of single-wafer
box and SWIF) must have box placement sensing pads
as specified in SEMI E47.1 FOUP standards
Requirements Section 6.12. For example, the SWIF
must comply with dimensions r67, x53, y50, y51, y52,
y53, z41, z47 – z48, z47 + z49, and the upper limits on
x50 and y40 (as specified in SEMI E47.1) and with
dimension y33 (as specified in SEMI E62).
6.3 Optional Automation Features — Since the single-
wafer box and/or SWIF will usually be delivered
manually (possibly with a PGV), the SWIF is not
required to have the other automation features of the
FOUP such as the robotic handling flange on top or the
fork-lift flanges on the side (although this standard does
not forbid the SWIF from having such features).
6.4 SWIF Door — The SWIF must have a full FOUP-
size door (which surrounds the door of the single-wafer
box) that mates with a FIMS-compatible interface (as
specified in SEMI E62) to avoid contaminating the
environment on the equipment side of the FIMS
interface.
6.5 Wafer Position — When the FIMS door is opened
by the equipment, the end effector may only be able to
access the middle wafer slot (wafer 7 for a SWIF that
emulates a 13-wafer carrier, and wafer 13 for a SWIF
that emulates a 25-wafer carrier), because a surface
immediately behind the door may block access to the
other wafer slots. Thus, batch wafer handlers will
probably not work with this system.
6.6 Wafer Clearances — The clearance below the
middle wafer must be the same as the clearance below
the bottom wafer in an ordinary FOUP (z8 minus z6,
both from SEMI E1.9), and the clearance above the
middle wafer must be the same as the clearance above
the top wafer in an ordinary FOUP (z15 from SEMI
E1.9). These vertical clearances are defined in SEMI
E1.9 and SEMI E47.1 and apply throughout the wafer
set-down and extraction volumes for the middle wafer.
The horizontal clearances shown in Figure 10 of SEMI
E47.1 are also required. One possible example of such
a system (of single-wafer box and SWIF) is shown in
Figures 1 and 2 (with vertical clearances indicated).
wafer
33 mm [z8 from SEMI E1.9]
–21 mm [z6 from SEMI E1.9]
= 12.0 mm minimum
11 mm [z44 from SEMI E47.1]
+ 33 mm [z8 from SEMI E1.9]
+ 10 mm [z12 from SEMI E1.9] × (6 or 12 wafers)
± 0.5 mm [z10 from SEMI E1.9]
= 164.0±0.5 mm (for wafer #13 in a 25-wafer FOUP)
or 104.0±0.5 mm (for wafer #7 in a 13-wafer FOUP)
13.0 mm minimum
[z15 from SEMI E1.9]
single-wafer box
single wafer interface (SWIF)
equipment load port
FIMS port
11 mm [
z
44 from
SEMI
E47.1
]
+ 33 mm [
z
8 from
SEMI E1.9
]
+ 10 mm [
z
12 from
SEMI E1.9
] × (6 or 12 wafers)
± 0.5 mm [
z
10 from
SEMI E1.9
]
= 164.0 ± 0.5 mm (for wafer
#
13 in a 25-wafer FOUP)
or 104.0 ± 0.5 mm (for wafer
#
7 in a 13-wafer FOUP)
Figure 1
Side View of Example Single-Wafer Box and SWIF on a Load Port with a FIMS Interface