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SEMI T6-0697 © SEMI 1997, 2004 26 X MEA03 739 Measurement Value X R 1/20 The value of the measurement. X MEA04 C001 Composite Un it of Measure X To identify a composite unit of measure (see figures in append ix for examp…

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SEMI T6-0697 © SEMI 1997, 2004 25
Segment: MEA Measurements
Level: Detail
Loop: MEA
Usage: Optional
Max Use: 1
Purpose: To specify physical measurements or counts, including dimensions, tolerances, variances, and
weights. (See figures in appendix for example of use of C001.)
Syntax Notes: 1 At lease one of MEA03, MEA05, MEA06, or MEA08 is required.
2 If MEA05 is present, then MEA04 is required.
3 If MEA06 is present, then MEA04 is required.
4 If MEA07 is present, then at least one of MEA03, MEA05, or MEA06 is required.
5 Only one of MEA08 or MEA03 may be present.
Semantic Notes: 1 MEA04 defines the unit of measure for MEA03, MEA05, and MEA06.
Comments: 1 When citing dimensional tolerances, any measurement requiring a sign (+ or -), or any
measurement where a positive (+) value cannot be assumed, use MEA05 as the negative (-)
value and MEA06 as the positive (+) value.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
O MEA01 737 Measurement Reference ID Code O ID 2/2
Code identifying the broad category to which a measurement applies.
Examples of possible values for wafers, if used, are indicated.
AV Average Reading
CT Counts
DE Defects
EL Electrical Characteristics
FD Finished Dimensions
Dimensions of the final or end-use product
H
R
Historical Result
I
R
Interpolated Result
A test result value calculated by interpolation between two physical
tests.
LS Lot Status
LT Lot Limits
Limits set on test results from all product contained in a single ship-
ment (which may involve any multiple or fraction of transportation
carrier units) to one customer.
PD Physical Dimensions (Product Ordered)
SF Shelf Life
T
R
Test Results
Indicates that the data to follow are the results test measurements.
O MEA02 738 Measurement Qualifier O ID 1/3
Code identifying a specific product or process characteristic to which a measurement
applies.
Use not recommended for wafers. Included as optional for use with other
commodities/materials.
Refer to 003050 Data Element Dictionary for acceptable code values.
SEMI T6-0697 © SEMI 1997, 2004 26
X MEA03 739 Measurement Value X R 1/20
The value of the measurement.
X MEA04 C001 Composite Unit of Measure X
To identify a composite unit of measure (see figures in appendix for examples of use).
M C00101 355 Unit or Basis for Measurement Code M ID 2/2
Code specifying the units in which a value is being expressed, or manner in which a
measurement has been taken.
ZZ Mutually Defined
Standardized default unit of measure for each parameter to be
published by SEMI as part of the procedure. Optionally, standard
code set may be used.
O C00102 1018 Exponent O R 1/15
Power to which a unit is raised.
O C00103 649 Multiplier O R 1/10
Value to be used as a multiplier to obtain a new value.
X MEA05 740 Range Minimum X R 1/20
The value specifying the minimum of the measurement range.
X MEA06 741 Range Maximum X R 1/20
The value specifying the maximum of the measurement range.
O MEA07 935 Measurement Significance Code O ID 2/2
Code used to benchmark, qualify, or further define a measurement value.
03 Approximately
04 Equal to
05 Greater than or equal to
06 Greater than
07 Less than
08 Less than or equal to
10 Not equal to
22 Actual
31 Calculated
39 Corrected
40 Uncorrected
43 Intermediate
44 Average [based on an average parameter or standard]
X MEA08 936 Measurement Attribute Code X ID 2/2
Code used to express an attribute response when a numeric measurement value cannot
be determined.
Other codes available.
05 Undetectable
09 Pass
12 OK
21 Checked
23 Absent
29 To Be Determined
44 Not Applicable
45 Not Determined
51 Conforming
SEMI T6-0697 © SEMI 1997, 2004 27
Segment: REF Reference Numbers
Level: Detail
Loop: MEA
Usage: Optional
Max Use: 10
Purpose: To specify identifying numbers.
Syntax Notes: 1 At lease one of REF02 or REF03 is required.
Comments: May be used when describing serialized or positional-dependent data.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M REF01 128 Reference Number Qualifier M ID 2/2
Code qualifying the Reference Number.
55 Sequence Number
6K Zone
Wafer site or other measurement location identification.
BG Beginning Serial Number
EG Ending Serial Number
QQ Unit Number
Used to identify the parameter sample size.
SE Serial Number
Serialization reference number applicable to the measurement.
SJ Set Number
Reference to the laser mark on a wafer (verbatim).
X REF02 127 Reference Number X AN 1/30
Reference number or identification number as defined for a particular Transaction Set,
or as specified by the Reference Number Qualifier.
X REF03 352 Description X AN 1/80
A free-form description to clarify the related data elements and their content.