semi合集-English.pdf - 第7725页
SEMI T12-0305 © SEMI 2004, 2005 4 8 Overvie w 8.1 Attach ments in Semiconduct or Manufacturing — A semiconductor pr oduction line consists of m any amount pieces of equipment with many types. Some types of equi pment req…
SEMI T12-0305 © SEMI 2004, 2005 3
6.4.1 Service Definition
6.4.1.1 A service definition table defines the specific set of messages for a given service resource, as shown in the
following table:
Message Service Name Type Description
6.4.1.2 Type can be either “N” = Notification or “R” = Request & Response.
6.4.1.3 Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does
not expect to get a response from the service user. Request messages are initiated by a service user (e.g., the host).
Request messages ask for data or an activity from the provider. Request messages expect a specific response
message (no presumption on the message content).
6.4.2 Service Parameter Dictionary
6.4.2.1 A service parameter dictionary table defines the description, format and its possible value for parameters
used by services, as shown in the following table:
Parameter Name Description Format: Possible Value
6.4.2.2 A row is provided in the table for each parameter of a service.
6.4.3 Service Message Definition
6.4.3.1 A service message definition table defines the parameters used in a service, as shown in the following table:
Parameter Req/Ind Res/Cnf Comment
6.4.3.2 The columns labeled REQ/IND and RSP/CNF link the parameters to the direction of the message. The
message sent by the initiator is called the “Request”. The receiver terms this message the “Indication” or the
request. The receiver may then send a “Response” which the original sender terms the “Confirmation”.
6.4.3.3 The following codes appear in the REQ/IND and RSP/CNF columns and are used in the definition of the
parameters (eg., how each parameter is used in each direction):
M Mandatory Parameter — Must be given a valid value.
C Conditional Parameter — May be defined in some circumstances and undefined in others. Whether a value is
given may be completely optional or may depend on the value of the other parameter.
U User-Defined Parameter.
- The parameter is not used.
= (For response only.) Indicates that the value of this parameter in the response must match that in the primary (if
defined).
7 General Requirements
7.1 Identification Means — Equipment has to have any means to identify physical Jigs and/or Implements.
7.2 Communication Means — Each equipment and managing system has to have any electric communication
means to transact.
SEMI T12-0305 © SEMI 2004, 2005 4
8 Overview
8.1 Attachments in Semiconductor Manufacturing — A semiconductor production line consists of many amount
pieces of equipment with many types. Some types of equipment require such attachments as jigs and/or implements
to manufacture semiconductor devices. Because some of them act very important roles, quality, yield or
productivity of process may depend on them and their management.
8.2 Management of Attachments — Management is required on specific attachments to have better product quality,
yield and productivity. This document specifies definitions, concepts, behavior and services to manage attachments
on equipments and also in factory. However not all the attachments require such management and specification of
this document should be applied to restricted ones especially to the ones used for important processes, sensitive and
incompatible combinations between Attachments and equipment.
8.3 Effective Concepts for a Variety of Attachments — There are many kinds of equipment types and also a variety
of attachments. To be effective to almost all of them, specification of this document is generic and idealized without
any physical limitations or practical details. It is also important to be independent to rapidly changing technologies
and production environment.
8.4 Logical and Informational Specification — To keep track of conceptual document and keep shared area as wide
as possible, this document specifies just logical and informational issues, except related information part. Physical
specifications are assumed to be defined as separated documents; they may be specified in other standards, propriety
specifications or mixed together.
8.5 Tracking Oriented Management — Because there may be very specific managements or operation for strategy
in factories and they may not be shared by many fabs, strategic management for specific factory or products may not
be better to be standardized. Most parts of the management specified in this document are related to traceability. In
other words “tracking of Jigs and Implements” is the standardized area of “management of Attachments” in this
document.
8.5.1 Tracking Jigs and Implements — In a semiconductor factory, it is necessary for any management of Jigs
and/or Implements to be tracked.
8.5.1.1 There are two types of information to track Jigs and/or Implements. One of them is transferring
information: e.g., where it is and who use it. It is required to discriminate between logical information and physical
attachment. The other is historical information of the attachment: e.g., how much it was used, what condition the
processes were and when it was repaired.
8.5.1.2 Such an attachment as Jig or Implement is transferred from stock yard to equipment or the other way and
may be between two pieces of equipment. At the time it is picked up at source location for destination, the fact
should be reported to Tracking System. When it arrives at the destination, this fact is required to be reported to the
system. Verification has to be done at the destination before it is dealt: e.g., process, maintain or stored. If a
problem happens during transportation, an exception is raised.
8.5.1.3 When it is used on equipment, e.g., for process or maintenance, its history information is accumulated and
the information is reported to the system at every milestone. Examples of the history information are time duration,
cycle time, such process parameters as temperature and pressure, material characteristics and known damage
occurred during the process.
8.5.1.4 The tracking system summarizes reported information. Clients of the system may inquire the information.
One of the clients may be scheduler/ dispatcher and it may change process machine for specific material to get better
product quality.
8.5.1.5 A client may ask target equipment to handle specific event which shows reaching limited cycle time for a jig
on the equipment. Expected handling for the event, for example, is to stop processing. The client may ask to pause
before starting a lot if current cycle time of the jig is very close to expiration cycle time.
8.5.2 Application of Tracking System — Because this document specify basic capability tracking Jigs and
Implements, specific applications for semiconductor device manufactures or equipment suppliers and such advanced
applications as securitized tracking are out of scope of this document. Using this basic specification and additional
capability supplied by equipment users, equipment suppliers or system suppliers, expected advanced capabilities can
be realized.
SEMI T12-0305 © SEMI 2004, 2005 5
Inventory
HistoryDB
Attachment
HistoryRecord
Jig
Implement
PublicLocation
JitMachine
Secondment
Expiry
HistoryBuffer
1..*
0..*
Seconded
Jig
Seconded
Implement
manages
refers
has
occu
p
ies
verifies/creates
u
p
dates
invoices
1..*
cooperates
re
p
resents
represents logical partition in
Invoice
0..*
updates
Exception
creates /
sets u
p
buffers history
creates
/
u
p
dates
notifies
Figure 1
Modeling Jigs-Implements Tracking
9 Concepts
9.1 Domain Analysis and Object Based Modeling — To model and design complicated system or to have shared
specification of a part of system which is used widely in deferent applications, some sophisticated methodologies are
required. Analyzing problem domain by object oriented paradigm is one of the best practices to be taken. Because
this technology is frequently used in many SEMI standards, there is no confusion if this document follows the way.
9.1.1 UML Representation — Above diagram is modeling of Tracking Capability for Jigs and/or Implements in
UML diagram. It is not required to make system with object oriented programming language for compliant to this
specification. Even if UML is typical object oriented representation, object oriented implementation may be
expected but may not be mandatory.
9.1.2 Total Modeling — To make sure what the tracking system is, the model depicted above describes not just
tracking information acquisition but also includes fundamental management of the whole tracking system.
9.1.2.1 Acquisition of Minimum Tracking Information — Such capabilities as awareness of Attachments,
accumulation of use history until release timing and its report are required to acquire use-history of Jigs and/or
Implements on equipment. Cross-hatched classes (HistoryBuffer and Secondment) in light red and their
collaboration correspond to the acquisition capabilities. These capabilities are usually implemented on equipment.
9.1.2.2 Action on Expiration — One of the biggest purposes of tracking such Attachments as Jigs and/or
Implements is to prevent misprocessing with invalid attachments. An Attachment may be invalid when its use gets
beyond expected duration or cycles. This is such a capability as an expected action when an Attachment has been
expired by facing invalid situation. Light-red grided class (Expiry) and its collaboration correspond to the special
Action capabilities. This capability is usually implemented on equipment.
9.1.2.3 Identification and Verification of Attachments — Such information system as equipment controllers may not
understand what the attachment is even if attachment ID is known. Capability to understand that and verify between
information and physical attachment helps not only above fundamental capability but also ensured tracking. Pink-
hatched classes (JitMachine and Invoice) and their collaboration correspond to this capability. This capability is
also implemented on equipment usually.
9.1.2.4 Tracking Information Management — Such information system as Inventory is necessary to manage and
apply acquired Attachment tracking information effectively. Blue Thick-shadowed classes (Attachment,
HistoryRecord, Inventory and PublicLocation) and their collaboration correspond to this capability. This capability
is usually installed on master equipment, cell controller or host computer. Or it may be distributed on these
platforms.