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SEMI T12-0305 © SEMI 2004, 2005 27 Parameter Definition Form History Difference of his toric record of Attachment from last re leased information, including events and di ffer ence of fluctuating values . Fluctuation of …

SEMI T12-0305 © SEMI 2004, 2005 26
Table 41
Parameter Req/Ind Rsp/Conf Description
History M - Historic information of an Attachment added on buffer.
ServiceStatus - M Result of service request.
10.2.4.5 showReleaseCondition — This service is used to inquire condition when HistoryBuffer release buffered
historic information. The buffer is cleared after releasing contents. Following table defines its parameters.
Table 42
Parameter Req/Ind Rsp/Conf Description
Condition - M Present release conditions.
ServiceStatus - M Result of service request.
10.2.4.6 setReleaseCondition — This service is used to set up condition when HistoryBuffer release buffered
historic information. The buffer is cleared after releasing contents. Following table defines its parameters.
Table 43
Parameter Req/Ind Rsp/Conf Description
Condition M - Requested release conditions.
ServiceStatus - M Result of service request.
10.2.4.7 showState — This service is used to inquire buffering state. Following table defines its parameters.
Table 44
Parameter Req/Ind Rsp/Conf Description
State - M State of HistoryBuffer.
ServiceStatus - M Result of service request.
10.2.4.8 destruct — This service is used to remove HistoryBuffer object. Following table defines its parameters.
Table 45
Parameter Req/Ind Rsp/Conf Description
State - M Immediate state just before removed.
ServiceStatus - M Result of service request.
10.2.4.9 Parameter List — Above services use following parameters.
Table 46
Parameter Definition Form
AttachmentId Identification of Attachment: usually equivalent to physical ID
maybe tagged on physical attachment.
Text.
Condition Such release conditions as the end of lot / cassette or 100 cycles.
Or-ed or and-ed condition may be okay if this pursing capability is
designed.
Text.

SEMI T12-0305 © SEMI 2004, 2005 27
Parameter Definition Form
History Difference of historic record of Attachment from last released
information, including events and difference of fluctuating values.
Fluctuation of such specific values as durations and cycles are
embedded by special events so that they are known as such value
fluctuation. Every event must have ID, code, description and
timestamp.
Text.
ServiceStatus Result of service to show successful or reason of failure. Text.
State State of HistoryBuffer object. Text.
10.2.5 HistoryDB — Following tables define services of HistoryDB class.
10.2.5.1 Service List — HistoryDB class has following services.
Table 47
Operation Description Type Reqd
Update Updates history information. R Y
Reset Resets a part of history information. R Y
Adopt Adopts new history information as a HistoryRecord. R Y
Disown Removes a HistoryRecord from history data base. R Y
listRecords Lists up HistoryRecords in history data base. R Y
showHistory Inquires history information of a record. R Y
10.2.5.2 update — This service is used to touch up history information. Following table defines its parameters.
Table 48
Parameter Req/Ind Rsp/Conf Description
AttachmentId M - Identification of an Attachment.
History M - Historic information in history format.
ServiceStatus - M Result of service request.
10.2.5.3 reset — This service is used to reset fluctuateable historic value in history. Following table defines its
parameters.
Table 49
Parameter Req/Ind Rsp/Conf Description
AttachmentId M - Identification of an Attachment.
DataName M - Name of historic data value.
ServiceStatus - M Result of service request.
10.2.5.4 adopt — This service is used to adopt new history information as a HistoryRecord. This service is
typically used to add an attachment to inventory. Following table defines its parameters.
Table 50
Parameter Req/Ind Rsp/Conf Description
AttachmentId M - Identification of an Attachment.
History M - Historic information in history format.
ServiceStatus - M Result of service request.

SEMI T12-0305 © SEMI 2004, 2005 28
10.2.5.5 disown — This service is used to remove a HistoryRecord from history data base. Following table defines
its parameters.
Table 51
Parameter Req/Ind Rsp/Conf Description
AttachmentId M - Identification of an Attachment.
ServiceStatus - M Result of service request.
10.2.5.6 showHistory — This service is used to inquire history of an Attachment. Following table defines its
parameters.
Table 52
Parameter Req/Ind Rsp/Conf Description
AttachmentId M - Identification of an Attachment.
Items C - Expected Items.
Restriction C - Restriction for items.
History - M Requested attachment’s history.
ServiceStatus - M Result of service request.
10.2.5.7 listRecords — This service is used to list records in history data base. Following table defines its
parameters.
Table 53
Parameter Req/Ind Rsp/Conf Description
AttachmentId - M Identification of an Attachment (maybe list).
ServiceStatus - M Result of service request.
10.2.5.8 Parameter List — Above services use following parameters.
Table 54
Parameter Definition Form
AttachmentId Identification of Attachment: usually equivalent to physical ID
maybe tagged on physical attachment.
Text.
DataName Name of data value. Text.
History History of an Attachment. It’s not necessary to have entire history
depending on the other service parameters: it may be summary,
limited or simple record.
Text.
Item Category of a historic record: event, exception, fluctuating values,
critical/affective process condition, cycles and etc.
Text.
Restriction Screening parameter for history items: e.g., all, latest, summary,
time=0715/300903-1655/311203, time=-100.
Text.
ServiceStatus Result of service to show successful or reason of failure. Text.
10.2.6 HistoryRecord — Following tables define services of HistoryRecord class.
10.2.6.1 Service List — HistoryRecord class has following services.