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SEMI E112-0305 © SEMI 2001, 2005 1 SEMI E112-0305 PROVISIONAL MECHANICAL SPECIFICATI ON FOR A 150 mm MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT AND STORE MULTIPLE 6 INCH RETICLES This specificatio n was techni…

SEMI E111-0305 © SEMI 2001, 2005 15

RELATED INFORMATION 1

NOTICE: This related information is not an official part of SEMI E111, and it is not intended to modify or

supercede the official standard. This information was inserted by the North America Physical Interfaces and

Carriers Committee to alert the readers to potential changes to this provisional standard.

R1-1 In the event end-effector and pellicle exclusion volumes can be developed which would satisfy all lithography

equipment manufacturers and allow for a 126 mm pellicle, then the appropriate changes would be balloted to update

the standard.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publications of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

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consent of SEMI.

SEMI E112-0305 © SEMI 2001, 2005 1

SEMI E112-0305

PROVISIONAL MECHANICAL SPECIFICATION FOR A 150 mm

MULTIPLE RETICLE SMIF POD (MRSP150) USED TO TRANSPORT

AND STORE MULTIPLE 6 INCH RETICLES

This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is

the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Regional Standards Committee on Decmber 10, 2004. Initially available at

www.semi.org January 2005; to be published March 2005. Originally published November 2001; previously

published November 2004.

1 Purpose

1.1 This standard specifies the 150 mm Multiple Reticle SMIF Pod (MRSP150) used to transport and store six 6

inch reticles in an integrated circuit (IC) manufacturing facility.

2 Scope

2.1 This standard is intended to set an appropriate level of specification that places minimal limits on innovation

while ensuring modularity and inter- changeability at all mechanical interfaces. Most of the requirements given in

this specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the

physical interfaces for the MRSP150 are specified; no materials requirements or micro-contamination limits are

given in this specification.

2.2 The pellicle exclusion volumes of this specification accommodates pellicles which extend the full length of the

reticle and up to a maximum pellicle width of 124 mm.

2.3 The MRSP150 has the following components, sub-components, and other features. A “” symbol indicates

components or features which are required and a “” symbol indicates components or features which are optional.

 Top

 robotic handling flange

 Interior

 supports for six 6 inch reticles

 reticle capture

 reticle contact surfaces

 end-effector exclusion volumes

 2 safety rail exclusion volumes

 pellicle exclusion volumes

 lateral constraints

 reticle backstop

 Sides

 2 side handling flanges on the sides parallel to the bi-lateral reference plane

 2 side handling exclusion volumes

 RFID placement zone

 Bottom

 door compatible with SMIF as defined in SEMI E19.3

SEMI E112-0305 © SEMI 2001, 2005 2

 pod latch-pin holes

 2 conveyor rails on the sides parallel to the bi-lateral reference plane

2.4 This standard is provisional because of the issues detailed in the related information section. Once investigation

of issues in the related information section has been completed, this standard should be upgraded from provisional

status.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E19.3 — Port Standard for Mechanical Interface if Wafer Cassette Transfer, 150 mm (6 inch) Port

SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)

SEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm

Wafers

SEMI P5 — Specification for Pellicles

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 150 mm Multiple Reticle SMIF Pod (MRSP150) — a minienvironment compatible carrier capable of holding

six 6 inch reticles in a horizontal orientation during transport and storage and is compatible with a Standard

Mechanical Interface (SMIF) per SEMI E19.3.

4.1.2 bilateral reference plane — a vertical plane which bisects the MRSP150 and is perpendicular to both the

horizontal and facial reference planes and passes through the center of the 150 mm SMIF as defined in SEMI E19.3.

4.1.3 facial reference plane — a vertical plane which bisects the MRSP150 and is parallel to the front side of the

pod (where reticles are removed or inserted) and passes through the center of the 150 mm SMIF as defined in SEMI

E19.3.

4.1.4 horizontal reference plane — a horizontal plane coplanar with the top surface of the port door as defined in

SEMI E19.3.

4.1.5 minienvironment — a localized environment created by an enclosure to isolate the product from contamination

and people.

4.1.6 nominal reticle center line — the line that is defined by the intersection of two perpendicular vertical planes

each of which bisect the reticle at the mid-point of a side.

4.1.7 pellicle — as defined in SEMI P5.

4.1.8 reticle — as defined in SEMI E30.1.

4.1.9 robotic handling flanges — horizontal projections on the top of the box for lifting and rotating the box (as

defined in SEMI E47.1).

4.1.10 side handling flanges — horizontal projections on the sides of the pod (sides parallel to the bilateral

reference plane) for lifting, transportation or positioning of the pod.

5 Ordering Information

5.1 Intended Use

— This standard is intended to specify reticle carriers over a reasonable lifetime of use, not just

those in new condition. For this reason, the purchaser should specify a time period and the number and type of uses