semi合集-English.pdf - 第843页

50.0 60.0 70.0 80.0 90.0 100.0 024 68 1 0 Tune = 3.0 volts Tune = 5.0 volts Tune = 7.0 volts Power Efficiency (%) Load Position (volts) NOTE 1: The Tune Position is at the indicate d fi xed value for each set of d ata. F…

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0.0
2.0
4.0
6.0
8.0
10.0
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Real Load Impedance (ohms)
Load Position (volts)
Tune Position Fixed at 5.0 Volts
NOTE: For this example, the full-scale voltage for both the Tune and Load Positions is 10 V (i.e., Tune = 5.0 V corresponds to
50% of full scale).
Figure 1
Example Plot of the Real Part of the Load Impedance as a Function of the Load Position Tuning Element in
the Matching Network
-35.0
-30.0
-25.0
-20.0
-15.0
-10.0
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Tune = 3.0 volts
Tune = 5.0 volts
Tune = 7.0 volts
Reactive Load Impedance (ohms)
Load Position (volts)
NOTE: The Tune Position is at the indicated fixed value for each set of data. For this example, the full-scale voltage for both the
Tune and Load Positions is 10 V (i.e., Tune = 3.0 V corresponds to 30% of full scale).
Figure 2
Example Plot of the Reactive Part of the Load Impedance as a Function of the Load Position Tuning Element
in the Matching Network
SEMI E113-1104 © SEMI 2001, 2004 8
50.0
60.0
70.0
80.0
90.0
100.0
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Tune = 3.0 volts
Tune = 5.0 volts
Tune = 7.0 volts
Power Efficiency (%)
Load Position (volts)
NOTE 1: The Tune Position is at the indicated fixed value for each set of data. For this example, the full-scale voltage for both
the Tune and Load Positions is 10 V (i.e., Tune = 3.0 V corresponds to 30% of full scale).
Figure 3
Example Plot of the Power Efficiency as a Function of the Load Position Tuning Element in the Matching
Network
Table 1 Example Data Table Showing the Matching Network Load Impedance and Power Efficiency as a
Function of the Positions of the Tuning Elements
Load
Position, volts
Tune
Position, volts
Real Load, ohms Reactive Load, ohms Power Efficiency, %
0 3 0.74 –31.75 61.51
1 3 0.91 –31.23 66.36
2 3 1.12 –30.64 70.86
3 3 1.38 –29.96 75.04
4 3 1.72 –29.18 78.88
5 3 2.15 –28.26 82.38
6 3 2.72 –27.17 85.56
7 3 3.50 –25.87 88.39
8 3 4.59 –24.31 90.90
9 3 6.18 –22.42 93.07
10 3 8.57 –20.15 94.91
NOTE 1: For this example, the full-scale voltage for both the Tune and Load Positions is 10 V (i.e., Tune = 3.0 V corresponds to 30% of full
scale). This example only shows data for a fixed Tune position of 3.0 volts. Data is also required at a Tune position of 0.0 V, 1.0 V, etc.
SEMI E113-1104 © SEMI 2001, 2004 9
900
920
940
960
980
1000
1020
1040
-200 -150 -100 -50 0 50 100 150 200
Supplier A
Supplier B
Forward Power (W)
Reflection Coefficient Phase Angle (degrees)
VSWR = 2
NOTE 1: The requested power was 1000 W. This plot shows a comparison of two different generators. The “Supplier A” data
(circles with solid curve) is within the required 1.5% variation from requested power (within the error bars), while the
“Supplier B” data (squares with dashed line) is not within the required 1.5% variation from requested power.
Figure 4
Example Data for the Forward Power as a Function of the Reflection Coefficient Phase Angle for a Nearly
Constant Value of VSWR/Reflection Coefficient magnitude (VSWR = 2)
Table 2 Example Data Table (Partial) Showing the Frequency Response of a Chuck Assembly
Test Frequency, MHz Refection Coefficient Magnitude Refection Coefficient. Phase, degrees
1.0 0.99973 –9.702
1.3365 0.99969 –12.95
1.673 0.99959 –16.18
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41.097 0.9974 –180
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135.2635 0.99488 25.94
135.6 0.99490 25.36
NOTE 1: The first column is the test frequency, the second column is the magnitude of the reflection coefficient, and the third column is the
phase angle of the reflection coefficient.
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