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SEMI E116-0705 © SEMI 2002, 2005 16 reasonable i nherent k nowledge of p urpose regarding these activities, the tasks should be always declared as support tas ks. If the equi pment or m odule implement ing EPT does have …

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Attribute Name Definition Access Reqd Form

TransitionTimestamp The timestamp when the most

recent transition occurred and

collection event was triggered that

set the tracker to its current state.

RO Y Formatted numeric text: timestamp

format – list specifics

16 characters

YYYYDDMMHHMMSSCC

Transition The most recent transition that

updated the tracker.

RO Y Enumerated:

1 = Transition 1

2 = Transition 2

…

9 = Transition 9

TrackerEventID Numeric identifier for the event

that is triggered for a change in the

state model for this tracker.

RO Y Integer

10.2 The object attributes TaskType and PreviousTaskType may take on one of the following values:

0. No Task — Value for TaskType when the EPT module is IDLE, and value for the PreviousTaskType when the

EPT module transitions out of the IDLE state or initial state (no state).

1. Unspecified — A placeholder for unspecified task types.

2. Process — Tasks expected under normal or desired manufacturing operations that are capable of adding value

by either (1) a physical-chemical change or (2) providing critical process information (e.g., inspection,

metrology). This includes tasks that are dependent on a recipe ID, dependent on parameters (e.g., target etch

thickness), or recipe and parameter independent (e.g., fixed purge time for all recipes or regardless target etch

thickness).

3. Support — Tasks expected under normal or desired manufacturing operations that are incapable of adding value

according to the criteria for a process task. These include alignment, handling and other transport, and

environmental changes by supporting EPT modules (e.g., pumpdown and vent operations in a load lock).

4. Maintenance — Any task that is intended to change the state of the equipment for the purpose of maintaining

equipment functionality or performance. This includes clean cycles, purges not expected under normal or

desired manufacturing operations, and certain reset operations that do not put the EPT module or equipment in a

non-operational state.

5. Diagnostics — Any task that obtains information about the status of the equipment for the purpose of

determining the equipment’s health or identifying an equipment problem(s). This excludes any task that is

intended to change the status of the equipment, as in a maintenance task. This also excludes metrology and

inspection tasks that provide critical information about the process even if those tasks also provide equipment

diagnostic information as a byproduct.

6. Waiting — An equipment-initiated task that indicates the module is encountering normal waiting periods as part

of its normal wafer processing scenario. A “Waiting” task applies when the module is awaiting a task to be

completed by an external source before it can continue/complete processing (e.g., processing chamber waiting

for robot to remove wafer, load port waiting for host ID/slot map verification, module waiting for a host

command to initiate processing and commence material unloading.) Material must be present in the module

when this task occurs.

10.2.1 NOTES: The following notes resolve ambiguities that arise from limitations of the equipment or EPT

module point of view. From the equipment or EPT module point of view:

 Process maintenance activities (e.g., monitor wafers) and engineering activities (e.g., new process qualification

runs) may be indistinguishable from normal or desired manufacturing operations. These operations shall be

reported as either process or support operations.

 Equipment maintenance activities (e.g., equipment qualification runs monitor wafers) may be indistinguishable

from normal or desired manufacturing operations. These operations shall be reported as either process or

support operations.

 Activities executed for exception handling (e.g., pausing, aborting, stopping, or otherwise moving to a safe

state) may be indistinguishable from support tasks. Examples include handling/transporting wafers to safe

locations, pumping, venting, purging, etc. If the equipment or module implementing EPT does not have

SEMI E116-0705 © SEMI 2002, 2005 16

reasonable inherent knowledge of purpose regarding these activities, the tasks should be always declared as

support tasks. If the equipment or module implementing EPT does have reasonable inherent knowledge of

purpose regarding these activities, these activities shall be either (1) modeled as task faults or otherwise

blocked conditions, or (2) exempted entirely from treatment under EPT. In case 2, the affected EPT module or

modules must be in a BLOCKED state due to related conditions reported to the EPT state model(s).

10.3 Blocked Reason Text Requirements

 Fault Condition: Blocked reason text should begin with “Fault: - ‘appropriate text’”

 Pause Condition: Blocked reason text should begin with “Pause: - ‘appropriate text’”

 Abort Condition: Blocked reason text should begin with “Abort: - ‘appropriate text’”

10.4 Configurable Disabling Of Event Reporting For Selected Transitions

10.4.1 The attribute DisableEventOnTransition may be used by the host to selectively disable EPT state model

transition events for an individual EPTTracker object independently of whether the events are enabled at the

equipment or not. This attribute is a simple list of integers 1–9 representing the disabled events.

10.4.2 For example, a list {1,4} indicates that no event reports should be sent for transitions 1 and 4. This attribute

may be set by using the SEMI E39 service SetAttr for one or more objects.

11 EPT Events

11.1 This section defines the required events and variable data associated with transitions in the EPT state model.

11.2 Table 4 defines the data variables that are valid at the time of an EPT State Change event. When the

equipment or EPT module triggers an EPTStateChange event, the value of the data variable shall be updated to

reflect the data valid at the time the event occurred.

Table 4 Variable Data Definitions – Event Variables

VARIABLE NAME DESCRIPTION TYPE ACCESS COMMENT

EPTState The new (resulting) EPT

state of the module or

equipment at the end of

an EPT state transition.

Enumerated RO 0 = IDLE

1 = BUSY

2 = BLOCKED

PreviousEPTState The previous EPT state

of the module or

equipment of an end of

an EPT state transition.

Enumerated RO 0 = IDLE

1 = BUSY

2 = BLOCKED

3 = No State

EPTStateTime Time spent in previous

EPT state for the

equipment or module.

Unsigned

integer

RO Seconds

This is the time period between the

entry into the previous EPT state

and the entry into the current EPT

State.

Clock The time and date at the

end of an EPT state

transition.

Formatted

numeric text:

timestamp

format

RO When included in an event report,

Clock represents the timestamp for

the occurrence of the event.

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VARIABLE NAME DESCRIPTION TYPE ACCESS COMMENT

TaskName Name of the task that

was started by the

module or equipment at

the occurrence of an EPT

state transition.

Text, 0 to 80

characters

RO TaskName is defined by the

equipment supplier.

TaskType The type of EPT Task

currently running on this

EPT module.

Enumerated RO 0 = No Task

1 = Unspecified

2 = Process – adding value (e.g.,

exposing)

3 = Support – incapable of adding

value (e.g., Handling/Transport)

4 = Equipment Maintenance (e.g.,

equipment initiated clean cycle)

5 = Equipment Diagnostics (e.g.,

equipment-initiated health check)

6 = Waiting (e.g., chamber waiting

for a robot to remove a substrate)

PreviousTaskName Name of the task that

was completed by the

module or equipment at

the occurrence of an EPT

state transition.

Text, 0 to 80

characters

PreviousTaskType The type of the task that

was completed by the

module or equipment at

the occurrence of an EPT

state transition.

Enumerated RO 0 = No Task

1 = Unspecified

2 = Process – adding value (e.g.,

exposing)

3 = Support – incapable of adding

value (e.g., Handling/Transport)

4 = Equipment Maintenance (e.g.,

equipment initiated clean cycle)

5 = Equipment Diagnostics (e.g.,

equipment-initiated health check)

6 = Waiting (e.g., chamber waiting

for a robot to remove a substrate)

BlockedReason The number of the block

condition that initiated

the transition to the

BLOCKED state for the

module or equipment.

Enumerated RO 0 – Not Blocked

1 – Unknown

2 – Safety Threshold

3 – Error Condition

4 – Parametric Exception

5 – Aborting, Aborted

6 – Pausing, Paused

7 – Reserved

8 – Reserved

9 – Reserved

BlockedReasonText The reason why the

transition was made to

the BLOCKED state for

the module or

equipment.

Text, 0 to 80

characters

RO Description of the Blocked reason