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SEMI E118-1104 E © SEMI 2002, 2004 11 11.4.4 Get Status 11.4.4.1 Get Status is a required service used to get t he current stat us of the WID R. The upstream controll er may request current status at any time. Table 11 G…

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Parameter Form Description
Wafer ID Text User data compliances with SEMI Standard.
Head ID Number 0–31. Identifies either an individual head (non-zero) or the WIDR subsystem itself
(zero).
PM Information Enumerated:
-Normal execution
-Maintenance required
Preventive Maintenance Information.
Result Status Enumerated:
-Normal operation
-Execution Error
-Communication Error
-Hardware Error
Result information on the status of the request concerning the service request.
Execution Error: Cannot Read ID sequence. But equipment is normal.
Communication Error: syntax error of Message or Message format or Value.
Hardware Error: ID reader head fault, ID reader head is powered off.
Status Structure Information about the status of the WIDR. Consists of PM Information and
the current values of the WIDR attributes AlarmStatus, OperationalStatus, and
HeadStatus.
2D Code Read
Condition
Structure
2D Code Condition for Preventive Maintenance.
Cell Size: Number of Pixels in a Cell.
Contrast: Contrast Percentage of Dark / Light.
Damage Percent: Percentage of Damage Cell.
Number Error Bits: Number of the Damage Cell
Read Time: Time for Readout.
Matrix Style: Normal Mode or Mirror Mode.
Matrix Polarity : Dark on Light or Light on Dark.
11.4 Service Definitions
11.4.1 This section defines the parameters used for each WIDR service.
11.4.2 ChangeState
11.4.2.1 ChangeState is an optional service that requests the WIDR to change its operational substate to
MAINTENANCE or to OPERATING. Table 9 defines the parameters used for the ChangeState service.
Table 9 ChangeState Service Definition
Parameter Req/Ind Rsp/Conf Description
StateRequest M - Specifies either MAINTENANCE or OPERATING substate.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.3 Get Attributes
11.4.3.1 Get Attributes is a required service used to request the attributes of the WIDR.
Table 10 Get Attributes Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
(list of) Attribute ID M - Identifiers of one or more attributes.
(list of) Attribute Value - M Attribute Values in order as requested.
Result Status - M Result information on the status of the request.
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11.4.4 Get Status
11.4.4.1 Get Status is a required service used to get the current status of the WIDR. The upstream controller may
request current status at any time.
Table 11 Get Status Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.5 Perform Diagnostics
11.4.5.1 Perform Diagnostics is an optional service used to request the WIDR perform its internal diagnostics. The
supplier shall document the specific diagnostics performed.
Table 12 Perform Diagnostics Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
Action C Specifies diagnostic action to perform.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.6 Read WID
11.4.6.1 Read WID is used to request the WID be read by an ID Reader Head. This service is a fundamental
requirement.
Table 13 Read WID Service Message Parameter Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head.
Wafer ID - M Wafer ID.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.7 Reset
11.4.7.1 Reset is used to re-initialize the WIDR.
Table 14 Reset Service Definition
Parameter Req/Ind Rsp/Conf Description
Result Status - M Result information on the status of the request.
11.4.8 Set Attributes
11.4.8.1 Set Attributes is used to set attributes of the WIDR. This is an optional service. Attempts to set attributes
with read-only (RO) access shall be denied. Attribute values returned are those as read following the set operation.
Table 15 Set Attributes Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head or Subsystem.
Attribute ID M - AttributeIDs.
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Parameter Req/Ind Rsp/Conf Description
Attribute Values M - Attribute Values.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.9 Read WIDC is used to read the Wafer ID with the 2D Code Read Condition. This is an optional service.
Table 16 Read WIDC Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head.
Wafer ID - M Wafer ID.
Result Status - M Result information on the status of the request.
Status - M Status information.
2D Code Condition - M 2D Code Read Condition.
11.5 Service Operability
11.5.1 Some services are performed by the WIDR and others are logically performed by the individual heads. It is
expected that the WIDR will support multiple interleaved transactions to the various independent logical units.
Table 17 shows which of the various services can be performed by the WIDR when the WIDR and its heads are in
various individual states. Note that when in the initializing state after power-up or the reset service, the WIDR may
not be able to communicate.
Table 17 Valid Services per State
Service
Set Attributes
Reset
Read WID
Perform
Diagnostics
Get Status
Get Attributes
ChangeState
Read WIDC
WIDR State
INITIALIZING
IDLE X X X X X X X X
BUSY X
MAINTENANCE X X X X X X X X
Head State
NOT OPERATING X
IDLE X
BUSY X
12 Event Notifications
12.1 Event Notification is an optional capability where the WIDR is able to detect events and report state and status
changes independently of a service request from the upstream controller.