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SEMI E118-1104 E © SEMI 2002, 2004 13 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of …

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SEMI E118-1104
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Parameter Req/Ind Rsp/Conf Description
Attribute Values M - Attribute Values.
Result Status - M Result information on the status of the request.
Status - M Status information.
11.4.9 Read WIDC is used to read the Wafer ID with the 2D Code Read Condition. This is an optional service.
Table 16 Read WIDC Service Definition
Parameter Req/Ind Rsp/Conf Description
Head ID M M Specifies Head.
Wafer ID - M Wafer ID.
Result Status - M Result information on the status of the request.
Status - M Status information.
2D Code Condition - M 2D Code Read Condition.
11.5 Service Operability
11.5.1 Some services are performed by the WIDR and others are logically performed by the individual heads. It is
expected that the WIDR will support multiple interleaved transactions to the various independent logical units.
Table 17 shows which of the various services can be performed by the WIDR when the WIDR and its heads are in
various individual states. Note that when in the initializing state after power-up or the reset service, the WIDR may
not be able to communicate.
Table 17 Valid Services per State
Service
Set Attributes
Reset
Read WID
Perform
Diagnostics
Get Status
Get Attributes
ChangeState
Read WIDC
WIDR State
INITIALIZING
IDLE X X X X X X X X
BUSY X
MAINTENANCE X X X X X X X X
Head State
NOT OPERATING X
IDLE X
BUSY X
12 Event Notifications
12.1 Event Notification is an optional capability where the WIDR is able to detect events and report state and status
changes independently of a service request from the upstream controller.
SEMI E118-1104
E
© SEMI 2002, 2004 13
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
SEMI E118-1104
E
© SEMI 2002, 2004 14
RELATED INFORMATION 1
SCENARIOS
NOTE: This related information is not an official part of SEMI E118 and was derived from work of the originating
task force. This related information was approved for publication by full letter ballot procedures on July 19, 2002.
R1-1 Examples
R1-1.1 This section provides examples of typical scenarios for a WIDR with two read heads.
Table R1-1 Reset Scenario
Controller WIDR Head1 Head2
Msg. Msg. Action State Action State Action State
Reset→
Perform
Reset
OPERATING or
MAINTENANCE
OPERATING OPERATING
←Reset Reply
OPERATING or
MAINTENANCE
OPERATING OPERATING
Table R1-2 Get Status Scenario
Controller WIDR Head1 Head2
Msg. Msg. Action State Action State Action State
Get Status 0→
Determine
Status
OPERATING or
MAINTENANCE
Any Any
←Status Reply
Same Any Any
Table R1-3 Scenario for Interleaved Read WID from Both Head
Controller WIDR Head1 Head2
Msg. Msg. Action State Action State Action State
Read WID 01→
OPERATING
Start
Read
BUSY IDLE
Read WID 02→
OPERATING BUSY
Start
Read
BUSY
←Read WID
Reply 01
OPERATING IDLE BUSY
←Read WID
Reply 02
OPERATING IDLE IDLE