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SEMI E118-1104 E © SEMI 2002, 2004 17 RELATED INFORMATION 3 APPLICATION NOTES NOTE: This related information is not an official part o f SEMI E118 and was derived from work of the originating task force. This related inf…

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SEMI E118-1104
E
© SEMI 2002, 2004 16
R2-3 Full Capabilities
R2-3.1 Figure R2-2 shows the object model for a WIDR with full capabilities, so that all optional attributes and
services are supported.
1+
WIDR
- AlarmStatus
- Configuration
- DateInstalled
- DeviceType
- HardwareRevisionLevel
- MaintenanceData
- Manufacturer
- ModelNumber
- OperationalStatus
- SerialNumber
- SoftwareRevisionLevel
ChangeState
GetAttributes
GetStatus
PerformDiagnostics
Reset
SetAttributes
Head
- HeadAlarmStatus
- HeadDateInstalled
- HeadID
- HeadStatus
- HeadMaintenanceData
Upstream
Controller
requests
services from
is made up of
GetAttributes
GetStatus
ReadWID
ReadWIDC
Figure R2-2
Object Model for Full Capabilities
R2-4 Integrated Model
R2-4.1 Figure R2-3 shows the object model for a WIDR with full capabilities and a single integrated head. The
head is not shown as a separate component in this case, and the head attributes and services have become part of the
WIDR subsystem itself.
WIDR
- AlarmStatus
- Configuration
- DateInstalled
- DeviceType
- HardwareRevisionLevel
- HeadAlarmStatus
- HeadStatus
- MaintenanceData
- Manufacturer
- ModelNumber
- OperationalStatus
- SerialNumber
- SoftwareRevisionLevel
ChangeState
GetAttributes
GetStatus
PerformDiagnostics
ReadWID
Reset
SetAttributes
Upstream
Controller
requests
services from
ReadWIDC
Figure R2-3
Integrated Model with Full Capabilities
SEMI E118-1104
E
© SEMI 2002, 2004 17
RELATED INFORMATION 3
APPLICATION NOTES
NOTE: This related information is not an official part of SEMI E118 and was derived from work of the originating
task force. This related information was approved for publication by full letter balot procedures on July 19, 2002.
R3-1 Combined State Model
R3-1.1 Figure R3-1 shows the combined state model for the WIDR unit with nn heads, from HEAD01 TO
HEADnn. The WIDR is considered as IDLE when and only when it is in OPERATING and all of its heads are
IDLE.
WIDR
HEAD01
C
12
OPERATING
16
BUSY
IDLE
13
14
15
NOT OPERATING
C
12
HEADnn
11
1
INITIALIZING
3
2
NO
ALARMS
ALARMS
MAINTENANCE
4
5
9
10
ALARM STATUS
OPERATIONAL
RUNNING
IDLE
7
8
6
BUSY
OPERATING
C
OPERATING
16
BUSY
IDLE
13
14
NOT OPERATING
15
.....
Figure R3-1
Combined State Model
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consent of SEMI.
SEMI E118.1-1104 © SEMI 2003, 2004 1
SEMI E118.1-1104
SPECIFICATION FOR SECS-I AND SECS-II PROTOCOL FOR WAFER
ID READER COMMUNICATION INTERFACE STANDARDS
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the Japanese Information and Control Committee. Current edition approved by the
Japanese Regional Standards Committee on July 23, 2004. Initially available at www.semi.org September
2004; to be published November 2004. Originally published March 2003; last published March 2004.
1 Purpose
1.1 This document maps the services and data of the
Wafer ID Reader (WIDR) standard to SECS-II streams
and functions and data definitions.
2 Scope
2.1 This document applies to all implementations of
WIDR that use the SECS-II message protocol (SEMI
E5).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications
Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 SECS — SEMI Equipment Communications
Standard
4.1.2 WIDR — Wafer ID Reader
5 Physical Requirements
5.1 The WIDR using the SECS-I protocol shall use a
9-pin female connector.
6 Service Message Mapping
6.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the service messages defined in
SEMI E118
.
6.2 Request and notification messages are mapped to
primary (odd-numbered) SECS-II functions and
response messages are mapped to secondary (even-
numbered) SECS-II functions.
6.3 In some cases, a common set of parameters allows
more than one service to be mapped to the same stream
and function, with an additional SECS-II data item used
to differentiate between the two services.
Table 1 Services Mapped to SECS-II Messages
Message Name Stream,Function SECS-II Name
ChangeState S18,F13/F14 Subsystem Command Request/Acknowlege
Get Attributes S18,F1/F2 Read Attribute Request/Data
Get Status S18,F13/F14 Subsystem Command Request/Acknowledge
Perform Diagnostics S18,F13/F14 Subsystem Command Request/Acknowledge
Read WID S18,F9/F10 Read ID Request/Data
Reset S18,F13/F14 Subsystem Command Request/Acknowledge
Set Attributes S18,F3/F4 Write Attribute Request/Acknowledge
Read WIDC S18,F15/F16 Read 2D Code Condition Request/Data