Gemini Semi Appendix Manual - 第10页

Appendix to Micron Technical Manuals

APPENDIX A

Operator Information

Appendix to Micron Technical Manuals

OPERATOR APPENDIX

EMERGENCY MACHINE OFF (EMO) OPERATION

Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 1.1

CHAPTER 1 OPERATOR APPENDIX

EMERGENCY MACHINE OFF (EMO) OPERATION

With the machine powered up, activating the red Emergency Machine Off

button (EMO) immediately powers down the machine both electrically and

pneumatically.

If the EMO is operated during machine movement, electrical and pneumatic

power is immediately removed. Machine movement may continue under inertia

and may result in machine damage. To avoid machine damage, ensure the

machine is shutdown correctly by following the Shutdown procedure in the

Operator manual.

NOTE

The EMO is a safety feature intended to power down the equipment or an entire

installation in an emergency so as to protect personnel and equipment. In case

of an emergency, it may not be possible to access the main disconnect device

on the equipment leaving the EMO as the only means to power down the

equipment. This is a requirement of SEMI S2.

To activate:

Press the EMO button, electrical and pneumatic power to the

machine is removed.

To reset:

Turn the EMO button clockwise to release the latch.

Press the Start button (green) to restore electrical and pneumatic

power.