Gemini Semi Appendix Manual - 第125页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.87 Summary/Remarks Signed: Date:
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.86 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Check all actuators home correctly.
SEMI Level Screen Alignment Tick
SEMI 2
SEMI Level USC Vacuum Filtration Unit (if fitted) Tick
If pre purchased, replace the paper, HEPA and carbon filters.
SEMI 1
SEMI Level USC Vacuum Filtration Unit (if fitted) Tick
Check the DC voltage levels are within tolerance as detailed in the DEK Power Monitor
program.
SEMI 2
SEMI Level Machine Level Tick
Ensure machine is level and all feet exert pressure on the floor.
SEMI 1
Estimated time required for Monthly tasks 4.0 hours
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.87
Summary/Remarks
Signed: Date:
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.88 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Month July Maintenance Procedure
WARNING
BOARD CLAMPS. EXTREME CARE MUST BE EXERCISED WHEN WORKING IN
THE TOOLING AREA OF THE MACHINE TO AVOID INJURY. THE FOILS ON THE
FRONT AND REAR BOARD CLAMPS ARE VERY SHARP.
WARNING
HARMFUL SUBSTANCES. CLEANING WIPES AND CLEANING SOLUTIONS MAY
CONTAIN SUBSTANCES HAZARDOUS TO HEALTH. OBSERVE ALL
MANUFACTURERS’ HEALTH AND SAFETY GUIDELINES. ALWAYS WEAR
APPROVED PROTECTIVE CLOTHING WHEN CLEANING THE MACHINE.
SPC Alignment
Check and Machine
Cycle Count
Fill out details: SPC Alignment Check and Machine Cycle Count at the start of
this section.
Software
Monthly Maintenance
SEMI Level Software Check Record Tick
Check the date and time settings.
Check the software loaded and options.
Check the software version is the latest issue.
SEMI 2
SEMI Level View Event Log Tick
Check for initialisation errors.
Check for screen position errors (31210, 31211, 31212).
Check for camera errors (31207, 31208).
SEMI 2
SEMI Level Under Screen Cleaner (USC) Tick
Check the condition of the squeegee blades (Blue).
NOTE
ASM recommend squeegee blades are replaced every six months.
Check the screen cleaner height.
Check the condition of all hoses and connections.
SEMI 1