Gemini Semi Appendix Manual - 第147页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.109 SEMI Level Chase Tick Inspect the condition of wir ing/pneu matic connections. Clean and lubricate w…
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.108 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Monthly Hardware Check
SEMI Level General Maintenance Tick
Check the condition of the board clamps.
Clean the table top of paste and debris, apply a wipe of light oil.
Clean the round transport rails of paste and debris.
Inspect the air filters and clean/recommend replacement.
Cycle the board clamps ensure that clamping and release is smooth.
Cycle the Test 265test 1 board on the transport rails ensure smooth operation.
SEMI 1
SEMI 2
SEMI Level Screen Alignment Tick
Inspect the wiring and connections.
Inspect the three striker plates, clean and apply a wipe of light grease.
Check all actuators home correctly.
SEMI 1
SEMI 2
SEMI Level Screen Change Tick
Remove and clean the auto drip tray.
Fully extend the auto drip tray telescopic plungers and clean.
Clean the screen stop actuator arm lever.
Clean the screen at stop sensor.
Refit the auto drip tray and check operation of the screen change mechanism.
SEMI 1
SEMI 2
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.109
SEMI Level Chase Tick
Inspect the condition of wiring/pneumatic connections.
Clean and lubricate with light oil, the omni track bearings and the underside of the track
plates.
Clean the left and right screen at centre optos.
Clean the stencil guide strips of debris/paste.
Remove the ASM pneumatic cylinder covers.
Ensure ASM cable assembly is seated correctly around all pulleys.
Loosen cable retainer bracket securing screws. Adjust position of bracket to eliminate any
cable slack.
Ensure all screen clamps are at their home position. Tighten retainer bracket securing
screws.
Refit ASM pneumatic cylinder covers.
Check operation of the chase clamps.
Check operation of the ASM.
Estimated time required for Monthly tasks 6.0 hours
Summary/Remarks
Signed: Date:
SEMI 1
SEMI 2
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.110 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Cleaning, Lubrication and Maintenance Diagrams
Figure 3-7 Rising Table
A
Manual Tooling Plate (clean)
View on Rear of Rising Table
Transport Rail Drive Belt
Rising Table Drive Belt
Rising Table Ballscrew
Transport Rail Ballscrew
(in 2 positions)
Rising Table Motor
Linear Bearing Block
(in 4 positions)
View on Arrow A
Sensor Vane
Vertical Linear Bearing Guide Rails