Gemini Semi Appendix Manual - 第148页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE 3.110 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15 Cleaning, Lubrication and Ma intenance Diagrams Figure 3-7 Rising T able A Manual T ooling Plate (cl…
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.109
SEMI Level Chase Tick
Inspect the condition of wiring/pneumatic connections.
Clean and lubricate with light oil, the omni track bearings and the underside of the track
plates.
Clean the left and right screen at centre optos.
Clean the stencil guide strips of debris/paste.
Remove the ASM pneumatic cylinder covers.
Ensure ASM cable assembly is seated correctly around all pulleys.
Loosen cable retainer bracket securing screws. Adjust position of bracket to eliminate any
cable slack.
Ensure all screen clamps are at their home position. Tighten retainer bracket securing
screws.
Refit ASM pneumatic cylinder covers.
Check operation of the chase clamps.
Check operation of the ASM.
Estimated time required for Monthly tasks 6.0 hours
Summary/Remarks
Signed: Date:
SEMI 1
SEMI 2
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.110 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Cleaning, Lubrication and Maintenance Diagrams
Figure 3-7 Rising Table
A
Manual Tooling Plate (clean)
View on Rear of Rising Table
Transport Rail Drive Belt
Rising Table Drive Belt
Rising Table Ballscrew
Transport Rail Ballscrew
(in 2 positions)
Rising Table Motor
Linear Bearing Block
(in 4 positions)
View on Arrow A
Sensor Vane
Vertical Linear Bearing Guide Rails
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.111
Figure 3-8 Paste Dispenser
View on Rear of Print Carriage
Home Sensor
Home Vane
A
View on A
Drip Tray
Linear Bearing Guide
Linear Bearing Guide
B
View on B
Paste Dispenser
Drive Belt