Gemini Semi Appendix Manual - 第156页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE 3.118 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15 Figure 3-15 Underscreen Cleaner View from Left Side of Machine Camera Y Linear Bearing Guide Rail (i…
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.117
Figure 3-14 Rail System
Horizontal Linear Bearing
Guide (in 2 positions)
Ballscrew
(in 2 positions)
Clatter Bar
(in 2 positions)
Vertical Linear Bearing
Guide (in 4 positions)
Plan View on Rail Drive System
View on Left Side of Machine
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.118 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Figure 3-15 Underscreen Cleaner
View from Left Side of Machine
Camera Y Linear
Bearing Guide Rail
(in 2 positions)
USC Linear
Bearing Block
(in 2 positions)
USC Magnet
(in 2 positions)
USC Home Sensor
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.119
External Solvent
Tank
NOTE
Disposal of Waste Materials: All waste materials including fluids and contami-
nated materials must be disposed of in accordance with national, federal or local
legislation.
In the event of the solvent container leaking solvent, carry out the following.
NOTE
In the event of the solvent container leaking, the volume of the solvent container
housing (8.329 ltr) is sufficient to hold the contents of the 5 ltr solvent container.
1. Carefully remove the solvent container avoiding contact with the solvent.
2. Dispose of the solvent container.
3. Remove the solvent container housing and dispose of the contaminated
solvent in accordance with national, federal or local legislation.
4. Decontaminate the solvent container housing.
5. Relocate the solvent container housing within the external solvent tank
assembly.
6. Place a full solvent container into the solvent container housing.
7. Carry out the External Solvent Tank, Machine Assembly within the installa-
tion chapter refers.
Solvent Container
Solvent Container Housing
External Solvent Tank