Gemini Semi Appendix Manual - 第160页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE 3.122 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15 10. Replace the carbon\pre -filter as required and refit the p re-filter into the carbon filter unit…

TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.121
7. The back of the carbon filter unit is secured beneath a filter securing bracket.
To remove the filter, lift the front and pull the filter out of the machine.
8. Turn the filter unit upside down.
9. To separate the pre-filter unit from the carbon filter unit, pull the pre-filter
upwards using the pre-filter frame.

TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.122 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
10.Replace the carbon\pre-filter as required and refit the pre-filter into the
carbon filter unit.
11. Refit the carbon filter unit to the vacuum filtration unit.
NOTE
When refitting the carbon filter unit to the base unit, ensure that the rear of
the carbon filter unit is located beneath the filter securing bracket.
12.Secure the carbon filter unit using the filter retaining clip.
13.Refit and secure the air duct to the carbon filter unit.
14.Refit the panel removed in Step 4.
15.Move the machine carefully back into line.
16.Reconnect the loom to the lower rear panel socket.

Appendix to Micron Technical Manuals
APPENDIX D
Electrical Drawings
Information