Gemini Semi Appendix Manual - 第60页
TECHNICAL REFERENCE APPENDIX M37 POWER SUPPLY ENCLOSURE 3.22 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15 M37SK16 - M37SK21 M37SK22 M37SK23 Pin No. Signal Pin No. Signa l 1 Servo dc Supply 4 24V US (Motor …
TECHNICAL REFERENCE APPENDIX
M37 POWER SUPPLY ENCLOSURE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.21
M37SK04 - M37SK11
M37SK12 - M37SK14
M37SK15
Pin No. Signal Pin No. Signal
1+24V US 40V Return
20V Return 5+12V
3+24V SW 60V Return
Pin No. Signal Pin No. Signal
1+12V 30V
2N/C
1
4
6Way Trident
13
3 Way Trident
Pin No. Signal Pin No. Signal
1 +24V US 7 +24V US
20V Return 80V Return
3 +24V US 9 +24V US
4 0V Return 10 0V Return
5 +24V US 11 +24V US
6 0V Return 12 0V Return
1
1Way Trident2
7
4
10
TECHNICAL REFERENCE APPENDIX
M37 POWER SUPPLY ENCLOSURE
3.22 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
M37SK16 - M37SK21
M37SK22
M37SK23
Pin No. Signal Pin No. Signal
1 Servo dc Supply 4 24V US (Motor Logic)
20V Return 50V Return
3N/C
1
5
5 Way Power D Type
Socket
Pin No. Signal Pin No. Signal
1 E Stop Loop Supply to Front Cover
Interlock
3 0V from Front Cover Interlock
2 E Stop Loop Supply from Front
Cover Interlock
4 0V to Front Cover Interlock
14
4Way Trident
Pin No. Signal Pin No. Signal
1 E Stop Loop Supply to Interlock
Blanking Plug
3N/C
2 E Stop Loop Supply from Interlock
Blanking Plug
4N/C
14
4Way Trident
TECHNICAL REFERENCE APPENDIX
M37 POWER SUPPLY ENCLOSURE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.23
M37SK24
M37SK25
M37PL26
Pin No. Signal Pin No. Signal
1 External E Stop Link to Pin 5 4 N/C
2 External E Stop Link to Pin 3 5 External E Stop Link from Pin 1
3 External E Stop Link from Pin 2 6 N/C
1
4
6Way Trident
Pin No. Signal Pin No. Signal
1 E Stop Loop to Pin 5 4 N/C
2 E Stop Loop to Pin 3 5 E Stop Loop from Pin 1
3 E Stop Loop from Pin 2 6 N/C
1
4
6Way Trident
Pin No. Signal Pin No. Signal
1 N/C 6 Cover Interlock
2 Jog Left 7 E Stop Loop Supply
3 Jog Right 8 0V
4N/C 9N/C
5 Power On Monitor
1
9
9 Way D Type
Plug