Gemini Semi Appendix Manual - 第73页

TECHNICAL REFERENCE APPENDIX CALIBRATIONS Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.35 Camera System Module Board S top X Of fset Check W ARNING BOARD CLAMPS. EXTREME CARE MUST BE EXERCISED WHEN WORK …

TECHNICAL REFERENCE APPENDIX

CALIBRATIONS

3.34 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15

2. Under My Computer, locate and open the E:\Log\Ptest.dat file.

The figure below gives a representation of the Ptest.dat file.

(Fwd Press Flood)(Rear Press Flood)(Flood Ref. Height)(Front Ref. Height)(Rear Ref. Height)

33.1004 31.9668 3951.6971 3947.7037 3935.1178

(steps)

(kg)

Rear Squeegee

4301.000000

4286.000000

4271.000000

4256.000000

4241.000000

4226.000000

4211.000000

4196.000000

4181.000000

4166.000000

4151.000000

4136.000000

4121.000000

4106.000000

4091.000000

4076.000000

4061.000000

4046.000000

4031.000000

4016.000000

22.480215

21.961

163

21.503175

21.045188

20.587201

20.068149

19.640694

19.182706

18.724719

18.266732

17.747680

17.289692

17.801172

16.343185

15.885198

15.396678

14.908158

14.480703

13.992184

13.564729

Front Squeegee

(steps)

(kg)

4039.000000

4324.000000

22.388617

21.930630

21.472643

21.045188

20.587201

20.129213

19.640694

19.213239

18.694187

18.266732

17.839277

17.350757

16.892770

16.465315

16.007328

15.579873

15.121886

14.724963

14.236444

13.778456

4309.000000

4294.000000

4279.000000

4264.000000

4249.000000

4234.000000

4219.000000

4204.000000

4189.000000

4174.000000

4159.000000

4144.000000

4129.000000

14.000000

4099.000000

4084.000000

4069.000000

4054.000000

NOTE

Text shown in italics is not

displayed in the Ptest.dat file.

TECHNICAL REFERENCE APPENDIX

CALIBRATIONS

Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.35

Camera System

Module

Board Stop X Offset Check

WARNING

BOARD CLAMPS. EXTREME CARE MUST BE EXERCISED WHEN WORKING IN

THE TOOLING AREA OF THE MACHINE TO AVOID INJURY. THE FOILS ON THE

FRONT AND REAR BOARD CLAMPS ARE VERY SHARP.

1. Select Open Cover Commands.

2. Select Carriage To Rear.

3. Select Unload Screen.

4. Open the front printhead cover.

5. Remove the screen.

6. Close the front printhead cover.

7. Press the System button.

8. Select Back.

9. Select Maintenance.

10.Select Diagnostics.

11. Use Next or Previous to highlight Camera Axes.

12.Select Select Module.

13.Use Next or Previous to highlight Home Camera X Axis.

14.Select Run Diagnost.

15.Use Next or Previous to highlight Home Camera Y Axis.

16.Select Run Diagnost.

17.Use Next or Previous to highlight Drive to Board Stop Position.

18.Select Run Diagnost.

19.Select Exit.

20.Use Next or Previous to highlight Rail System.

21.Select Select Module.

22.Use Next or Previous to highlight Toggle Board Stop.

23.Select Run Diagnost.

24.Open the front printhead cover.

25.Place a board onto the rails and move it up against the board stop.

26.Close the front printhead cover.

27.Press the System button.

28.Use Next or Previous to highlight Toggle Board Clamp.

29.Select Run Diagnost.

30.Use Next or Previous

to highlight T

oggle Board Stop.

31.Select Run Diagnost.

SEMI 2

TECHNICAL REFERENCE APPENDIX

CALIBRATIONS

3.36 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15

32.Select Exit.

33.Use Next or Previous to highlight Camera Axes.

34.Select Select Module.

35.Use Next or Previous to highlight Initialise Vision System.

36.Select Run Diagnost.

37.Select Exit.

38.Open the front printhead cover.

39.Place a non-magnetic rule flat against the board edge and slide a second

rule so that it abuts it and comes within the camera field of view.

40.On the vision monitor, record the distance from the board edge to the

approximate centre of the square (figure below refers). This value is the

Board Stop X Offset and should be -43.5mm ±0.5mm.

Camera

Camera Board Stop

Metric Rule

Board

Metric Rule

Side View

Metric Rule

Plan View

43 4644