Gemini Semi Appendix Manual - 第93页
TECHNICAL REFERENCE APPENDIX PREVENTATIVE MAINTENANCE Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.55 Cleaning and Lubrication Linear Bearings and Guide Rails All linear bearing blocks, fitted to the mac…
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.54 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
ASM Part Numbers
Cleansing and
Lubrication
Lubrication Chart
Vacuum Filters
Description Part Number
IPA Impregnated Wipes 115806
IPA Impregnated Swabs 115846
THK AFB Grease 141146
Aeroshell 5 Grease 115290
Light Grease 120011
Light Oil 120008
Module Description Part Number (Lubricant)
Camera X and Y Linear Bearing Guide Rails 141146
Omni Track Bearings 120011
Paste Dispenser Linear Bearing Guide Rail 141146
Print Carriage Linear Bearing Guide Rails 141146
Rail System Linear Bearing Guide Rails 141146
Rising Table Ballscrew 141146
Screen Actuator Bearings 120011
Screen Actuator Striker Plates 120011
Squeegee Spindle Shafts 141146
Squeegee Leadscrews and Supernuts 115290
Transport Rail Ballscrews 141146
Description Part Number
VF35i Carbon Filter 173357
VF35i Standard Pre-Filter 173358
VF35i HEPA Pre-Filter (cleanroom use) 173359
VF35i Filter Kit (1 X 173357 and 1 X 173358) 173373
VF35i Filter Kit (1 X 173357 and 1 X 173359) 173374
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
Chapter Issue 1 Feb 15 Appendix to Micron Technical Manuals 3.55
Cleaning and
Lubrication
Linear Bearings and
Guide Rails
All linear bearing blocks, fitted to the machine, are greased for life and require
no greasing although a grease nipple may be fitted.
The linear bearing guide rails require no maintenance unless they become
contaminated. In the event of contamination, carry out the following procedure:
1. Clean the linear bearing guide rail using a plastic spatula.
2. Remove any build up of grease around the linear bearing block.
3. Apply a very thin coating of THK AFB grease (part No 141146) along the
whole length of the guide rail using a cloth.
4. Ensure that the three exposed faces are greased to prevent surface rust.
5. Remove any surplus grease using the cloth ensuring that there is no build
up of grease near the linear bearing block.
For locations of linear bearings, refer to the table below:
Rising Table and
Transport Rail
Ballscrews
The rising table and transport rail ballscrew bearing blocks are greased for life
and require no greasing.
The rising table and transport rail ballscrews require no maintenance unless
they become contaminated. In the event of contamination, carry out the
following procedure:
1. Clean the ballscrew using a plastic spatula.
2. Remove any build up of grease around the ballscrew bearing block.
3. Apply a very thin coating of THK AFB grease (part No 141146) along the
whole length of the ballscrew using a cloth.
4. Using the cloth, remove any surplus grease near the ballscrew bearing
blocks.
Location Linear Bearing Guide Rails Linear Bearing Blocks
Camera 3 (2 Y and 1 X) 5
Paste Dispenser 1 1
Print Carriage 2 3
Rising Table 2 4
Transport Rails 6 6
Underscreen Cleaner Uses the 2 Camera Y Rails 2
TECHNICAL REFERENCE APPENDIX
PREVENTATIVE MAINTENANCE
3.56 Appendix to Micron Technical Manuals Chapter Issue 1 Feb 15
Summary of the
Programme
The PM Plan
Daily This maintenance schedule is a recommended programme which should be
carried out on a daily basis. Tasks are generally limited to surface cleaning and
minor inspections and should take no more than fifteen minutes to complete.
Monthly This maintenance schedule is a recommended programme which should be
carried out on a month by month basis. It comprises two modules that are
designed to take approximately 2 hours each to complete.
In the first module, SPC Alignment, Machine Cycle Count, Software Checks and
a standard Monthly Maintenance Check make up the elements.
NOTE
SPC Alignment is included in the QC Calc Software package which is an
optional measurement tool.
The second element comprises the Monthly Hardware Check, each month one
or more hardware modules are scheduled for maintenance. Over a twelve
month period all machine modules are checked and serviced at least once.
Each monthly schedule, January through to December is the same no matter
where the machine resides. ASM service engineers already have maintenance
history on which modules have been serviced and those that are in need of
service. If an error occurs the precise service history is known and this could
prove useful in tracking a fault condition.
Daily Schedule
Approximately 15 Minutes
Approximately 4Hours
SPCAlignment Check
(where available)
2Hours
Software Check
Monthly Maintenance Check
Machine CycleCount
2Hours
Monthly Hardware Check
Monthly Schedule