YSM40 Mainte_E - 第157页
A-3 Appendix 1.3 Connection between machines T oexchangesignalssuchasboardrequestandoper ationstatuswiththedownstreamorupstreammac hine,the "NEXTINTERF ACE"and"PREVIOUSINTERF A CE"…

A-2
Appendix
1.2 Power connection terminals
Thepowerconnectionterminalsarelocatedinsidethelowerrightpanelonthefrontofthemachine.Connect
thepowercableleadsasshownbelowtotheL1,L2,L3andgroundterminal(PE)onthepowerterminalblock.
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Power supply specifications
Model name Power Frequency Power capacity
YSM40 3-phase AC 200/208/220/240/380/400/416V (±10%) 50/60Hz 13.9kVA
Power input terminals
(L1, L2, L3) and ground terminal
Main breaker
Power connection terminals
53A02-N5-10
Ring-tongue crimp terminal
Insulated crimp terminal
Power cable
L2
L1
L3
PE
53A03-N5-00
c
Use a power cable whose conductor cross-section area is greater than 5.5mm
2
.
w
WARNING
c
power input terminal block so that they are in the normal phase. Incorrect connection may cause the vacuum pump
to turn in the wrong direction and drastically shorten the service life of the components in the vacuum pump.

A-3
Appendix
1.3 Connection between machines
Toexchangesignalssuchasboardrequestandoperationstatuswiththedownstreamorupstreammachine,the
"NEXTINTERFACE"and"PREVIOUSINTERFACE"connectorslocatedontherearofthemachineareused.The
"NEXTINTERFACE"connectorconnectstothedownstreammachine,andthe"PREVIOUSINTERFACE"
connectorconnectstotheupstreammachinesuchasaloader.
1.3.1 PREVIOUS INTERFACE connector
Whenthefollowingthreeconditionsaremet,thePREVIOUSINTERFACEcircuitinthemachineallowsthe
nextboardtobecarriedin.(ADVANCEDGATEisselected.)
1.Machineisreadyforcarryinginaboard(BUSYOUT:ON)
2.Boardcarry-insignalisinputfromtheupstreammachine.(BAIN[N0100421]:ON)
3.Automaticoperationsignalisinputfromtheupstreammachine.(URIN[N0100422]:ON)
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NOTE
• When the automatic operation signal (UR IN) from the loader turns off during transfer of a board, the machine
temporarily stops carrying in the board.
• When the board being carried in is detected by the entrance sensor, the BUSY OUT signal turns off.
• Carrying in the board is nished when both the BUSY OUT and BA IN turn off.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
7
12
4
8
1
14
11
3
BUSY OUT
(T01000E4)
+24V
+24V
LR OUT
(T01000E7)
UR IN
(N0100422)
BA IN
(N01000421)
Signal input during
board carry-in
Signal output to
request board carry-out
Signal output during
automatic operation
Signal input during
automatic operation
LE OUT
(T01000F3)
Signal input during
waiting for board
between machines
I/O BOARD
PREVIOUS INTERFACE circuit
This machine PREVIOUS INTERFACEUpstream
PREVIOUS INTERFACE
connector
AMP 206043-1
(14-pin receptacle)
53A04-N5-00
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Board transfer signal specifications
PREVIOUSINTERFACE
Pin No. Signal name Address I/O specifications Signal specifications
1 BUSY OUT T01000E4 Relay contact (zero voltage) output
Signal output during board carry-in
2 BUSY OUT T01000E4 Relay contact (zero voltage) output
3 +24V Input common (+24V)
Signal input of board carry-out
request
4 BA IN N0100421 Voltage input
5 NC (with dummy pins) (Prevents misinsertion.)
6 to 8 NC
9 +24V Input common (+24V)
Signal input during automatic
operation
10 UR IN N0100422 Voltage input
11 LR OUT T01000E7 Relay contact (zero voltage) output
Signal output during automatic
operation
12 LR OUT T01000E7 Relay contact (zero voltage) output
13 LE OUT T01000F3 No-voltage output
Signal output during waiting for
board between machines
14 LE OUT T01000F3 No-voltage output

A-4
Appendix
1.3.2 NEXT INTERFACE connector
Whenthefollowingthreeconditionsaremet,theNEXTINTERFACEcircuitinthemachineallowstheboardto
becarriedout.
1.Machineisreadyforcarryingouttheboard(BAOUT:ON)
2.Boardcarry-insignalisinputfromthedownstreammachine.(BUSYIN[N0100420]:ON)
3.Automaticoperationsignalisinputfromthedownstreammachine.(LRIN[N0100423]:ON)
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NOTE
• When the automatic operation signal (LR IN) from the downstream machine turns off during transfer of a board,
the machine stops temporarily carrying out the PC.
• When the board being carried out is detected by the exit sensor, the BA OUT signal turns off.
• Carrying out the board is nished when both the BUSY IN and BA OUT turn off.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
BUSY IN
(N0100420)
+24V
+24V
UR OUT(T01000E6)
LR IN
(N0100423)
+24V
LE IM
(N0100424)
BA OUT
(T01000E5)
Signal output during waiting
for board between machines
I/O BOARD
GND GND
14
11
12
7
4
8
3
1
Signal output during board
carry-in
Signal input to request board
carry-out
NEXT INTERFACE circuit
NEXT INTERFACE
connector
NEXT INTERFACE
AMP 206043-1
(14-pin receptacle)
This machine
Downstream machine
Signal input during automatic
operation
Signal output during automatic
operation
53A04-L4-00
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Board transfer signal specifications
NEXTINTERFACE
Pin No. Signal name Address I/O specifications Signal specifications
1 +24V Input common (+24V)
Signal input during board carry-in
2 BUSY IN N0100420 Voltage input
3 BA OUT T01000E5 Relay contact (zero voltage) output
Signal output to request board
carry-out
4 BA OUT T01000E5 Relay contact (zero voltage) output
5 NC
6 NC (with dummy pins) (Prevents misinsertion.)
7 GND
8 NC
9 UR OUT T01000E6 Relay contact (zero voltage) output
Signal output during automatic
operation
10 UR OUT T01000E6 Relay contact (zero voltage) output
11 +24V Input common (+24V)
Signal input during automatic
operation
12 LR IN N0100423 Voltage input
13 +24V Input common (+24V)
Signal input during waiting for
board between machines
14 LE IN N0100424 Voltage input