00192576-01 - 第34页

1 1. 12 34 1 X 1 – (1 ) – (2 ) – X (3) – X (4) – X AC (5) 1 – (PCB – – –

1

1.12

33

1

1

(1) 1( 1)

(2)

2( 2)

(3)

3( 3)

(4)

4( 4)

1

1

– X

– Y

1

1

1.12

34

1

X 1

–

(1)

–

(2)

– X

(3)

– X

(4)

– X

AC (5)

1

–

(PCB

–

–

–

1

1.12

35

1

3

2.5 m/sec.

375 mm

400 mm

420 mm

1µm

(1) 1(2)2

(3)

3(4)4

(5)

(6)