00192576-01 - 第36页

1 1. 12 36 1 – – Y – Y 1 Y 1 (7) (8) 2.5 m/sec. 1 - 688.5 m m 2 - 768.5 m m 3 - 688.5 m m 4 - 768.5 m m 1530 mm 1µ m

1

1.12

35

1

3

2.5 m/sec.

375 mm

400 mm

420 mm

1µm

(1) 1(2)2

(3)

3(4)4

(5)

(6)

1

1.12

36

1

–

– Y

– Y

1

Y

1

(7) (8)

2.5 m/sec.

1 - 688.5 mm

2 - 768.5 mm

3 - 688.5 mm

4 - 768.5 mm

1530 mm

1µm

1

1.13

37

1

1

1

(1) (2) " "

(3) (4)

(5) Z (6)