4OM-996-007 - 第121页

Fig. 4A68-2 As grease flows to the diffusion plates from the anchor bolts lo- cated under the plates, see the photos above and wipe it off with a cotton swab, etc. Be sure to clean the lower surfaces of the diffusion pla…

1.4.5 Cleaning of Diffusion Plate (Upper Surface)

The following describes how to wipe off grease from the upper sur-

face of the diffusion plate.

(1) Select the head to be degreased and detach all nozzles.

Refer to "1.4.4 Detachment and Attachment of Vacuum Nozzle" for

how to detach the nozzles.

Fig. 4A68-1

(2) Select the [Head Turn n] button (*1) and press the [ON] button (en-

titled "MOVE"). In 2 seconds, press the [ENABLE] button on the

operation panel. The head at Station #6 rotates in increments of

120 degrees. Repeat the head rotation and wiping until the diffu-

sion plates are completely degreased.

(3) Press the [Back] or the [Next] button (*2) to change the head No.

described on the [Head Turn n] button (*1) to the desired one to be

degreased.

By using the [Back] or the [Next] button, it becomes possible to

rotate a head at Stations #7 and #5.

1.4 Maintenance Method

0509-002 1-55 AIM01ETRP

Fig. 4A68-2

As grease flows to the diffusion plates from the anchor bolts lo-

cated under the plates, see the photos above and wipe it off with a

cotton swab, etc.

Be sure to clean the lower surfaces of the diffusion plates

as shown below.

Fig. 4A68-3

(4) Select the head to be degreased subsequently and repeat the above-

described degreasing operation. Follow this procedure until all dif-

fusion plates are degreased.

Refer to "1.4.4 Detachment and Attachment of Vacuum Nozzle" for

how to select a head.

Note

Wipe off grease from

these areas.

Mirror

1.4 Maintenance Method

0509-001 1-55-1 AIM01ETRP

Head Anchor Bolt

1.4.6 Disassembly, Cleaning, and Lubrication of Miniature Stroke

Bearing

Since the disassembly, cleaning, and lubrication work of the minia-

ture stroke bearings requires highly sophisticated technique, consult

our service personnel for details.

••

• Time for Inspection, Cleaning, and Lubrication

Perform inspections every month.

Cleaning and lubrication are required when dirt and dust have accu-

mulated on the sliding part of the shaft and the movement is ham-

pered or on the hollow portion of the shaft and the suction force has

deteriorated.

Be sure to clean the miniature stroke bearing every 6 months.

• Disassembly of Miniature Stroke Bearing

Disassembly Procedure

(1) Set all nozzles to "L Level".

Refer to "4.2.2 "Manual Opn" Tab" in "Section

6 (Volume 2: Operation (Supervisor)" for the

detailed information on how to change the

nozzle level.

(2) Make the X/Y table retreat.

Refer to "4.2.1 "Noz Cleaning" Tab" in "Sec-

tion 6 (Volume 2: Operation (Supervisor)" for

the detailed information on how to make the

X/Y table retreat.

(3) Turn off the power and air sources of the ma-

chine to discharge the air from the machine.

(4) Detachment of Head Assembly

(4-1) Loosen 2 M4L12 bolts (upper ones) and 2

M4L16 bolts (lower ones) fastening the head

and detach the head assembly.

(4-2) Pull out the air hose.

(4-3) Pull the head forward to detach.

Fig. 4A69

1.4 Maintenance Method

0509-003 1-56 AIM01ETRP

Notice