4OM-996-007 - 第122页

1.4.6 Disassembly , Cleaning, and Lubrication of Miniature Stroke Bearing Since the disassembly , cleaning, and lubrication work of the minia- ture stroke bearings requires highly sophisticated technique, consult our ser…

Fig. 4A68-2

As grease flows to the diffusion plates from the anchor bolts lo-

cated under the plates, see the photos above and wipe it off with a

cotton swab, etc.

Be sure to clean the lower surfaces of the diffusion plates

as shown below.

Fig. 4A68-3

(4) Select the head to be degreased subsequently and repeat the above-

described degreasing operation. Follow this procedure until all dif-

fusion plates are degreased.

Refer to "1.4.4 Detachment and Attachment of Vacuum Nozzle" for

how to select a head.

Note

Wipe off grease from

these areas.

Mirror

1.4 Maintenance Method

0509-001 1-55-1 AIM01ETRP

Head Anchor Bolt

1.4.6 Disassembly, Cleaning, and Lubrication of Miniature Stroke

Bearing

Since the disassembly, cleaning, and lubrication work of the minia-

ture stroke bearings requires highly sophisticated technique, consult

our service personnel for details.

••

• Time for Inspection, Cleaning, and Lubrication

Perform inspections every month.

Cleaning and lubrication are required when dirt and dust have accu-

mulated on the sliding part of the shaft and the movement is ham-

pered or on the hollow portion of the shaft and the suction force has

deteriorated.

Be sure to clean the miniature stroke bearing every 6 months.

• Disassembly of Miniature Stroke Bearing

Disassembly Procedure

(1) Set all nozzles to "L Level".

Refer to "4.2.2 "Manual Opn" Tab" in "Section

6 (Volume 2: Operation (Supervisor)" for the

detailed information on how to change the

nozzle level.

(2) Make the X/Y table retreat.

Refer to "4.2.1 "Noz Cleaning" Tab" in "Sec-

tion 6 (Volume 2: Operation (Supervisor)" for

the detailed information on how to make the

X/Y table retreat.

(3) Turn off the power and air sources of the ma-

chine to discharge the air from the machine.

(4) Detachment of Head Assembly

(4-1) Loosen 2 M4L12 bolts (upper ones) and 2

M4L16 bolts (lower ones) fastening the head

and detach the head assembly.

(4-2) Pull out the air hose.

(4-3) Pull the head forward to detach.

Fig. 4A69

1.4 Maintenance Method

0509-003 1-56 AIM01ETRP

Notice

(5) Loosen 3 setscrews fastening the diffusion

plate with the 2 mm bit (Standard Accessory

Part: 630 116 3673) and detach the diffu-

sion plate from the head.

Do not apply a wrench, etc., to the mag-

net for head origin detection.

Otherwise, the magnet will be

demagnetized.

(6) Loosen three setscrews fastening the diffu-

sion plate and detach the plate from the head.

1.4 Maintenance Method

Fig. 4A71

Removal from Head Bottom

Fig. 4A70

0412-002 1-57 AIM01ETRP

Notice