MIL- STD-883F 2004 TEST METHOD STANDARD MICROCIRCUITS - 第326页
MIL-STD-883F METHOD 2018.4 18 June 2004 14 STATIONARY (EVAPORATION) W AFER-HOLDER SYSTEM FIGURE 2018-4. W afer sampli ng procedur es (s ee table I ) . *
MIL-STD-883F
METHOD 2018.4
18 June 2004
13
FIGURE 2018-3. Viewing angle
.
MIL-STD-883F
METHOD 2018.4
18 June 2004
14
STATIONARY (EVAPORATION) WAFER-HOLDER SYSTEM
FIGURE 2018-4. Wafer sampling procedures (see table I)
.
*
MIL-STD-883F
METHOD 2018.4
18 June 2004
15
ROTATING STATIONARY (SPUTTERING) PLANETARY OR CONTINUOUS FEED WAFER-HOLDER SYSTEM
FIGURE 2018-4. Wafer sampling procedures (see table I)
- Continued.
*