MIL- STD-883F 2004 TEST METHOD STANDARD MICROCIRCUITS - 第339页

MIL-STD-883F METHOD 2018.4 18 June 2004 27 FI GURE 2018-16. ( 6,000X) . Steep passi vation s tep (MOS) (acc ept).

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MIL-STD-883F
METHOD 2018.4
18 June 2004
26
FIGURE 2018-15. 7,200X
.
Thinning at passivation step with less than 50
percent of cross-sectional area remaining at
step (multi-level metal) (reject).
MIL-STD-883F
METHOD 2018.4
18 June 2004
27
FIGURE 2018-16. (6,000X)
.
Steep passivation step (MOS) (accept).
MIL-STD-883F
METHOD 2018.4
18 June 2004
28
FIGURE 2018-17. 9,500X
.
Steep passivation step (MOS) (reject).