NPM Calibration Manual-En - 第10页

NPM Maint en anc e E di ti on 9.3 Pl ane Com pensati on XY EJM9BE-M B-09M-21 Page 9-9 12 Press [OK]. 13 Press + [PlaneCorrX Y]. • T he cali br ation on the f ront side is carr i ed out, f ollowed by that on the rear si d…

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NPM
Maintenance Edition
9.3 Plane Compensation XY
Page 9-8 EJM9BE-MB-09M-21
6
Press + [OK].
•
The head moves to the retraction position.
7
Turn OFF the servo switch.
8
Open the safety cover.
9
Set the plane-compensation jig with
its right end fit to the reference mark
on the upper surface of the front rail.
∗
(Common to both the left-to-right and
right-to-left flows.)
10
Close the safety cover.
11
Turn ON the servo switch.
UnitCalibAxisSurface-03E00
6
Reference mark
NPM
Maintenance Edition
9.3 Plane Compensation XY
EJM9BE-MB-09M-21 Page 9-9
12
Press [OK].
13
Press + [PlaneCorrXY].
•
The calibration on the front side is carried out,
followed by that on the rear side.
14
Check that it is successfully complete.
UnitCalibAxisSurface-04E00
12
UnitCalibAxisSurface-05E00
13
UnitCalibAxisSurface-06E00
14
NPM
Maintenance Edition
9.3 Plane Compensation XY
Page 9-10 EJM9BE-MB-09M-21
15
Press .
•
When exiting this screen to the other one, you
are always prompted to save the data.
∗
To save the data obtained by the calibration,
press [Yes].
•
If you press [No], the return-to-origin process
is carried out and the data obtained by the
calibration are lost.
•
After the above operation, the next screen is
displayed.
16
Press + [OK].
•
The head moves to the retraction position.
17
Turn OFF the servo switch.
18
Open the safety cover.
UnitCalibAxisSurface-07E00
15
UnitCalibAxisSurface-08E00
16