00198371-01_UM_SWS-EN - 第113页
User manual SIPLACE Wafer System (SWS) 6 Options Edition 04/2018 6.3 SWS wafer stretcher (expander) 113 6 Fig. 6.3 - 2 Wafer support with SWS wafer stretcher (expander) 6 1
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
112
6
Fig. 6.3 - 1 Wafer support with SIPLACE SWS Wafer Stretcher
(1) Stretcher frame with wafer support and downholder plate
(2) Heater fan
6.3.1 Safety instructions
6
2
1
1
CAUTION
Risk of burns due to high temperatures!
The heating can reach temperatures of up to 60°C.
Do not reach into the area around the fan with your hands.
Be careful when touching the wafer support.
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
113
6
Fig. 6.3 - 2 Wafer support with SWS wafer stretcher (expander)
6
1
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
114
6.3.2 Technical data
6
6
SWS wafer stretcher (expander)
Value
Wafer frame 8" or 12"
Wafer width 10.5 " and 10.8"
Weight of stretcher with wafer support 8 " 14 kg
Weight of stretcher with wafer support 12 " 15 kg
Wafer frame (metal and plastic) Up to 3.5 mm thick
Minimum operating pressure 4.0 bar
Maximum operating pressure 5.5 bar
Travel time whole stroke Approx. 2 seconds
Lowering time Approx. 2 seconds
Stretching height (configurable)
*a
*)aThe specified stretching heights relate to a wafer frame with a thickness of 1.5 mm. The following applies to
other wafer frame thicknesses:
Stretching height = set stretching height + frame thickness -1.5 mm
2 mm, 4 mm, 6 mm, 8 mm
Clamping speed wafer centering 0.5 to 1.0 seconds
PLEASE NOTE
Definition
Extensive tests with various materials are conducted during the product development
phase.
However, due to the multitude of wafer foils available, the many die sizes and wafer
frames, we are unable to make a general function promise for all imaginable materials.
New materials should therefore be tested in advance, if there is any doubt