00198371-01_UM_SWS-EN - 第119页
User manual SIPLACE Wafer System (SWS) 6 Options Edition 04/2018 6.3 SWS wafer stretcher (expander) 119 6.3.5.2 Settings Fig. 6.3 - 5 Wafer support - setting the frame width Remove the screws at the four point s (1) an…
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
118
6.3.5 Setting the frame width for 8" wafer supports
The width of the wafer needs to be set for 8" wafer support. This is not needed for 12" wafer sup-
ports.
Wafers with a frame width of 10.5" (FF 105) or 10.8" (FF 108) can be processed. The mechanical
adjustments must be made at seven positions, depending on the frame width.
6.3.5.1 Preparations
Close all current processes on the SWS module.
Move the wafer table into the changeover position.
Select Manual operations -> Wafer handling systems -> Go to change position.
Open the clamp.
Select Manual operations -> Wafer handling systems ->Open wafer clamp.
– The clamp will open and the expansion ring will move downwards.
Open the expander
Select Manual operations -> Wafer handling systems ->Release stretcher.
– The downholder plate will move upwards.
Select Settings -> Shut down machine.
SWS GUI and Linux are shut down properly. 6
Switch off the SWS at the main switch.
CAUTION
Avoid damage to the gripper
The gripper could be damaged while you are working on the wafer support.
Push the gripper in the direction of the wafer lift and out of the wafer support working
area.
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
119
6.3.5.2 Settings
Fig. 6.3 - 5 Wafer support - setting the frame width
Remove the screws at the four points (1) and fit these in the required position (FF105 or FF
108).
Remove the screw at the relevant point (2) and fit it in the required position (FF105 or FF 108).
Loosen the screw at the relevant point (3) and fit it in the required position (FF105 or FF 108).
Remove the screw at the relevant point (4) and fit it in the required position (FF105 or FF 108).
1
1
1
4
2
3
1
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
120
6.3.6 Converting the SWS wafer stretcher (expander)
In order to use various wafer sizes (8" and 12") with the SWS wafer stretcher (expander), you need
to convert the SWS wafer stretcher (expander).
You can order the SWS wafer stretcher (expander) as follows:
– 00519717-xx 12 inch Wafer Expander
and as an option 6
– 03079734-xx 8 inch Retrofit Kit
or
– 00519719-xx 8 inch Wafer Expander
and as an option 6
– 00519720-xx 12 inch Retrofit Kit
The following instructions describe the changeover from an 8" to a 12" wafer support (see also
“Differences in conversion from 12" to 8” on page 133).