00198371-01_UM_SWS-EN - 第120页
6 Options User manual SIPLACE Wafer System (SWS) 6.3 SWS wafer stretcher (expander) Edition 04/2018 120 6.3.6 Converting the SWS wafe r stretcher (exp ander) In order to use vario us wafer sizes (8" and 12") wi…
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
119
6.3.5.2 Settings
Fig. 6.3 - 5 Wafer support - setting the frame width
Remove the screws at the four points (1) and fit these in the required position (FF105 or FF
108).
Remove the screw at the relevant point (2) and fit it in the required position (FF105 or FF 108).
Loosen the screw at the relevant point (3) and fit it in the required position (FF105 or FF 108).
Remove the screw at the relevant point (4) and fit it in the required position (FF105 or FF 108).
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6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
120
6.3.6 Converting the SWS wafer stretcher (expander)
In order to use various wafer sizes (8" and 12") with the SWS wafer stretcher (expander), you need
to convert the SWS wafer stretcher (expander).
You can order the SWS wafer stretcher (expander) as follows:
– 00519717-xx 12 inch Wafer Expander
and as an option 6
– 03079734-xx 8 inch Retrofit Kit
or
– 00519719-xx 8 inch Wafer Expander
and as an option 6
– 00519720-xx 12 inch Retrofit Kit
The following instructions describe the changeover from an 8" to a 12" wafer support (see also
“Differences in conversion from 12" to 8” on page 133).
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
121
6.3.6.1 Parts in the 12" wafer expander retrofit kit
Fig. 6.3 - 6 Parts in the 12" wafer support retrofit kit
(1) Assembly bracket for sensor 1 (including 2 x M3x6 screws)
(2) Assembly bracket for sensor 2 (including 2 x M3x6 screws)
(3) Block with fastening screws for clamp
(4) Auxiliary tool for fixing the lifting piston, [item no. 03121551-xx] is supplied and will in future
be included in the SWS service box.
(5) Stroke ring
(6) Downholder plate right and left
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