00198371-01_UM_SWS-EN - 第128页
6 Options User manual SIPLACE Wafer System (SWS) 6.3 SWS wafer stretcher (expander) Edition 04/2018 128 Fitting the sensors in the 12" wa fer support Fit the two sensors with the assembly brackets into the wafer sup…
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
127
Fitting the sensors on the assembly brackets for the 12"
6
Fig. 6.3 - 11 Wafer support - sensor 1
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
6
Fig. 6.3 - 12 Wafer support - sensor 2
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
Fit the two sensors (2) to the assembly bracket (1) from the 12" retrofit kit.
1
2
1
2
6 Options User manual SIPLACE Wafer System (SWS)
6.3 SWS wafer stretcher (expander) Edition 04/2018
128
Fitting the sensors in the 12" wafer support
Fit the two sensors with the assembly brackets into the wafer support.
6
Fig. 6.3 - 13 Wafer support - fitting the sensors
Reconnect the sensor connections.
Fit the two sensors with the assembly brackets into the wafer support.
User manual SIPLACE Wafer System (SWS) 6 Options
Edition 04/2018 6.3 SWS wafer stretcher (expander)
129
Fitting the block to the clamp
6
Fig. 6.3 - 14 Wafer support - fitting the block for the clamp
Fit the block (2) from the 12" retrofit kit onto the clamp (1).
1
2